CA1205533A - High-frequency piezoelectric resonator and method of fabrication of said resonator - Google Patents
High-frequency piezoelectric resonator and method of fabrication of said resonatorInfo
- Publication number
- CA1205533A CA1205533A CA000429180A CA429180A CA1205533A CA 1205533 A CA1205533 A CA 1205533A CA 000429180 A CA000429180 A CA 000429180A CA 429180 A CA429180 A CA 429180A CA 1205533 A CA1205533 A CA 1205533A
- Authority
- CA
- Canada
- Prior art keywords
- resonator
- electrode
- conductive
- thinned region
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 12
- 239000010453 quartz Substances 0.000 claims abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000004544 sputter deposition Methods 0.000 claims abstract description 8
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 6
- 238000003754 machining Methods 0.000 claims abstract description 4
- 238000000151 deposition Methods 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 239000004568 cement Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000005137 deposition process Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 210000002105 tongue Anatomy 0.000 description 21
- 239000013078 crystal Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 230000032683 aging Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003562 lightweight material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8209511 | 1982-06-01 | ||
| FR8209511A FR2527865A1 (fr) | 1982-06-01 | 1982-06-01 | Resonateur piezo-electrique a haute frequence et son procede de fabrication |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1205533A true CA1205533A (en) | 1986-06-03 |
Family
ID=9274512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000429180A Expired CA1205533A (en) | 1982-06-01 | 1983-05-30 | High-frequency piezoelectric resonator and method of fabrication of said resonator |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US4517485A (en, 2012) |
| EP (1) | EP0096611B1 (en, 2012) |
| JP (1) | JPS58219810A (en, 2012) |
| CA (1) | CA1205533A (en, 2012) |
| DE (1) | DE3375265D1 (en, 2012) |
| DK (1) | DK160118C (en, 2012) |
| FR (1) | FR2527865A1 (en, 2012) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2527865A1 (fr) * | 1982-06-01 | 1983-12-02 | Cepe | Resonateur piezo-electrique a haute frequence et son procede de fabrication |
| FR2592247A1 (fr) * | 1985-12-24 | 1987-06-26 | Electronique Piezo Electr Cie | Perfectionnement aux resonateurs piezoelectriques. |
| DE69029086T2 (de) * | 1990-02-09 | 1997-03-06 | Toyo Communication Equip | Struktur zur Festhaltung in einem Modül eines flachen ultradünnen piezoelektrischen Resonators |
| JP3102869B2 (ja) * | 1990-02-09 | 2000-10-23 | 東洋通信機株式会社 | 超薄板圧電共振子の構造 |
| EP0484545B1 (en) * | 1990-05-25 | 1997-01-22 | Toyo Communication Equipment Co. Ltd. | Structure of electrode and lead thereof of ultra thin plate piezoelectric resonator |
| US5747857A (en) * | 1991-03-13 | 1998-05-05 | Matsushita Electric Industrial Co., Ltd. | Electronic components having high-frequency elements and methods of manufacture therefor |
| US5668057A (en) * | 1991-03-13 | 1997-09-16 | Matsushita Electric Industrial Co., Ltd. | Methods of manufacture for electronic components having high-frequency elements |
| JPH06291587A (ja) * | 1992-07-08 | 1994-10-18 | Matsushita Electric Ind Co Ltd | 圧電振動子 |
| US8001962B2 (en) * | 2002-08-23 | 2011-08-23 | Sheiman Ultrasonic Research Foundation Pty Ltd. | Nebulizing and drug delivery device |
| SE0300375D0 (sv) | 2003-02-12 | 2003-02-12 | Attana Ab | Piezoelectric resonator |
