JPH0561122A - Ultraviolet ray irradiating device - Google Patents

Abstract

PURPOSE:To accomplish consecutive processing and to make the constitution of a device fit for automatization by making the flow of a substance to be irradiated linear. CONSTITUTION:A light source part 1 is disposed behind an irradiation part 2, and a carrying-in part 3 and a carrying-out part 4 are disposed on both sides of the irradiation part 2. Ultraviolet rays conducted from the light source part 1 are reflected toward an upper irradiating aperture by a reflector in the irradiation part 2 so as to irradiate the substance to be irradiated through the irradiating aperture. A carrying means for carrying the substance to be irradiated from the carrying-in part 3 to the irradiation part 2 and from the irradiation part 2 to the carrying-out part 4 is provided on the upper surface of the irradiation part 2. Since the irradiation part 2 is positioned on a front side and the irradiating processing of the ultraviolet rays is executed on the upper surface of the irradiation part 2, the cleaning of the irradiation part 2 and the maintenance and the inspection of the carrying means are easily performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is to irradiate a substrate as an object to be irradiated with ultraviolet rays to print an electrode such as LCD, IC, L.
The present invention relates to an ultraviolet irradiation device that exposes circuit elements such as SI and the like.

[0002]

2. Description of the Related Art In this type of ultraviolet irradiation apparatus, an ultraviolet irradiation section is provided inside the apparatus. Then, in order to irradiate the substrate with ultraviolet rays, the substrate set in the front part of the device is conveyed to the irradiation part inside the device, the irradiation part irradiates the substrate with ultraviolet rays, and then the substrate is conveyed to the front part of the device. Is becoming

[0003]

In the conventional ultraviolet irradiation apparatus as described above, since the substrate loading and unloading locations are the same and the substrate must be reciprocally moved with respect to the irradiating unit, the irradiation processing is performed. It takes time, and it is difficult to cope with automation such as automatic loading and unloading of substrates.

Further, since the irradiation section is provided inside the apparatus, it is not easy to clean the irradiation section and to perform maintenance and inspection of the transfer means for transferring the substrate to the irradiation section.

The present invention has been made in view of the above points, and can have a structure suitable for automation.
It is an object of the present invention to provide an ultraviolet irradiation device that can easily perform cleaning of the irradiation part and maintenance and inspection of the transportation means and the like.

[0006]

According to a first aspect of the present invention, there is provided a light source section having a lamp for emitting ultraviolet rays, and a front surface of the light source section, the upper surface of which is irradiated with ultraviolet rays to an object to be irradiated. An irradiation unit having an irradiation opening and a reflection plate below the irradiation opening for reflecting the ultraviolet light guided from the light source unit toward the irradiation opening; and an irradiation unit disposed on one side of the irradiation unit to irradiate the ultraviolet light. A carry-in section for carrying in the object to be irradiated, a carry-out section arranged on the other side of the irradiation section for carrying out the object to be irradiated that has been irradiated with ultraviolet rays, and a carry-in section arranged on the upper surface of the irradiation section for carrying in the object. And a transport means for transporting the object to be irradiated which is carried into the unit onto the irradiation opening of the irradiation unit and from the irradiation unit to the unloading unit.

According to a second aspect of the present invention, in addition to the first aspect of the present invention, a sensor is provided for detecting the transport position of the irradiation target transported by the transporting means, and ultraviolet irradiation is performed based on the detection by this sensor. The transport control means is provided to control the transport means so as to temporarily stop the object at a predetermined position on the irradiation opening.

According to a third aspect of the present invention, in the first aspect of the invention, a cover for covering the upper surface of the irradiation section is provided.

According to a fourth aspect of the present invention, in the third aspect of the invention, the cover blocks ultraviolet rays and transmits visible light.

[0010]

According to the first aspect of the present invention, the object to be irradiated carried into the carry-in section is conveyed to the irradiation section by the conveying means, and the ultraviolet light guided from the light source section in the irradiation section is transmitted to the object to be irradiated through the reflecting plate and the irradiation opening. Irradiation is performed from below, and the object to be irradiated is transported from the illumination unit to the unloading unit by the transport unit. Then, the light source section unrelated to the actual work is arranged at the rear of the irradiation section, and the loading section and the unloading section are respectively arranged on both sides of the irradiation section, so that the flow of the irradiation object is linear. , Continuous processing is possible, and the configuration is suitable for automation. Moreover, since the irradiation unit is located on the front side and the ultraviolet irradiation process is performed on the upper surface of the irradiation unit, cleaning of the irradiation unit and maintenance and inspection of the transporting means can be easily performed.

According to a second aspect of the present invention, in the first aspect of the present invention, the object to be irradiated conveyed by the conveying means is temporarily stopped at a predetermined position on the irradiation opening of the irradiation unit, and is irradiated with ultraviolet rays to irradiate the object to be irradiated. UV irradiation ensures.

According to a third aspect of the invention, in the first aspect of the invention, the upper surface of the irradiation unit is covered with a cover to prevent dust and the like from entering the irradiation unit, and at the same time, protect the worker from the conveying means on the upper surface of the irradiation unit. To do.

According to a fourth aspect of the invention, in the third aspect of the invention, the cover blocks the ultraviolet rays and prevents the worker from being irradiated with the ultraviolet rays. Further, the cover allows visible light to pass therethrough so that the irradiation state of the ultraviolet light on the irradiation object can be observed.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of an embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the whole of the ultraviolet irradiation apparatus, which includes a light source section 1 having an optical system including a lamp for emitting ultraviolet rays, and an object to be irradiated which is arranged in front of the light source section with ultraviolet rays. Irradiation unit 2, a loading unit 3 that is arranged on one side of the irradiation unit 2 and carries in an irradiation object that radiates ultraviolet rays, and an irradiation object that is arranged on the other side of the irradiation unit 2 and that is irradiated with ultraviolet rays And an auxiliary irradiator 5 for irradiating the side edges of the irradiation object with ultraviolet light.

The object to be irradiated in this embodiment is a substrate P which is irradiated with ultraviolet rays to form circuit elements such as IC and LSI.

2 and 3 show a light source section 1 and an irradiation section 2.
The structure of the light source unit 1 is shown in the upper part,
A lamp 12 that emits ultraviolet rays, a reflector plate 13 that collects and reflects downwardly the ultraviolet rays that are emitted upward from the lamp 12, blows air to the lamp 12 or exhausts warm air around the lamp 12 to cool the lamp 12. Blowers 14 are installed respectively.

In addition, a reflector 13 is provided at an intermediate portion inside the machine body 11.
A fly-eye lens 15 and a lens 16 are disposed below the fly-eye lens 15 at the focal point of, and a shutter 17 capable of blocking ultraviolet rays entering the fly-eye lens 15 and the shutter 17 are selectively opened and closed. A motor 18 is provided. Further, a reflection plate 19 that reflects the ultraviolet rays that have passed through the lens 16 toward the irradiation unit 2 is disposed below.

Inside the body 21 of the irradiation unit 2, there is arranged a reflection plate 22 for upwardly reflecting the ultraviolet rays reflected by the reflection plate 19 of the light source unit 1. Further, as shown in FIG. 4, an irradiation opening 24 for irradiating the substrate P with the ultraviolet rays reflected by the reflection plate 22 is formed on the upper surface plate 23 of the machine body 21. The irradiation opening 24 is formed in a rectangular shape having a size corresponding to the largest substrate P that can be processed, and as shown in FIG. 5, a glass plate 25 that allows ultraviolet rays to pass through is fitted therein.

Further, as shown in FIG. 2, the top plate of the machine body 21.
A transport means 31 for transporting the substrate P is arranged above the 23.
On the lower side, opening width changing means for changing the opening width of the irradiation opening 24
32 are provided.

First, as shown in FIGS. 4 and 5, the transport means 31 is movable in a substantially L-shaped cross section along both sides of the irradiation opening 24, that is, both sides orthogonal to the transport direction (Y direction) of the substrate P. The frames 33 are slidably arranged in parallel with each other in the width direction (X direction), and are moved in parallel either manually or by driving means (not shown).

Bearings 34 are provided at predetermined intervals on each movable frame 33, and a guide roller 36 is provided on each bearing 34 via a rotary shaft 35.
Is rotatably supported. The guide roller 36 is provided with a guide ring 37 for guiding the edge of the substrate P at an inner end side with a space enough to place the edge of the substrate P. A pulley 38 is fixed to the outer end of the rotary shaft 35 of each guide roller 36, and the pulley 38 between the adjacent guide rollers 36 is
A belt 39 is stretched between them. Therefore, each movable frame
The plurality of guide rollers 36 provided on the 33 rotate integrally.

On the starting end side in the transport direction, the interlocking shaft 40 is connected between the guide rollers 36 of both movable frames 33, and the rotation receiving portion 41 at one end of the interlocking shaft 40 and the rotating portion of the motor (not shown) are belts or the like. The guide roller 36 is integrally rotated in the same direction by the rotation of the motor, and the substrate P is transported. The interlocking shaft 40 includes the guide roller 36 and the bearing 34.
And the pulley 38, and is rotatably supported on the upper plate 23 by the bracket 42. The guide roller 36 and the bearing
The movable frame 33 can be moved with respect to the pulley 34 and the pulley 38 in the axial direction.
Also, the rotation is transmitted by being coupled with the pulley 38.

