JPS58223042A - 反射率分布測定用試料駆動装置及び駆動方法 - Google Patents

反射率分布測定用試料駆動装置及び駆動方法

Info

Publication number
JPS58223042A
JPS58223042A JP57104695A JP10469582A JPS58223042A JP S58223042 A JPS58223042 A JP S58223042A JP 57104695 A JP57104695 A JP 57104695A JP 10469582 A JP10469582 A JP 10469582A JP S58223042 A JPS58223042 A JP S58223042A
Authority
JP
Japan
Prior art keywords
sample
axis
sample holder
reflectance
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57104695A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310380B2 (OSRAM
Inventor
Reiji Sano
佐野　令而
Yoshikazu Kawachi
義和 河内
Minoru Kimura
実 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57104695A priority Critical patent/JPS58223042A/ja
Publication of JPS58223042A publication Critical patent/JPS58223042A/ja
Publication of JPS6310380B2 publication Critical patent/JPS6310380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP57104695A 1982-06-19 1982-06-19 反射率分布測定用試料駆動装置及び駆動方法 Granted JPS58223042A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57104695A JPS58223042A (ja) 1982-06-19 1982-06-19 反射率分布測定用試料駆動装置及び駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57104695A JPS58223042A (ja) 1982-06-19 1982-06-19 反射率分布測定用試料駆動装置及び駆動方法

Publications (2)

Publication Number Publication Date
JPS58223042A true JPS58223042A (ja) 1983-12-24
JPS6310380B2 JPS6310380B2 (OSRAM) 1988-03-07

Family

ID=14387606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57104695A Granted JPS58223042A (ja) 1982-06-19 1982-06-19 反射率分布測定用試料駆動装置及び駆動方法

Country Status (1)

Country Link
JP (1) JPS58223042A (OSRAM)

Also Published As

Publication number Publication date
JPS6310380B2 (OSRAM) 1988-03-07

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