JPS58202798A - Chuck device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention provides illumination for cleaning silver-containing spray, etc.
This relates to a locking device.

[Technical background of the invention and its problems]

Conventional chuck devices either use a 7 actuator such as an air cylinder with a piston rod at an angle to open and close a pair of opening/closing members; A special interlocking link mechanism is provided between the tip and the pair of opening/closing members, but since both use cylinder-shaped actuators with piston rods, this can be compactly incorporated between the pair of opening/closing members. A: The equipment becomes larger and its scope of application is limited.

[Objective of the Invention 1] The present invention provides a chuck device in which a cylinder mechanism for opening and closing is provided in a very compact manner between a pair of opening and closing members.

[#1 Key Point of the Invention] The structure of the present invention is such that the fixed support member includes an intermediate portion of the guide shaft;
It is fixed to the middle part of a cylindrical cylinder with a working fluid supply and discharge hole provided in the peripheral wall and both shoulders are open, and a piston member is slidably and airtightly fitted into each of the hooks of this cylinder. This invention relates to the structure of a chuck device, characterized in that internal opening/closing members are integrally provided on the outer end surfaces of both piston members and are slidably fitted to the guide shaft and biased in the closing direction by a spring. Its action is by supplying fluid, .
When the opening/closing part phase of t11 is opened and this FF 1' is pulled out, the 'spring' causes the opening 1 protrusion s17 of the 11i111 to grip the object.

[Embodiments of the invention]

Hereinafter, the present invention will be described in detail with reference to the following embodiments.

What is shown in Figure 1 is an automatic washing and drying device.

It consists of a cleaning device section (11) and a drying device section (2).

Cleaning equipment #1 section (11 is the carrier loading loader (
In addition to providing a recess (5) in which X31 and a plurality of liquid tanks (41) are installed, a transport drive section that is slightly longer than these four sections (5) is provided at the rear, and a transport drive that covers this drive section is provided. Wadding 1 from one end to the other end on the front of the section cover (6):
1 slotted hole (force is drilled and installed). This slotted hole (7)
弗'Jg resin, vinyl chloride resin that can be moved freely along 71.

It is closed from the inside by a band-shaped seal member (8) made of a corrosion-resistant flexible material such as polypropylene resin or polyethylene resin, and this band-shaped seal member (8) and a legally movable square plate (9) are connected to an elongated hole. (The base end of the arm Qα is rotatably fitted to the square plate (9), and
A chuck device uz for gripping the cleaning carrier Uυ is provided at the tip of the arm Ql. a3 is the operation panel, [1
41 is an exhaust hole.

Also, the drying device section (2) has an interface Q? )and,
It consists of a carrier feeding mechanism u8, a dryer Q9, and an unloader (4) for carrying out the carrier.

Then, the carrier αυ transported to the loader (31) is
It is held by a chuck device uz, and is sequentially immersed in each liquid tank (41) by arm αQ, and in the process, each liquid tank (
4) Etching, resist removal, cleaning, etc. of the wafer stored in the carrier tank is carried out using the processing solution in the tank, and the carrier αυ in the final tank is heated to the interface 0η.
is transferred to both carrier feeding mechanisms ud by the feeder +4Q&, sent to the dryer O1 by this feeder +4Q&, taken out after drying, and finally carried out from the loader 7.

Furthermore, as shown in Figures 2 and 3, three guide rails (11!11 feet) are installed inside the distribution and conveyance drive unit cover 16) via support members (towards) the fixed base.

Of these, two rails on both sides of the support member 1241 are horizontal running rails (ljcA), and one rail on the top surface of the support member CJ41 is a rail aid for preventing horizontal digging. Each railm □□□ (2)
A traveling base 0υ is movably provided via eight sets of roller ruts arranged to sandwich the
is caused to travel horizontally by a base travel drive mechanism which will be described later.

In addition, the roller transfer is a support plate C3 that is integrated with the traveling base etc.
aK is rotatably supported, and roller q is directly supported on the lower surface of the traveling base 0υ.

