TWI220461B - Separable test apparatus for integral circuit - Google Patents

Abstract

Separable test apparatus is provided for integral circuit (IC), which is configured to perform a test related to electronic characteristic for an IC device. An alignment plate, at a first position, contacts with a base for aligning the position of IC device. The alignment plate provides an opining for containing the IC device. While at a second position, the alignment plate is separated from the base. A force-serving device mechanically connects with a connection portion. The connection portion is affixed to the alignment plate, wherein the force-serving device shifts the connection portion together with the alignment plate to drive the alignment from the first position to the second position. The alignment plate is positioned at the second position for the reduction of unwontedly electrical interference and the improvement of test accuracy.

Description

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V. Description of the invention (1), [Technical field to which the invention belongs] In particular, it relates to an IC test bench for use. The present invention relates to an IC test bench for radio frequency electrical testing ~ '[prior art] the integrated circuit (1 c) is to form each IC chip on a semiconductor wafer' using specific The circuit design can be used for wafer testing.

-The first picture is a schematic diagram of the side of a socket for a general test IC component. The IC component under test 110 is placed in the socket, and an upper cover 112 is used to hold down and press down the IC component under test 1 1 0 so that the IC component under test 1 contacts the contact pin 11 4 for testing. In addition, U.S. Patent No. 5,006,792 discloses a socket adapter for testing integrated circuits, the chip is placed in the socket, and the socket is placed on the test machine. U.S. Patent No. 5,537,05 1 discloses test sockets suitable for different package types. U.S. Patent No. 6, 174, 174 discloses an improved test socket for testing multi-pin IC components. The above-mentioned traditional sockets used for testing IC components, when applied to radio frequency (r a di i 0 f r e q u e n c y) electrical testing, will face the interference of the socket itself to the test, which will affect the accuracy of the test. Therefore, how to avoid the interference of the structure or device other than the IC device under test on the test is an important issue in the electrical test of the RF IC device.

Page 5 1220461 V. Description of the invention (2) III. [Summary of the invention] For the interference problem of the above-mentioned general Ic test ^ traveling emission, the present invention provides a calibration board for a separate IC test, which is used for electrical testing. , ㈣ = y = 'can avoid the interference caused by the contact between the adjustment board and the IC component to be tested. Q: To increase the accuracy of the κ test bench for radio frequency testing, the present invention provides-1C:] :! ‘Using a pneumatic cylinder to move the linkage to move the setting’ makes the adjusting plate away from the base unit when performing the electrical test, increasing the accuracy of the electrical test. / 、 Xingcheng I i L 7L 仵 According to the above, the present invention provides-a kind of radio frequency electrical test of the -1c element, including-a calibration board? ; = When in contact with a base for adjustment; there are-openings for accommodating! ... cattle, and ^ wide position. The adjustment board is off. -Power supply device [When the mechanical connection is connected in two, it is fixed to the adjustment plate with the base, and the power supply device is connected to the knife again. One position of the connection part is connected to the second position P * ^ to drive the adjustment. Board to

1220461 V. Description of the invention (3) In the work, the three-dimensional space dimensions of length, width and depth shall be included. The second figure is a schematic partial side view of a separate test bench according to the present invention. Referring to the second figure, a separate IC test bench 10 mainly includes a base 12, an alignment plate, a second power supply device 16 and a test portion 18. portion), the first power supply device 20, and the connection portion 22 (ConneCtión por 11 on). In one embodiment, the separate-type c test bench includes a substrate 24 and a stand 26 for stationary use.

First, in the present invention, the base 12 can be used to place the calibration board 14 and a test piece 1 (: several pieces (not shown in the figure). Moreover, the base 12 includes a contact 28 to support the test piece. IC components, and a number of test pins (not shown in the figure) are used to contact the IC component under test for testing. It can be understood that the base 1 2 may also include the pins required for connecting the test pins or other purposes. Peripheral circuits. Another way is that the base 12 can be electrically connected to an external circuit for testing. In addition, the base 12 can be made of any suitable material and can have a suitable geometric shape as long as a plane is used That is, in a preferred embodiment, the base 12 has a rectangular shape. The adjustment plate 14 is placed on a base 12 to adjust the position of the component to be measured. In a preferred embodiment, the adjustment Board 丨 4 has — 1C component to be tested, and contact 28 is within this opening range. Two 22 are fixed on the adjustment board U, in a preferred embodiment U =

Page 7 V. Description of the invention (4) For example, a number of links are used to mechanically connect to the ground. It can be understood that, the-end is fixed to the adjustment plate, and the adjustment plate is "made to be made in any suitable manner in any suitable material, j and the withered plate 14 can be" to have an appropriate geometric shape. The second power supply device 6 is located above the base 12 # 分 18, and is fixed on the bracket 26. When the test machine 2 is connected to the test section: the test section 18 contacts and applies a pressure in a preferred embodiment. The second power supply set 16 is mainly in -cylinder), and the test part i is flawed.

The component is placed in the open σ. The factory test rod is included. When the test K: the test head at the end of the test rod contacts the lower cup of the IC component under test. After the test is completed, the gas is touched to the test pin. Separation. It is to be noted that the second; = ;;: any appropriate human test section ^ of the 1C test stand 10 separated from the 1C component to be tested may be located at the position above the base 12 of the exposed. Further: 'It is not limited to the gas cylinder disclosed in this embodiment, but it can be installed on the L7 4-person and the second power supply device 16. It is also not limited to the aluminous cylinder. It can contain any suitable recipe that can be generated. Stepper motors such as rods or screws. The attachment device is, for example, movable. The power supply device 20 is located and fixed to the second connection mechanism connection portion 22. Can be selected, =: 6 above, can be fixed on the bracket 26. When the H day was measured, my brother placed 20 for a while, Qiu Ba? ? Adhere to Ueda and Ueda, and stay in the first power supply device. 20 Move the remote skill ^ ... The dynamic adjustment board "separate from the heart piece to be measured. One comparison =

Page 8 1220461 V. Description of the invention (5) In the example, the first power supply device 20 mainly includes a pneumatic cylinder, and the connecting portion 22 mainly includes a plurality of connecting rods, and one end of the connecting rod is fixed to the adjustment plate. 4 on. When: The adjustment steps of the test, the pneumatic cylinder supports the connecting rod downward and fixes the adjustment plate 14 on the base 12 ', that is, the adjustment plate 14 contacts the base 丨 2. To be tested 丨 The position of the c component is completed. Before the position adjustment is completed and the test is ready to be tested, the pneumatic cylinder is actuated to move the connecting rod 'and move the adjustment board 1 and 4 upward, so the adjustment board 4 and the contact 28, The 1C component under test is separated, that is, the adjustment board 14 leaves the base 12. According to one of the features of the present invention described above, when the IC component to be tested is tested, especially during radio frequency (radio freqUency) electrical test, the adjustment board 14 can be separated from the contact 28 and the IC component to be tested, which can be avoided. The calibration board 4 affects the electrical characteristics of the components under test c ^, avoids the calibration board 14 causing interference during the test, and improving the accuracy of the test. That is, one of the features of the present invention is to provide a detachable adjustment board. During the electrical test, the adjustment board can be separated from the c component to be tested. Furthermore, it can be understood that the two power supply devices of the present invention It is possible to use a power supply device to apply force to the measuring part * 4 and the connecting part 22 for actuation by means of switching assistance, and is not limited to the use of two air pressures in this embodiment. FIG. 2A is a schematic front view of an adjustment board according to the present invention. There is an opening 30 at the approximate center of the plate M $ to accommodate the IC to be tested. In a preferred embodiment, the opening 30 can be further within a range of a groove 32 of the adjustment plate 14, and the fixing portion 34 is used to ignite a connecting portion 22 such as a connecting rod. It can be understood that the adjustment board 1 4 is made of suitable materials,

The clothes are not limited to the geometric shapes shown in the figure. And the third B

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ί: A schematic side view of an adjustment board of the present invention. # 测 1CElement The yoke applies a pressure to the IC component under test, so that the IC component τ is pressed to contact the test pin for testing. According to the above, the present invention provides an IC test bench for conducting electrical testing of the I c element, including an adjustment board placed on a base and used to position the 11C element. The adjustment board has an opening for receiving the c element. A second power supply device is mechanically connected to a test portion. When the electrical test is performed, the second power supply device makes the test portion contact and apply a pressure to the IC component. A first power supply device is mechanically connected to a connection portion, and the connection portion is fixed to the adjustment board. Before the electrical test is performed, the 'first power supply device moves the connection portion to drive the adjustment plate to separate from the c element. The described embodiments are merely to explain the technical ideas and characteristics of the present invention. The purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. When the scope of the patent of the present invention cannot be limited, Any equal changes or modifications made according to the spirit disclosed in the present invention should still be covered by the patent scope of the present invention.

