JPS58218046A - 磁気記録媒体の製造装置 - Google Patents

磁気記録媒体の製造装置

Info

Publication number
JPS58218046A
JPS58218046A JP9923782A JP9923782A JPS58218046A JP S58218046 A JPS58218046 A JP S58218046A JP 9923782 A JP9923782 A JP 9923782A JP 9923782 A JP9923782 A JP 9923782A JP S58218046 A JPS58218046 A JP S58218046A
Authority
JP
Japan
Prior art keywords
cooling
substrate
cooled
center
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9923782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125142B2 (enrdf_load_stackoverflow
Inventor
Soichi Matsuzaki
松崎 壮一
Minoru Osada
実 長田
Seiji Yasui
政治 安井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lincstech Circuit Co Ltd
Original Assignee
Hitachi Condenser Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Condenser Co Ltd filed Critical Hitachi Condenser Co Ltd
Priority to JP9923782A priority Critical patent/JPS58218046A/ja
Publication of JPS58218046A publication Critical patent/JPS58218046A/ja
Publication of JPH0125142B2 publication Critical patent/JPH0125142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP9923782A 1982-06-11 1982-06-11 磁気記録媒体の製造装置 Granted JPS58218046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9923782A JPS58218046A (ja) 1982-06-11 1982-06-11 磁気記録媒体の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9923782A JPS58218046A (ja) 1982-06-11 1982-06-11 磁気記録媒体の製造装置

Publications (2)

Publication Number Publication Date
JPS58218046A true JPS58218046A (ja) 1983-12-19
JPH0125142B2 JPH0125142B2 (enrdf_load_stackoverflow) 1989-05-16

Family

ID=14242073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9923782A Granted JPS58218046A (ja) 1982-06-11 1982-06-11 磁気記録媒体の製造装置

Country Status (1)

Country Link
JP (1) JPS58218046A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014097545A1 (ja) * 2012-12-21 2014-06-26 株式会社神戸製鋼所 基材搬送ローラ
JPWO2015060234A1 (ja) * 2013-10-25 2017-03-09 コニカミノルタ株式会社 成膜方法及び成膜装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014097545A1 (ja) * 2012-12-21 2014-06-26 株式会社神戸製鋼所 基材搬送ローラ
JP2014122395A (ja) * 2012-12-21 2014-07-03 Kobe Steel Ltd 基材搬送ロール
CN104854256A (zh) * 2012-12-21 2015-08-19 株式会社神户制钢所 基材输送辊
US9550202B2 (en) 2012-12-21 2017-01-24 Kobe Steel, Ltd. Substrate transport roller
JPWO2015060234A1 (ja) * 2013-10-25 2017-03-09 コニカミノルタ株式会社 成膜方法及び成膜装置

Also Published As

Publication number Publication date
JPH0125142B2 (enrdf_load_stackoverflow) 1989-05-16

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