| JP2006020020A (ja) * | 2004-07-01 | 2006-01-19 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
| JP2006238266A (ja) * | 2005-02-28 | 2006-09-07 | Seiko Epson Corp | 圧電振動片、及び圧電振動子 |
| US7814901B2 (en) * | 2005-03-09 | 2010-10-19 | Ric Investments, Llc | Nebulizing drug delivery device with increased flow rate |
| US8056557B2 (en) * | 2005-03-09 | 2011-11-15 | Ric Investments, Llc | Nebulizing drug delivery device with barrier |
| ES2369034T3 (es) * | 2005-05-23 | 2011-11-24 | Biosonic Australia Pty. Ltd. | Aparato para atomización y filtración de líquido. |
| US7568377B2 (en) * | 2005-07-28 | 2009-08-04 | University Of South Florida | High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection |
| US20100313883A1 (en) * | 2006-04-20 | 2010-12-16 | Koninklijke Philips Electronics N.V. | Ultrasonic bebulilzer with metal coated ultrasonic genrator |
| EP3067723A1 (en) * | 2015-03-13 | 2016-09-14 | Université Paris Diderot - Paris 7 | Method for tuning one or more resonator(s) |
| US10352800B2 (en) * | 2016-06-03 | 2019-07-16 | Mks Instruments, Inc. | Micromachined bulk acoustic wave resonator pressure sensor |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2095376A (en) * | 1934-11-24 | 1937-10-12 | Telefunken Gmbh | Piezoelectric oscillator crystal |
| GB579237A (en) * | 1942-12-08 | 1946-07-29 | Scophony Ltd | Improvements in or relating to piezo-electric crystals for generating mechanical supersonic waves in fluids and for other purposes |
| US3222622A (en) * | 1962-08-14 | 1965-12-07 | Clevite Corp | Wave filter comprising piezoelectric wafer electroded to define a plurality of resonant regions independently operable without significant electro-mechanical interaction |
| US3396287A (en) * | 1965-09-29 | 1968-08-06 | Piezo Technology Inc | Crystal structures and method of fabricating them |
| US3694677A (en) * | 1971-03-03 | 1972-09-26 | Us Army | Vhf-uhf piezoelectric resonators |
| US3721841A (en) * | 1971-06-16 | 1973-03-20 | Motorola Inc | Contact for piezoelectric crystals |
| JPS5236540Y2 (en, 2012) * | 1972-09-04 | 1977-08-19 | ||
| US4339683A (en) * | 1980-02-04 | 1982-07-13 | The United States Of America As Represented By The Secretary Of The Navy | Electrical connection |
| FR2484734A1 (fr) * | 1980-06-13 | 1981-12-18 | Cepe | Resonateur piezoelectrique a composants electroniques integres, et oscillateur muni d'un tel resonateur |
| FR2527865A1 (fr) * | 1982-06-01 | 1983-12-02 | Cepe | Resonateur piezo-electrique a haute frequence et son procede de fabrication |
-
1982
- 1982-06-01 FR FR8209511A patent/FR2527865A1/fr active Granted
-
1983
- 1983-05-24 EP EP83401025A patent/EP0096611B1/fr not_active Expired
- 1983-05-24 DE DE8383401025T patent/DE3375265D1/de not_active Expired
- 1983-05-26 US US06/498,513 patent/US4517485A/en not_active Expired - Fee Related
- 1983-05-30 DK DK242783A patent/DK160118C/da not_active IP Right Cessation
- 1983-05-30 CA CA000429180A patent/CA1205533A/en not_active Expired
- 1983-06-01 JP JP58095882A patent/JPS58219810A/ja active Granted
-
1985
- 1985-02-25 US US06/705,025 patent/US4656707A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DK242783D0 (da) | 1983-05-30 |
| EP0096611B1 (fr) | 1988-01-07 |
| FR2527865B1 (en, 2012) | 1985-02-22 |
| JPH0437603B2 (en, 2012) | 1992-06-19 |
| DE3375265D1 (en) | 1988-02-11 |
| US4517485A (en) | 1985-05-14 |
| DK160118B (da) | 1991-01-28 |
| DK160118C (da) | 1991-07-01 |
| EP0096611A1 (fr) | 1983-12-21 |
| FR2527865A1 (fr) | 1983-12-02 |
| JPS58219810A (ja) | 1983-12-21 |
| DK242783A (da) | 1983-12-02 |
| US4656707A (en) | 1987-04-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |