JPS58216439A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS58216439A JPS58216439A JP57100252A JP10025282A JPS58216439A JP S58216439 A JPS58216439 A JP S58216439A JP 57100252 A JP57100252 A JP 57100252A JP 10025282 A JP10025282 A JP 10025282A JP S58216439 A JPS58216439 A JP S58216439A
- Authority
- JP
- Japan
- Prior art keywords
- region
- film
- oxide film
- impurity
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P54/00—Cutting or separating of wafers, substrates or parts of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/112—Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Dicing (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57100252A JPS58216439A (ja) | 1982-06-09 | 1982-06-09 | 半導体装置 |
| DE19833320424 DE3320424A1 (de) | 1982-06-09 | 1983-06-06 | Halbleiterelement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57100252A JPS58216439A (ja) | 1982-06-09 | 1982-06-09 | 半導体装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58216439A true JPS58216439A (ja) | 1983-12-16 |
Family
ID=14269027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57100252A Pending JPS58216439A (ja) | 1982-06-09 | 1982-06-09 | 半導体装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS58216439A (https=) |
| DE (1) | DE3320424A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2009088081A1 (ja) * | 2008-01-09 | 2011-05-26 | ローム株式会社 | 半導体装置及びその製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3817918A1 (de) * | 1987-05-27 | 1988-12-08 | Mitsubishi Electric Corp | Halbleiterspeichereinrichtung |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3247428A (en) * | 1961-09-29 | 1966-04-19 | Ibm | Coated objects and methods of providing the protective coverings therefor |
| US3967310A (en) * | 1968-10-09 | 1976-06-29 | Hitachi, Ltd. | Semiconductor device having controlled surface charges by passivation films formed thereon |
| JPS5321989B2 (https=) * | 1973-10-12 | 1978-07-06 | ||
| NL176415C (nl) * | 1976-07-05 | 1985-04-01 | Hitachi Ltd | Halfgeleidergeheugeninrichting omvattende een matrix van halfgeleidergeheugencellen, die bestaan uit een veldeffekttransistor en een opslagcapaciteit. |
-
1982
- 1982-06-09 JP JP57100252A patent/JPS58216439A/ja active Pending
-
1983
- 1983-06-06 DE DE19833320424 patent/DE3320424A1/de active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2009088081A1 (ja) * | 2008-01-09 | 2011-05-26 | ローム株式会社 | 半導体装置及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3320424C2 (https=) | 1990-10-31 |
| DE3320424A1 (de) | 1983-12-15 |
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