JPS58207373A - エツチング方法 - Google Patents
エツチング方法Info
- Publication number
- JPS58207373A JPS58207373A JP8809882A JP8809882A JPS58207373A JP S58207373 A JPS58207373 A JP S58207373A JP 8809882 A JP8809882 A JP 8809882A JP 8809882 A JP8809882 A JP 8809882A JP S58207373 A JPS58207373 A JP S58207373A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etched
- shadow mask
- speed
- steel sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 88
- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000000463 material Substances 0.000 claims abstract description 19
- 239000007788 liquid Substances 0.000 claims abstract 4
- 238000001035 drying Methods 0.000 claims description 8
- 241001481789 Rupicapra Species 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 abstract 3
- 239000010959 steel Substances 0.000 abstract 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 11
- 238000005096 rolling process Methods 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 7
- 229910052742 iron Inorganic materials 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229910001374 Invar Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N ferric oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8809882A JPS58207373A (ja) | 1982-05-26 | 1982-05-26 | エツチング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8809882A JPS58207373A (ja) | 1982-05-26 | 1982-05-26 | エツチング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58207373A true JPS58207373A (ja) | 1983-12-02 |
| JPH0427299B2 JPH0427299B2 (enrdf_load_stackoverflow) | 1992-05-11 |
Family
ID=13933386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8809882A Granted JPS58207373A (ja) | 1982-05-26 | 1982-05-26 | エツチング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58207373A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0372089A (ja) * | 1989-08-11 | 1991-03-27 | Matsushita Electric Works Ltd | 配線回路形成装置 |
-
1982
- 1982-05-26 JP JP8809882A patent/JPS58207373A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0372089A (ja) * | 1989-08-11 | 1991-03-27 | Matsushita Electric Works Ltd | 配線回路形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0427299B2 (enrdf_load_stackoverflow) | 1992-05-11 |
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