To explain the driving mechanism for traveling the P base, the horizontal traveling rack west is fixed to the upper surface of the base support member (2), and the support member shown in Figure 2 is attached to the upper surface of the traveling base 6υ. Fixing the main body of a reversible motor with a brake for horizontal travel 1-1
The rotating shaft (towards) of this motor (371) passes straight through the traveling base Gυ and projects downward 111, and a lateral traveling pinion (towards) which meshes with the rack west is fixed to the upper part of this rotating shaft (9).

Further, a drive mechanism for rotation of 7 mm is provided on the upper surface of the traveling base 6υ. That is, the worm reducer 43 is fixed to the upper surface of the traveling base 6υ via a support plate, and this reducer (4!
A motor support member shaft is fixed to the upper surface of the support plate (441), and the main body of the arm rotating Kawaguchi reverse motor is fixed to this member (451).This motor (c) has a speed controller and an electromagnetic brake. It is possible to perform forward and reverse rotation according to a signal from an external arm rotation control sensor, and the rotation speed can be easily selected between slow and quick.

In addition, the gear 4 installed on the rotating shaft [η] of the KI7th motor 1 and the gear 6G installed on the rotating shaft 4 of the worm protruding from -F (-F) are meshed, and the worm reducer (An arm rotation shaft 1 is provided integrally with the worm wheel 43, and a bearing 6η is mounted on the outer peripheral surface of this arm rotation shaft 1.
A cylindrical inner cylinder body 611 is provided rotatably through the grooves, and the rotation lever I5a is fixed around the inner cylinder body 6. Furthermore, in this embodiment, the rotation lever I5a of the rotation lever 6J is fixed as shown in FIG. In the long groove ω, there is a worm reducer (bin support plate fixed to the top of the
Fit the protruding pin from the top and secure it with a rotating lever.

In addition, an outer cylinder C is fitted to the outer circumferential surface of the cylinder 6υ, and this outer cylinder ω is fitted with a square plate (9) fitted into the slot (7) K.
This square plate (91) is integrally formed with the presser plate part on the back side, and a part of the band-shaped seal member (8) is inserted into the darkness on the drawing board (9) side.This band-shaped seal member (8 ) is slidably in close contact with the & side of the transport drive unit cover (6), and the lower part of the band-shaped seal member +81 is in close contact with the S side of the transport drive unit cover (6).
The member fixed to the surface (slidingly and tightly fitted into the recess formed by 5!j. This belt-shaped seal member 18) is attached to the conveyor drive unit cover by four rollers as shown in Figure 4. 61, and the tension can be applied by at least one of the rollers, or a pair of spring-wound type rollers as shown in Fig. 5 can be used. In response to the notification, both sides of the band-shaped seal member (8) are wound up, and the - side winding and the other side unwinding are performed at the time of IWI.In both cases of Fig. 4 and Fig. 5, The total length of the band-shaped seal member (8) is the elongated hole 1
Form it to a length of 9F, twice the total length of 7).

Further, a gear group is fixed to the tip of the inner cylindrical body 6υ.

This gear is rotatable with respect to the outer cylindrical body (1), and is also rotatable with respect to the tip flange of the one-arm rotation shaft via a bearing. -Fix the &S of arm Q1 to the tip flange of arm Q1 using four 7-arm bolts CI. A hole συ that passes through the outer periphery of the gear when removing the 7-mut sand is provided in the opposite eye 11 of this fixing part, and this hole e/υ is closed by a thin ring-shaped sealing member ση. There is. In addition, a through hole q4 is bored from one end to the other end of the arm rotation axis ←], and one end of this through hole 1'14 is a screw hole (73
A pipe fitting σ is screwed into the pipe fitting 64, and a through hole @ is opened to the outside through a small hole a5 and a screw hole (7e) drilled in this pipe fitting 64. It is used for removing wires as well as for inserting wires, and the details will be explained later.

