JPS58219810A - 高周波圧電共振器とその製造方法 - Google Patents

高周波圧電共振器とその製造方法

Info

Publication number
JPS58219810A
JPS58219810A JP58095882A JP9588283A JPS58219810A JP S58219810 A JPS58219810 A JP S58219810A JP 58095882 A JP58095882 A JP 58095882A JP 9588283 A JP9588283 A JP 9588283A JP S58219810 A JPS58219810 A JP S58219810A
Authority
JP
Japan
Prior art keywords
electrode
high frequency
region
conductive
piezoelectric resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58095882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437603B2 (en, 2012
Inventor
マルク・ベルト
ルイ・ビダ−ル
セルジユ・ルシヨピエ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CEPE
DEREKUTORONIIKU E DO PIEZO EREKUTORISHITE SEE UU PEE UU CO
Original Assignee
CEPE
DEREKUTORONIIKU E DO PIEZO EREKUTORISHITE SEE UU PEE UU CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CEPE, DEREKUTORONIIKU E DO PIEZO EREKUTORISHITE SEE UU PEE UU CO filed Critical CEPE
Publication of JPS58219810A publication Critical patent/JPS58219810A/ja
Publication of JPH0437603B2 publication Critical patent/JPH0437603B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP58095882A 1982-06-01 1983-06-01 高周波圧電共振器とその製造方法 Granted JPS58219810A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8209511 1982-06-01
FR8209511A FR2527865A1 (fr) 1982-06-01 1982-06-01 Resonateur piezo-electrique a haute frequence et son procede de fabrication

Publications (2)

Publication Number Publication Date
JPS58219810A true JPS58219810A (ja) 1983-12-21
JPH0437603B2 JPH0437603B2 (en, 2012) 1992-06-19

Family

ID=9274512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58095882A Granted JPS58219810A (ja) 1982-06-01 1983-06-01 高周波圧電共振器とその製造方法

Country Status (7)

Country Link
US (2) US4517485A (en, 2012)
EP (1) EP0096611B1 (en, 2012)
JP (1) JPS58219810A (en, 2012)
CA (1) CA1205533A (en, 2012)
DE (1) DE3375265D1 (en, 2012)
DK (1) DK160118C (en, 2012)
FR (1) FR2527865A1 (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991012662A1 (en) * 1990-02-09 1991-08-22 Toyo Communication Equipment Co., Ltd. Structure of ultra-thin sheet piezoresonator
WO1991012663A1 (en) * 1990-02-09 1991-08-22 Toyo Communication Equipment Co., Ltd. Structure for holding ultrathin plate piezoelectric resonator in package

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2527865A1 (fr) * 1982-06-01 1983-12-02 Cepe Resonateur piezo-electrique a haute frequence et son procede de fabrication
FR2592247A1 (fr) * 1985-12-24 1987-06-26 Electronique Piezo Electr Cie Perfectionnement aux resonateurs piezoelectriques.
EP0484545B1 (en) * 1990-05-25 1997-01-22 Toyo Communication Equipment Co. Ltd. Structure of electrode and lead thereof of ultra thin plate piezoelectric resonator
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
US5668057A (en) * 1991-03-13 1997-09-16 Matsushita Electric Industrial Co., Ltd. Methods of manufacture for electronic components having high-frequency elements
JPH06291587A (ja) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd 圧電振動子
US8001962B2 (en) * 2002-08-23 2011-08-23 Sheiman Ultrasonic Research Foundation Pty Ltd. Nebulizing and drug delivery device
SE0300375D0 (sv) 2003-02-12 2003-02-12 Attana Ab Piezoelectric resonator
JP2006020020A (ja) * 2004-07-01 2006-01-19 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2006238266A (ja) * 2005-02-28 2006-09-07 Seiko Epson Corp 圧電振動片、及び圧電振動子
US7814901B2 (en) * 2005-03-09 2010-10-19 Ric Investments, Llc Nebulizing drug delivery device with increased flow rate
US8056557B2 (en) * 2005-03-09 2011-11-15 Ric Investments, Llc Nebulizing drug delivery device with barrier
ES2369034T3 (es) * 2005-05-23 2011-11-24 Biosonic Australia Pty. Ltd. Aparato para atomización y filtración de líquido.
US7568377B2 (en) * 2005-07-28 2009-08-04 University Of South Florida High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection
US20100313883A1 (en) * 2006-04-20 2010-12-16 Koninklijke Philips Electronics N.V. Ultrasonic bebulilzer with metal coated ultrasonic genrator
EP3067723A1 (en) * 2015-03-13 2016-09-14 Université Paris Diderot - Paris 7 Method for tuning one or more resonator(s)
US10352800B2 (en) * 2016-06-03 2019-07-16 Mks Instruments, Inc. Micromachined bulk acoustic wave resonator pressure sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2095376A (en) * 1934-11-24 1937-10-12 Telefunken Gmbh Piezoelectric oscillator crystal
GB579237A (en) * 1942-12-08 1946-07-29 Scophony Ltd Improvements in or relating to piezo-electric crystals for generating mechanical supersonic waves in fluids and for other purposes
US3222622A (en) * 1962-08-14 1965-12-07 Clevite Corp Wave filter comprising piezoelectric wafer electroded to define a plurality of resonant regions independently operable without significant electro-mechanical interaction
US3396287A (en) * 1965-09-29 1968-08-06 Piezo Technology Inc Crystal structures and method of fabricating them
US3694677A (en) * 1971-03-03 1972-09-26 Us Army Vhf-uhf piezoelectric resonators
US3721841A (en) * 1971-06-16 1973-03-20 Motorola Inc Contact for piezoelectric crystals
JPS5236540Y2 (en, 2012) * 1972-09-04 1977-08-19
US4339683A (en) * 1980-02-04 1982-07-13 The United States Of America As Represented By The Secretary Of The Navy Electrical connection
FR2484734A1 (fr) * 1980-06-13 1981-12-18 Cepe Resonateur piezoelectrique a composants electroniques integres, et oscillateur muni d'un tel resonateur
FR2527865A1 (fr) * 1982-06-01 1983-12-02 Cepe Resonateur piezo-electrique a haute frequence et son procede de fabrication

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991012662A1 (en) * 1990-02-09 1991-08-22 Toyo Communication Equipment Co., Ltd. Structure of ultra-thin sheet piezoresonator
WO1991012663A1 (en) * 1990-02-09 1991-08-22 Toyo Communication Equipment Co., Ltd. Structure for holding ultrathin plate piezoelectric resonator in package
US5185550A (en) * 1990-02-09 1993-02-09 Toyo Communication Equipment Co., Ltd. Structure for supporting a resonator using an ultrathin piezoelectric plate in a package
US5218328A (en) * 1990-02-09 1993-06-08 Toyo Communication Equipment Co., Ltd. Structure for a resonator using an ultrathin piezoelectric substrate

Also Published As

Publication number Publication date
DK242783D0 (da) 1983-05-30
EP0096611B1 (fr) 1988-01-07
FR2527865B1 (en, 2012) 1985-02-22
JPH0437603B2 (en, 2012) 1992-06-19
DE3375265D1 (en) 1988-02-11
CA1205533A (en) 1986-06-03
US4517485A (en) 1985-05-14
DK160118B (da) 1991-01-28
DK160118C (da) 1991-07-01
EP0096611A1 (fr) 1983-12-21
FR2527865A1 (fr) 1983-12-02
DK242783A (da) 1983-12-02
US4656707A (en) 1987-04-14

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