JPS5821127A - 振動検知装置 - Google Patents
振動検知装置Info
- Publication number
- JPS5821127A JPS5821127A JP11988881A JP11988881A JPS5821127A JP S5821127 A JPS5821127 A JP S5821127A JP 11988881 A JP11988881 A JP 11988881A JP 11988881 A JP11988881 A JP 11988881A JP S5821127 A JPS5821127 A JP S5821127A
- Authority
- JP
- Japan
- Prior art keywords
- base board
- metallic base
- film
- metallic
- electrode piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 title abstract 3
- 238000005524 ceramic coating Methods 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000005476 soldering Methods 0.000 abstract 1
- 238000005507 spraying Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11988881A JPS5821127A (ja) | 1981-07-29 | 1981-07-29 | 振動検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11988881A JPS5821127A (ja) | 1981-07-29 | 1981-07-29 | 振動検知装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12874285A Division JPS6117029A (ja) | 1985-06-13 | 1985-06-13 | 振動検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5821127A true JPS5821127A (ja) | 1983-02-07 |
| JPS626169B2 JPS626169B2 (enrdf_load_stackoverflow) | 1987-02-09 |
Family
ID=14772712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11988881A Granted JPS5821127A (ja) | 1981-07-29 | 1981-07-29 | 振動検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821127A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850436A (ja) * | 1981-09-21 | 1983-03-24 | Toyota Motor Corp | ノツキングセンサ |
-
1981
- 1981-07-29 JP JP11988881A patent/JPS5821127A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850436A (ja) * | 1981-09-21 | 1983-03-24 | Toyota Motor Corp | ノツキングセンサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS626169B2 (enrdf_load_stackoverflow) | 1987-02-09 |
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