Further, the arm OI is provided with a stop mechanism σ9 for vertically supporting the recording chuck device. That is, the gear rod that meshes with the gear group @ is rotatably supported by the shaft member υ, and the gear @3 that meshes with this gear group is supported rotatably by the shaft member -. A sprocket is provided integrally with the gear 6z of the 7-mm α.
K, the co-movement shaft (87) is rotatably supported, and this 11
! The sprocket ■ and the sprocket I identified on the right end of the IIIJ axis I'll! [; An endless chain @I can be wound on the sprocket (2).

Moreover, the chuck device 021 is 1. F rotary axis K t = 0 * Fix the upper part of the holding member a'IJ, and this fixed support member ω
A guide shaft (G) is fixed to the lower part of 2, and the left and right opening/closing plates are slidably fitted inside the locking member (G) via slide bearings to the width of this rotation shaft and the guide shaft field. 1. Attach a single-acting cylinder to the center of the fixed supporting member. The inner circumferential surface of a cylindrical outer piston member fixed to the opening/closing plate □□□ is slidably fitted to the outer circumferential surface of both sides of this cylinder town 1 via an O-ring field, and −
Is there an air supply/discharge hole in the center of the distribution cylinder 19n as a working fluid supply/discharge hole? 7. This air supply/discharge hole (2) is connected to a curved hole drilled in the fixed support member device (101).
Therefore, the through hole of the arm rotation axis il ("t7
Screw hole to J ff61 K 4. Connect A, and airtightly insert the left and right bolts (102) into the left and right piston members (1), and connect both ends of the tension spring (103) inserted into the cylinder T971 to the left and right bolts (102).
), and the spring (103) pulls it to the left and right piston members (!18 fixed support member g2). Also, a chuck plate (
Fix the upper part of the left and right chuck plates (104).
4) is provided with a convex portion (106) that engages with a concave portion (105) of the carrier 0υ. Note that since the rotation shaft 6D and the guide shaft field are metal rods, the outer skin member (1
07), and all other parts of this chuck device Q, except for the shaft, are made of fluororesin, vinyl chloride resin, polypropylene resin, polyethylene resin,
It is made of stainless steel and titanium materials.

In addition, the photo sensor (111) for opening and closing the chuck is fixed via the mounting plate (110) as shown in the above-mentioned fixed support member +92 K16 figure, and the light shielding plate (1
12) is fixed, and the light shielding plate (112) is opened and closed.The light shielding plate (112) is opened and closed by moving the chuck plate 8 along with the mountain, and checking whether the chuck plate (104) is in the open or closed state. The photosensor (111) makes a judgment based on the following.

- Returning to Figure 3 again, place the mounting stand (1) on the base (2, 9).
13) and two sets of photosensors (115) via (114).
) (116) and one photosensor (115).
senses the light shielding plate (11 mm) protruding from the traveling base 6υ and stops the traveling base 6υ according to the position of each liquid tank t41, and the other photo sensor (116) , in the final tank, another false plate (118) is detected and the next process a (
This commands the transfer to the drying process).

Furthermore, a rotation shaft (120) formed integrally with the arm rotation shaft 1 and protruding from the back side of the worm reducer A3 [seven light-shielding discs (121) (122) (123) (124X1
25) (126) (12)) are fitted and fixed to each of these light shielding discs (121X122) (12s) (xz4) (12
5) (126) (12)) has a support plate shaft as shown in Figure 7? A photo sensor (129) fixed on the top via a mounting plate (128) faces each, and controls the rotation direction and speed of the arm rotation motor. The disk (121) is for a clockwise rotation 120° stop sensor, the disk (122) is for a left rotation 120° stop sensor, and the disk (123) is for a 90° stop sensor, ・Ill 1 yen The plate (124) is for left/right rotation detection, and the disc (125)
) is for swinging the arm, and when the carrier αυ is in the liquid tank 14+, the arm Ul..., $iK! Related to I and Wash # Young Rice Na L Geru 1 River, the disc (126) is for a sensor that slows down the rotation speed of arm 01 when the carrier uυ is in the liquid tank V (the disc (127) is for a sensor that quickens the rotational speed of arm 0 when carrier Qll is outside the liquid tank. In Fig. 7, (130) is a light passage groove.

