JPS58201339A - Carrier system for washing - Google Patents

Abstract

PURPOSE:To prevent entrance of liquid within the liquid tank into a cover by extruding forward the arm rotating shaft through an elongated hole bored on the cover of carrier driver and providing a hanging mechanism of carrier for washing at the edge portion of arm. CONSTITUTION:When a motor for base support running driver is driven, a running base support runs along the rail moving between a loader 3 and liquid tanks 4. At this time, since a square plates 9 holding a part of belt-shaped sealing material 8 also moves, the sealing material 8 also moves along an elongated hole 7 bored on the cover 6 of carrier driver and thereby the elongated hole 7 is always clogged by this member 8. Moreover, when the motor of arm rotating driver is driven, an arm 10 rotates through the rotating mechanism of arm rotating shaft. As a result, the chucking mechanism 12 is always kept in vertical while it is caused to move vertically. Therefore, a plurality of carriers 11 are sequentially transferred to each liquid tank 4 from the loader 3 so that they can be dipped into the liquid of tank 4 and can also be washed. Thereby, the liquid does not enter the cover 6 or dust in the cover 6 does not enter the liquid tank 4.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a transport device for cleaning wafers and the like.

[Technical background of the invention]

Conventionally, the cleaning casing used for carrying out etching, resist removal, cleaning, etc. on wafers, etc.
A transport drive unit cover is provided on the rear upper side of the liquid tank over a plurality of liquid tanks, and this transport body cover is provided with slits and holes for vertical movement of the hanging rod at positions corresponding to each liquid tank, and the top end of each slit is A slit for horizontal movement of the hanging rod is provided in between, and the hanging rod is protruded from inside the transport drive unit cover onto the external liquid tank through the slit for vertical movement and horizontal movement. It has a structure that is provided with a hook that engages the cleaning carrier, and the carrier is moved laterally along the slit for horizontal movement, and also has a slit Kf for vertical movement.
fi, the carrier is immersed in each liquid tank and pulled up.

[Problems with background technology]

In this way, the conventional type has slits for horizontal movement of the hanging rod as well as slits for vertical movement of the hanging rod, corresponding to each liquid tank position. The slits for each vertical movement are also drilled close to the liquid tank. Therefore, when the carrier is immersed in or pulled up from the liquid tank, the liquid scattered from the liquid tank, the liquid dropped from the carrier, gas, etc. pass through the vertical movement slit and enter the inside of the transport drive unit cover. There was a risk that the transport drive mechanism of the cover would be corroded, or that oil, dust, etc. from the mechanism inside the cover would pass through the slit and enter the liquid tank.

[Purpose of the invention]

The present invention has a structure suitable for preventing the liquid in the liquid tank from entering the inside of the transport drive unit cover, and the possibility that oil, dust, etc. from the transport discontinuing part inside the cover may get mixed into the liquid tank. The purpose of the present invention is to provide a cleaning conveyance device.

[Summary of the invention]

The first aspect of the present invention is to provide a harmonized transport drive cover on the rear part of the liquid tank over a plurality of liquid tanks, and according to the inside information of the transport drive cover, each liquid tank and the guide rail K of the 1,000-line feed
id is provided with a movable traveling base, an arm rotation drive am is provided on this traveling base, and the arm rotation is performed from this arm rotation drive mechanism through a long hole extending through each liquid tank drilled in the transport drive unit cover. A shaft is provided protruding from the front, an arm is provided at the tip 94 of this arm rotation shaft, and a suspension mechanism for a cleaning carrier is provided at the tip of this arm, and a drive for driving the base to travel with respect to the above-mentioned traveling base is provided. The structure is characterized by the provision of a mechanism, in which the cleaning carrier is moved laterally by horizontal movement of the traveling base, and the cleaning carrier is moved horizontally by the rotation of the arm. 1. Crush or pull up.

Further, the second aspect of the present invention is that in the first aspect, the second aspect of the present invention further includes the following:
A belt-shaped seal member formed to be more than twice as long is made into a long one.
The structure relies on the fact that the arm rotation wheel is disposed movably in close contact with the conveyance drive unit cover through a part of this band-shaped seal member, and that the arm rotation axis Simultaneously with the horizontal movement of the feed →, the belt-shaped sealing member is moved to always completely close the elongated hole with this sealing member.

[Embodiments of the invention]

Hereinafter, the present invention will be described in detail with reference to figures 1 to 7, V-T, embodiments of 1, 3 embodiments shown in IO diagrams of 8 and 9. kC will be explained.

What is shown in FIG. 1 is an automatic washing and drying device, which consists of a washing device section (1) and a drying device # (2+).

The cleaning device W6 (1) has a recess (5) in which a carrier loading loader (3) and a plurality of liquid tanks (4) are installed in the #II container.
At the same time, a conveyance drive section formed slightly longer than the rear 111#c recess (5) is provided, and a long hole is formed in the cast surface of the conveyance drive section cover (6) that covers this drive section from one end to the other. (7) is drilled. This elongated hole (7) is closed from the inside by a belt-shaped seal member (8) made of a corrosion-resistant flexible material such as fluororesin, vinyl chloride resin, polypropylene resin, polyethylene resin, etc., which is movable along a long (71K) direction. A square plate (9) that moves integrally with this band-shaped seal member (8) is fitted in a long (7)K movably, and the base end of the arm OI is rotatable with respect to this square plate (9)K. A chucking mechanism (I2) is provided at the tip of this arm as a hanging mechanism for the cleaning carrier Oυ. CLI
is an operation panel, and I is an exhaust hole.

The drying device section (2) includes an interface αη, a carrier feeding mechanism θB, a dryer (1 (I), and an unloader frame for carrying out carriers).

Then, the carrier aυ transported to the loader (3) is held by the chucking mechanism QaK, and the arm OI is held by the chucking mechanism QaK.
J is sequentially immersed in each liquid tank (4), and in the process,
The processing liquid in each liquid tank (4) performs etching, resist removal, cleaning, etc. of the wafer stored in the carrier Oυ, and the carrier Oυ in the final tank is controlled by the interface anc in the M direction, where carrier feeding is small. , and is sent to the drying decoy by this feeding mechanism Q81, taken out after drying, and carried out from the 11th unloader (4).

Also, as shown in Figure 1'F2 and Figure 3, there are 2
Inside the transport drive unit cover (61, the fixed base (c)
The three guide rails are fixed via support members (to).

Of these, two rails on both sides of the support member (C) are horizontal running rails (C) (to), and one rail on the top surface of the support member (2) is a horizontal digging prevention rail (5). The traveling base 6υ can be moved freely through eight sets of rollers arranged on each rail (C) (To) fin to sandwich each rail (C) (To) (B). Install this traveling base 6υ
is caused to travel horizontally by a base travel drive mechanism which will be described later.

Note that the roller @ (2) is a support plate integrated with the traveling base 6υ.
The Ktgl is rotatably supported, and the roller flash is directly supported on the lower surface of the traveling base II.

To explain the drive mechanism for traveling the base, a horizontal traveling rack (c) is fixed to the upper surface of the supporting member (to), and a supporting member (to) shown in Fig. 2 is attached to the upper surface of the traveling base C11l. The main body of the reversible motor θD with a lateral travel brake is fixed through the lateral travel brake, and the rotating shaft (toward) of this motor (9) passes through the traveling base 6υ and protrudes downward, and the above-mentioned rack is installed in the lower part between the rotating shafts. Fix the lateral travel pinion (2) that meshes with (to).

Further, a drive mechanism for rotating the arm is provided on the upper surface of the traveling base 6υ. That is, the worm deceleration pick-up 3 is fixed to the top surface of the traveling base c3υ via the support plate i42, the motor support member (c) is fixed to the top surface of this reducer 43 via the support plate (441), and this member (c) ) to the reversible motor for arm rotation. This motor (c) has a speed controller and an electromagnetic brake, and can be controlled to rotate forward or reverse by controlling the external arm rotation control sensor. and quick selection is possible.

Furthermore, a gear (C) provided on the rotational shaft Uη of the motor and a gear group provided on the rotational shaft [K of the worm protruding from the worm reducer-3 are meshed, and the worm reducer-3
An arm rotation wheel is provided integrally with the worm wheel.
A cylindrical member is rotatably provided on the outer peripheral surface of this arm rotation shaft II via a bearing Iη-, and a rotation lever 6z is fixed to this cylindrical body 5υ. The pin 63K shown in Figure 2 of Figure 2 is fitted with the pin 2 protruding from the pin support plate fixed to the top surface of the worm reducer 1it43, and the rotating lever @ is fixed.

In addition, an outer cylindrical body is fitted in the outer circumferential direction of the inner cylindrical body all, and this outer cylindrical body is fitted with a rectangular plate (9
) and the presser plate on the back side of this drawing board (9) are integrally formed, and a part of the band-shaped seal member (81) is sandwiched between the corner of this drawing board (9). The upper part of (8) is slidably in close contact with the back surface of the slow drive unit cover (6), and the lower part of the belt-shaped seal member (8) is in close contact with the back surface of the transport drive unit cover (6).
) is formed by the member 63 fixed to the back surface of the
It is a close fit that allows it to slide freely. This band-shaped seal member (8)
As shown in Figure 4, four rows 56υ are arranged endlessly along the inner circumference 1fiK of the transport drive unit cover (6), and tension is applied by at least the IM roller among them, or Alternatively, as shown in Figure 5, both sides of the band-shaped sealing member (8) are wound up by a pair of spring winding type rollers b3, so that the winding of the second side and the unwinding of the other side are performed at the same time. . In addition, in both the case of Figure 4 and the case of Figure 5, the total length of the band-shaped rail member (8) is formed to be the maximum length (more than twice the total length of the force).

Further, a gear branch is fixed to the tip of the inner cylindrical body 6υ.

This gear group is rotatable with respect to the outer cylinder body F4, and is also rotatable with respect to the tip flange portion of the arm rotation shaft 4 via a bearing. Fix the base of the 7-arm (1G) to the flange section of the tip 7 of the arm 9 with the four arm replacement bolts υIK. On the opposite side of this fixing section 11, pass through the outer circumference of the gear iron when removing the arm On. A hole συ is provided, and this hole συ is closed by a thin ring-shaped sealing member (77) K. A through hole σ4 is provided in the arm rotation shaft G1 from one end to the other 4.
A small hole σ is drilled in this through hole (the threaded hole σ4 at one end of the 7th hole is hinged to a pipe fitting σ4).
A through hole 6 is opened to the outside S through a hole and a screw hole. Each of the holes σ4σ94 is used for supplying and discharging air as well as for inserting a wire, the details of which will be explained later.

Further, the arm 0 has the chucking mechanism O2 inside.
A steady rest mechanism (with 7 hot springs) that vertically supports the

In other words, the gear (2) that meshes with the gear is rotatably supported by a shaft member sail, and is rotatably supported by a shaft wing (c) that meshes with this gear, and is integrated with this gear head. A sprocket is installed, and the arm O
A rotary shaft (goods) is rotatably supported at the tip of I by a fixed cylinder part (c) and a bearing side, and a sprocket branch fixed to the right end of this 1O1kJJ@bus and the above sprocket (
Wrap an endless chain around (b) and (b).

In addition, the chucking mechanism O2 fixes the upper part of the fixed support member (92) to the rotation Ile member η.
Fix the guide shaft Q at the bottom of the
The left and right opening/closing plates (E) are slidably fitted inside the locking member (E) via slide bearings to the guide shaft, and the single-acting chucking plate is fitted to the center m of the fixed support member □. A cylinder is fixed, and the inner 111 surface of the cylindrical outer piston member □□□ fixed to the left and right opening/closing plates (E) is slidably attached to the outer peripheral surface of both Il1 parts of this cylinder via an O-ring branch. In addition, an air supply and discharge hole (2) is formed in the center of the cylinder, and this air supply and discharge hole (b) is connected to the hose (1).
01) [Thus, the threaded hole aeK of the cocoon distributing arm rotation axis H is connected to the through hole a3, and the left and right piston members (to)
The left and right bolts (102) are airtightly inserted into the cylinder θ0, and both ends of the tension spring (103) inserted into the cylinder θ0 are engaged with the small end holes of the left and right bolts (102). The left and right piston members (
(to) to the fixed support member -.

In addition, the upper part of the chuck plate (104) is fixed to the lower part of the left and right opening/closing plates, and the convex part (1) that engages with the carrier 0υ recess (105) is attached to the lower part of the left and right chuck plate (104).
06). Note that since the rotation shaft 6 and the guide shaft are metal rods, the outer skin member (107)
This chucking mechanism u'1rV
r, all other parts except the shaft are made of fluororesin,
It is made of a corrosion-resistant material such as vinyl chloride resin, polypropylene resin, polyethylene resin, stainless steel, titanium, etc.

In addition, as shown in Fig. 16, a photo sensor (11
1), and also attach a light shielding plate (112) to the -even opening/closing plate-
The light shielding plate (112) is moved together with the opening/closing plate (2), and the light shielding plate (112) is used to check whether the chuck plate (104) is in the open or closed position. (Therefore, the judgment is made using the 7 otosensor (111).

Returning to figure 3 again, place the mounting stand (113) on the base (c).
) (114) and two sets of 7 sensors (115) (
116) is fixed, and one photosensor (115) is
The light shielding plate (11) protruding from the traveling base 0υ is sensed to stop the traveling base 6υ according to the position of each liquid tank (4), and the other 7 sensors (116) It senses another light shielding plate (11B) in the final tank and instructs transfer to the next process (drying process).

Furthermore, a worm reducer 4 is formed integrally with the arm rotation shaft. One light-shielding disc (121) (122) (123) (124X
125X126) (127) is attached and fixed. Each of these light-shielding disks (121X122) (123) (124) (12
5) (126) and (12)) respectively face the photosensors (129) fixed on the support plate (roller) via the plate with 41 (12B) as shown in Figure 7. The 0 disc (121) that controls the rotation direction and speed of the motor is for the clockwise rotation 120 stop sensor, and the disc (121) is for the clockwise rotation 120 stop sensor.
122) is for the left rotation 120° stop sensor, and the disc (
123) is for the 90 stop sensor, the disc (124) is for left/right rotation detection, the disc (125) is for swinging the arm, and when the carrier 0υ is in the liquid tank (4), the arm is turned on. The disk (
126) is when the carrier aυ is in the liquid tank.
O This is for a sensor that slows down the rotation speed, and has a circular plate (12
'l) is for a sensor that quickens the rotational speed of arm α0 when carrier 0υ is outside the liquid tank. , 117, (130) is a light passing groove.

Next, the operation of the spear 1 embodiment shown in Figures 2 to 7 will be explained.

When the motor C (η) is driven, the traveling base 6υ travels sideways on the rail (c) (2e @ K G) while the binion (to) meshing with the fixed foot hook rotates, and the p-da t3+ and It moves between each liquid tank (4).At this time, the square plate (9) that clamps a part of the band-shaped seal member (8j), the broom and the presser plate (to) are also moved to the worm reducer (c) on the traveling base θυ. with#
Since the band-shaped seal member (8) is also long (71VcG
The long part (7) is always connected to this seal member (8) K.
Therefore, it is completely blocked.

When the motor is driven, the arm (II) rotates within a range of ±120'' from the raised neutral position via the rotation transmission mechanism of the gear tisw, the worm reducer-3, and the arm rotation shaft.

At this time, since the interlocking mechanism of the rotating lever 6-1 inner cylindrical body 61J and the gear is fixed by a pin, the gear of the anti-sway structure is fixed by the angle that the arm QCJ is rotated. The rotation wJ@- is rotated in the opposite direction via (1) and the chain, and as a result, the chucking mechanism (6) is always moved up and down while maintaining its vertical position.

In addition, if air is supplied from a pneumatic source to the inside of the cylinder fishing rod through the air supply/discharge hole (2) through the through hole (7) inside the rotation shaft (120) and the hose (101), etc. The outer piston members on both sides are springs (103)
At the same time, it moves away from the fixing support part @' scratch 4 against the tensile force of , and the inner opening/closing plate and the double-sided chuck plates (104) integral therewith open. Also, when the air is removed, the spring (
103) Closed by K.

By combining such movement of the traveling base c3υ, vertical movement operation by the rotation of the 71mm ttUO, and opening/closing chucking operation by the chucking mechanism Q4, a plurality of carriers a1) can be moved from the loader (3). Each liquid tank 14) can be transported one by one and immersed in each liquid tank (4) for a predetermined time, or cleaning can be performed by swinging the arm a within the liquid tank (4).

In the chucking mechanism in this embodiment,
The inner circumferential surface of the outer piston member is slidably fitted to the outer circumferential surface of both measuring parts of the cylinder hook, and both ends of the tension spring (103) inserted into the inner S of the cylinder hook are fitted to the left and right outer piston member ends. Bolt (102) K is locked, so
The forward and backward drive mechanism for the piston member 21- can be constructed in a very compact and simple structure, and in this embodiment, the air cylinder mechanism, which would normally be provided on the outside of the chucking mechanism u4, is installed in the chucking mechanism circle. It is located inside.

Next, a second embodiment of the present invention will be described based on Figures 8 and 9. Note that the same parts as in the first embodiment are denoted by the same reference numerals, and their explanations will be omitted.

First, before installing the arm (201) of this embodiment, remove the bolt σ0 and the pipe joint σ4 of the 7-mm αl in the spear 1 embodiment from the arm rotation shaft.

At this time, leave the gear fixed to the inner cylinder body 6υ, and remove the arm (all 11) such as the gear ■ that fits this Km.

Then, as shown in Fig.
) tc, the arm rotation axis In is fixed, and the pipe joint σ
Fix 4.

A hanging mechanism for the cleaning carrier αυ is provided on the turning shaft at the tip of the arm (201). i.e. hook support (
As shown in Figure 9, two hook shafts (203) having axial directionality in the same direction as the feeding direction of the hook support (202) are movably provided. Hooks (204) are integrally provided at both ends of each hook shaft (203). Also, each hook shaft (20
Links (205) are integrally provided from 3), and each link (205) is connected to the link (20) via the shaft (206).
One end of a wire (20B) is integrally connected to one end of the link (207), and this wire (20B) is connected to the base of the hook support (202). The wire (208) is pulled out laterally through a hole (210) drilled across the side from the opposite surface of the wire (209), and a K-wound wire (208) is inserted between the link (207) and the base (209) of the hook support (202). A compression coil spring (211) is provided at the hook 5, and this spring (211) biases the link (207) in the direction shown in the figure to maintain the hook (204) in a vertical position.

The wire (20B) is passed through the tube (212) from the side surface of the base (209) to the pipe joint σ at the tip of the arm rotation shaft 1, and then passed through the tube joint σ as shown in Figure 8.
From ◆, pull out the other end of the wire (208) from the through hole σIj of the rotation shaft ft1 (120) to the front of the rotation shaft (120),
Then, the piston rod (
215) and the other end of the wire (20B) with a connecting plate (
216). In addition, although the light-shielding discs (121) to (127) and the photosensor (129) in Figure 3 are not shown in Figure 8, they have not been removed.

The air cylinder (214) is a photo sensor (129)
When distributing the external VC power, the connecting plate (216) is prevented from rotating by a normally used first guide rod (not shown) or the like.

Then, when the piston rod (215) of the air cylinder (214) is pushed out and the wire (208) is pulled, this wire (208) is linked against the compression coil spring (211) in Figure 9. (207) to the right and rotate the hook (204) upward. This hook (204) rotates to a horizontal position and detaches from the engaged handle (219) in the recess (105) of the carrier 00, or prepares to engage with this handle (21Q).

Also, Kaminoseki, the piston rod of the air cylinder (214) (
215) is retracted, the specific compression coil spring (S
The repulsive force of the link (207) returns to the state shown in FIG.

A carrier engaging/disengaging operation by rotating the hook (204) and a vertical movement operation by rotating the arm (201),
By combining the operation of moving each liquid tank (4) by moving the traveling base 6υ, a plurality of carriers 0υ can be sequentially conveyed into each liquid tank (4) for cleaning, etc.

Note that even if the arm (201) rotates, the hook support (201)
2) is always kept horizontal by the gear of steady rest mechanism 4, chain S, etc.

Next, embodiment 8 of the present invention will be described mainly based on FIG. 10. Note that the same parts as in the 3.1 embodiment are designated by the same reference numerals, and the explanation thereof will be omitted.

First of all, the real Ml? Before installing the arm (301) of ll [
, arm C11 (2
01) from the arm rotation shaft by removing bolt σa and pipe joint σ. At that time, leave the gear fixed to the inner cylindrical body t511, and attach the gear ms that meshes with it to the arm α.
l (201), and as shown in Fig. 10 (Arm αQ (201), fix the arm rotation axis @aK with the arm (301), which has a built-in steady rest mechanism σ bottle similar to the arm αQ (201). Two wire-like hooks (302) serving as a hanging mechanism are directly inserted into and fixed to the rotating shaft @7)K provided at the tip *m of 301).

In addition, in the 172nd embodiment, the worm reducer (the bottle support plate fixed to the support plate i44 on 4J)
By removing □ and removing the bin □□□ of this bottle support plate from the SW of the rotating lever 64, the rotating lever can be freely rotated.

Then, instead of the bottle support plate 641, the main body of the air cylinder (304) is fixed on the support plate via the mounting plate (303), and the tip of the piston rod (305) of the air cylinder (304) is A connecting plate (306) is fixed to the connecting plate (306), and the lever actuating body (30'/
), and @ at the tip of this lever actuating body (30)).
The supported roller (308) is slidably fitted into the long groove Q of the six rotary levers.

Then, when rotating the arm (301), the piston rod (305) of the air cylinder (304) is fixed, and the rotating lever 6z, inner cylinder all, and gear are moved to the position shown in Figure 10. Fix it to the arm (301)
The rotation axis 187) of the steady rest mechanism σ■ rotates by the angle of rotation, and the rotation axis 187) rotates with a reflex force of 10'', and as a result, the hook (302) remains in a vertical position. Moved up and down.

Also, in the state shown in Figure )j-10, the rotation of the arm (301) is stopped and the piston rod (3) of the air cylinder (304) is
When 05) is pushed out, the rotating lever Q is rotated in the direction of the hour hand without sliding the long groove (308), and the gear is also rotated in the same direction via the inner cylindrical body 5. The rotation axis also rotates in the direction of the hour hand through the gear position of the steady rest mechanism σ and the chain link, and the hook (302) reaches a nearly horizontal position (b).
Move the carrier 0υ to detach from the handle (219) or prepare to engage with this handle (219).

When rotating this hook (302) downward, the piston rod (305) of the F cylinder (304) is pulled into the position shown in Figure 10.

As shown in each of the above embodiments of spears 11, 4-2 and spear 8, 8 types of arms QfJ (201) (301
) and the carrier hanging mechanism at its tip, depending on the presence or absence of the handle (219) on the carrier (11) and the orientation of the carrier (11), and also replace the air cylinder (214) (304). By providing the basic parts such as the other traveling base 6υ, the old worm reducer, the motor (9), the arm rotation shaft 1, and the gear, the basic parts are used in common in each embodiment and have each function. It can be used as a cleaning conveyance device.

〔Effect of the invention〕

According to the first aspect of the present invention, a transport drive unit cover is provided on the rear upper side of the liquid tank over a plurality of liquid tanks, and among the transport drive unit covers, i! In II, a traveling base is provided so as to be movable along the guide rails VC arranged parallel to each liquid tank, a drive mechanism for arm coercion is provided on this traveling base, and a drive mechanism for rotating the arm is connected to the transport drive unit cover. 1411Iiii The arm rotation axis is inserted through the elongated hole spanning each liquid tank.
An arm is provided at the leading end of this 7-arm rotation shaft,
A suspension mechanism for the cleaning carrier is provided at the tip of this arm, and a base traveling drive [11] is provided for the traveling base. It is only necessary to drill a long hole, and the need to drill a slit for vertical movement of the hanging rod to the bottom of the transport drive unit cover, which was required in the past, can be solved by rotating the arm.
It is easy to seal against a straight long hole, preventing the liquid in the liquid tank from entering the inside of the transport drive cover, and preventing oil, dust, etc. from the transport drive part inside this cover from entering the liquid tank. Suitable for preventing the risk of contamination. Also above iie
If the base traveling drive mechanism is made by combining the I&1I4ki axis pinion of the base traveling motor provided on the traveling base and a fixed rack provided on the guide rail of the traveling base, the transportation Only one fixed rack needs to be provided over almost the entire length of the drive section cover, and the base traveling drive mechanism can be made compact.

Further, according to the second invention in El) 4 of the present invention, a band-shaped seal member formed to have a length that is more than twice the total length of the ridge feed drive section cover is movably and tightly arranged through the elongated hole KG. Since the arm rotation shaft is protruded to the outside of the transport drive unit cover through a part of this belt-shaped seal member, the long hole is always protected by the belt-shaped seal member no matter where the arm rotation shaft is in the elongated hole. By completely closing the entire length, it is possible to prevent liquid from entering the length and dust from entering the liquid tank.

[Brief explanation of the drawing]

Figure 1 is a perspective view of an automatic cleaning transfer device equipped with an embodiment of the cleaning conveyance device of the present invention, and Figure 312 is a partially omitted front view showing the first embodiment of the cleaning conveyance device. The figure is a cross-sectional view, Figure 4 is a plan view showing one installation example of the band-shaped seal member, Figures 1-5 are plan views showing other installation examples, and Figure 6 is a chucking as a hanging mechanism. Figure 1 is a side view showing the mounting state of the sensor on the arm rotation axis, Figure 8 is a sectional view showing the second embodiment of the present invention, and Figure 9 is a side view of the mechanism. A perspective view showing a hanging mechanism,
Figure 1G is a partially omitted front view showing the IF8 embodiment of the present invention. (4) Liquid tank, (6) Middle transport drive cover, (7)
・・Long size, (8)・−band-shaped seal member, αl (201
) (301)...Arm, 0υ...Cleaning carrier,
αri・-Chucking mechanism as a hanging mechanism, C! S(
e) @...Rail, 6υ...Travel base, Related...Rack,
Forceps...motor of drive mechanism for base traveling, QΦ/binion,
tm-・Motor for the 7-arm rotation drive mechanism, II・・Arm rotation axis, (204)(302)・・Hook for the hanging mechanism.

Claims (3)

[Claims] (1) A transport drive unit cover is provided on the rear upper side of the liquid tank over multiple liquid tanks, and the traveling base is movable by riding on guide rails arranged parallel to each liquid tank inside this transport drive unit cover. A drive mechanism for arm rotation is provided on this traveling base, and the arm rotation IIb is passed through the elongated hole extending from each liquid +IIK drilled in the transport drive unit side bar from this 7-m drive Isosu.
A shaft is provided protruding from the initial thickness, an arm is provided at the tip of this arm rotation shaft, and a hanging mechanism 4 for a cleaning carrier is provided at the tip of this arm. A cleaning conveyance device patented in that the drive mechanism for driving the base can be closed to the above-mentioned traveling base. (2) The drive mechanism for driving the base is made by meshing the rotating shaft pinion of the motor for driving the base installed on the travel base with a fixed rack provided on the guide rail of the travel base. 1. A cleaning conveying device according to claim 1, characterized in that: (3) A transport drive unit cover is provided on the rear upper side of the liquid tank over multiple liquid tanks, and a traveling base is provided so as to be movable along a guide rail arranged parallel to each liquid tank inside the transport drive unit cover. An arm-movement drive mechanism is provided on this traveling base, and an arm rotation shaft is provided protruding from the arm rotation drive mechanism through a long hole extending through each liquid tank provided in the transport drive unit cover. An arm is provided at the tip of the moving shaft,
A suspension mechanism for the cleaning carrier is provided at the tip of this arm, and a base traveling drive mechanism is provided for the upper #12 traveling base, and the length is more than twice the total length of the transport drive unit cover. A cleaning device characterized in that a band-shaped sealing member formed in the above is disposed in close contact so as to be movable along its length, and an arm rotation shaft is protruded to the outside of the transport drive unit cover through a part of the band-shaped sealing member. Transport, equipment.