Page 10 1220461 Brief description of the drawings 5. [Simplified description of the drawings] The first picture is a schematic diagram of the side of the socket for testing 1C components. The second figure is a schematic partial side view of a separate IC test bench according to the present invention. FIG. 3A is a schematic front view of an adjustment board according to the present invention. FIG. 3B is a schematic side view of an adjustment board according to the present invention. Explanation of Symbols

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Claims (1)

1220461 6. Scope of patent application 1. A separate IC test stand for conducting electrical test of an IC component, the separate IC test stand includes: a calibration board, in a first position, in contact with a base For adjusting the position of the IC element, the adjusting plate has an opening for receiving the IC element, and is separated from the base when in a second position; and a first force-serving device ), The first power supply device is mechanically connected to a connection portion, and the connection portion is fixed to the adjustment board, wherein the first power supply device moves the connection portion to drive the adjustment plate to the first position and the Second position. 2. For example, the separate IC test bench of the scope of patent application, further includes a second power supply device, the first power supply device is mechanically connected to a test section, wherein when the adjustment board is in the second position The second power supply device makes the test part contact and apply a pressure to the IC component. 3. The separated IC test bench of item 2 of the patent application scope, wherein the pressure makes the IC component electrically contact the base. 4. For example, the separate IC test bench of the scope of patent application, further includes a bracket for fixing the first power supply device above the base. 5. The separated IC test bench of item 1 of the patent application scope, wherein the first power supply device includes a pneumatic cylinder. Page 12 1220461 6 · The separated type I c test bench according to item 1 of the patent application scope, wherein the connection part includes one or more connecting rods, and one end of the one or more connecting rods is fixed on the 1 adjustment board, the one or more The other end of the connecting rods is mechanically connected to the second ^ 7 type IC test bench for conducting electrical testing of an IC device. The test bench includes: an alignment plate On a base and used to adjust the position of the i C component, the adjustment plate has an opening for receiving the IC component; a first power supply device, the first power supply device is mechanically connected An erf point is connected, and a δ-xuan connection portion is fixed to the adjustment board, wherein the first power supply device moves the connection portion to drive the adjustment board to be separated from the IC component; and A first power supply device, the second power supply device is mechanically connected to a test portion, and when the electrical test is performed, the second power supply device makes the test portion contact and apply a pressure to the c element . 8. The test bench of item 7 in the scope of patent application, further comprising a stand for fixing the second power supply device above the base. ) If the IC test bench of item 8 of the patent application scope, wherein the first power supply device is placed above the second power supply device. 1220461 VI. Scope of patent application 10. The IC test bench of item 7 of the scope of patent application, wherein the first power supply device includes a pneumatic cylinder. 11. The IC test bench according to item 7 of the patent application scope, wherein the second power supply device comprises a pneumatic cylinder. 1 2. The IC test bench of item 7 of the scope of patent application, wherein the second power supply device is further used to separate the test part from the IC device after the electrical test is completed. 1 3. The IC test bench of item 7 in the scope of patent application, wherein the first power supply device is further used to fix the calibration board on the base during a calibration step. 1 4. The IC test bench of item 13 in the scope of patent application, wherein the adjustment step is performed before the electrical test. 1 5. The IC test bench of item 13 of the patent application scope, wherein after the adjustment step, the second power supply device makes the test part contact and apply a pressure to the IC device. 16. The IC test bench according to item 7 of the patent application scope, wherein the test part includes a test rod, one end of the test rod is used to connect the second power supply device, and the other end of the test rod is used to contact the IC element. Page 14 1220461 VI. Application for patent scope 1 7 · If the IC test bench for item 7 of the patent scope is applied, 1 # Α ^ ^ A 5 Hai connection part sentence contains one or more links, the one or more links One end has returned to the adjustment extension because of 77. The other end of the one or more connecting rods is mechanically connected to the first power supply device. 0 1 · If the IC test bench of item 7 of the patent application scope, The base further includes a contact for contacting the adjustment board. 19 · If the test bench of item 7 in the scope of patent application, the base further includes a plurality of test pins (P i n s) for electrical testing. · For example, the I C test bench for item 19 of the scope of patent application, wherein the pressure causes the 4 I C element to be electrically connected to the plurality of test pins. Page 15