Next, the operation of this embodiment will be explained.

When the motor 3n is driven, the traveling base 6υ moves towards the rail while the binion meshing with the fixed rack C6 rotates.
2) Travels horizontally along nK and moves between the loader (3) and each liquid tank (4). At this time, the band-shaped seal member (8)
Since the corner plate (9) and the end of the holding plate that are part of the clamping plate also move together with the worm fI42'□:Iso t431 on the traveling base 11:11116υ, the band-shaped sealing member (8) also The elongated hole (7) is completely closed by the sealing member (81) under normal pressure.

Also, when the motor (c) is driven, the gears (4~(!5[,
The arm tll rises ±12 from the neutral position through the old worm reducer and the rotation transmission mechanism of the arm rotation axis (6!3).
(B)Moves within a range of 0°.

At this time, rotating lever 5? Since the series of interlocking mechanisms of the inner cylinder body and the gear surface are fixed by the pin □□□, the rotation is made through the gear ■phantom and chain of the steady rest mechanism σ3 by the angle that the arm 〇〇1 rotates. The moving shaft rotates in the opposite direction, and as a result, the chuck device q is moved up and down while always being maintained in a vertical position.

In addition, when air is supplied from a pneumatic source to the inside of the cylinder 6J71 through the air supply/discharge hole (9) such as the through hole σ inside the rotation shaft (x2oi'J) and the hose (101''), this cylinder ( 9) on both sides of the outer jacket + piston member □□□
is supported by the tensile force of the spring (103), and moves away from the opening/closing plates (!6) on both sides and the chuck plates (104) on both sides of this. opens. Spring (10)
Close by 3).

By combining such movement of the traveling base C311, the downward movement operation by rotating the 7-mu UI, and the opening/closing chucking operation by the chuck device 1jtDItc, the agile carrier (old) can be moved to the loader (: Each liquid tank from 14+K
8th conveyance, each liquid tank (4) internal pressure predetermined time 19! It can be cleaned by crushing it or by shaking a 7-meter pump in the liquid tank (41).

〔Effect of the invention〕

According to the present invention, the cylinder is open at both ends, and the piston parts are installed at both ends of the cylinder.
Since the opening and closing members of the outer end surface of the piston member on both sides are integrally provided, the chuck device can be constructed in a very compact and simple structure, and can be used for cleaning wafers, etc. It is effective when installed at the tip of a rotating arm in a transport device for use in moving up and down freely.

[Brief explanation of drawings]

FIG. 1 is a perspective view of an automatic washing and drying device equipped with an embodiment of the chuck device of the present invention, FIG. 1 is a cross-sectional view thereof, 4 is a plan view showing one example of mounting the band-shaped seal member, 5 is a plan view showing another example of mounting, 1
Fig. 6 is a partially cutaway side view of the cha II'"l" nick contact, and Fig. 7 is a side view showing the state in which the 7 otosensor of the arm rotation axis is installed. t92)-U fixed support member, tn-- plan +/14+, l
! l51 (1u*)...Opening/closing member, (97)...Cylinder, tn''/Piston member, (2)...Working fluid supply/discharge hole, (103)...Spring. July 19, 1980

Claims (1)

[Claims] (II) Fix the middle part of the guide shaft (G) and the middle part of a cylindrical cylinder barb, which has a working fluid supply and discharge hole (2) in the proboscis wall and is open at both ends, to the fixed support member. ,
Piston members are slidably and airtightly fitted to both ends of this cylinder, and the guide shaft (G) is slidably fitted to the outer end surfaces of the piston members on both sides, and closed by a spring (101). A chuck device characterized in that opening/closing members a51 (104) on both sides are energized in the direction K and legally provided.