Next, the aperture width varying means 32, as shown in FIG. 5, is a diaphragm plate 45 in the width direction (X direction) arranged below the irradiation aperture 24 on both sides of the irradiation aperture 24 in the width direction. And the aperture plates 46 in the transport direction (Y direction) arranged on both sides in the transport direction, respectively. The aperture plate 45 in the width direction is disposed on the lower side and the aperture plate 46 in the transport direction is disposed on the upper side.

Then, each diaphragm plate 45 is moved in parallel in the width direction by driving a motor (not shown). Each diaphragm plate 46 is moved in parallel in the conveying direction by driving a motor (not shown).

As shown in FIG. 3, the auxiliary irradiation section 5 is
It is arranged on a support base 51 on the side of the machine body 11 on the transport direction side. Although not shown, a lamp that emits ultraviolet rays, a shutter that can block the emission of ultraviolet rays, a motor that selectively opens and closes the shutter, and the like are provided in the machine body 52.

A pair of optical conductors 53 for guiding ultraviolet rays to both side edges of the substrate P are connected to the machine body 52. Each of the optical conductors 53 houses a plurality of optical fiber strands in a flexible tube, and has an emitting portion 54 for emitting ultraviolet rays at the tip thereof. Then, the holder 55, which is provided upright on the movable frame 33 of the transport means 31, positions and holds the both sides of the substrate P. The irradiation position A of the ultraviolet light from each light guide 53 is shown in FIG.

Further, in FIG. 4, a plurality of sensors S1, S2, S3 for detecting the transfer position of the substrate P transferred by the transfer means 31 are provided along the transfer direction.

As shown in FIG. 2, a lid 61 for preventing dust from falling onto the irradiation opening 24 is placed above the conveying means 31, and the upper surface of the irradiation unit 2 is entirely covered. A cover 62 is attached to cover the. The lid 61 and the cover 62 block ultraviolet rays and transmit visible light.
Further, each light guide 53 is attached to the holder 55 by inserting the cover 62.

The carry-in section 3 and the carry-out section 4 are formed in the same structure and are arranged on both sides of the irradiation section 2 in a bilaterally symmetrical state. Its structure is as shown in FIGS.
A cassette mounting opening 72 is formed on the upper surface of the substrate, and a substrate passage opening 73 is formed on the upper side surface on the irradiation unit 2 side.

Each slide shaft 76 is vertically movably fitted to a pair of bearings 75 provided on the partition plate 74 of the machine body 71, and a mounting table 77 is connected to the upper end of the slide shaft 76 and slides. A connecting plate 78 is connected to the lower end of the shaft 76. Connecting plate
A screw receiving portion 80 that is screwed onto a screw shaft 79 that is rotatably supported in parallel with the slide shaft 76 is provided on the 78. Screw shaft 79
Is connected to the drive shaft of the motor 81 with a belt 81a.
The drive of 81 drives forward and reverse rotation.

A cassette 82 for accommodating the substrate P is removably mounted on the upper surface of the mounting table 77. The cassette 82 is opened in the transfer direction of the substrates P and is opened at the lower surface, and a step portion 83 is formed on the inner wall surface for supporting the plurality of substrates P in parallel in the vertical direction.

In the cassette mounting opening 72 of the machine body 71,
Conveying means 84 is provided, and a plurality of rollers 85 are supported by the driving means 84 so as to correspond to the guide rollers 36 of the irradiation unit 2, and are driven by a motor (not shown).
Incidentally, the roller 85 of the conveying means 84 is arranged so as to be able to enter the inside through the lower surface opening of the cassette 82 to be detached,
It is located along the central area.

FIG. 8 shows a conveying means for the light source section 1 and the irradiation section 2.
The control structure about 31 is shown. Irradiation control means 91
Controls the lighting of the lamp 12 of the light source unit 1 and the driving of the motor 18 for opening and closing the shutter 17. The conveyance control means 92 inputs the detection signals from the sensors S1, S2, S3 and conveys the conveyance means.
It controls the drive of 31 motor 31a.

Next, the operation of this embodiment will be described.

First, a cassette 82 containing a plurality of substrates P
Is set in the carry-in section 3, and an empty cassette 82 is set in the carry-out section 4.

The overall flow of the substrate P to be subjected to the ultraviolet irradiation processing by the ultraviolet irradiation device is such that the substrate P in the cassette 82 set in the carry-in section 3 is carried into the irradiation section 2, and the substrate is irradiated by the irradiation section 2. When P is irradiated with ultraviolet rays and the substrate P is unloaded from the irradiation unit 2, the auxiliary irradiation unit 5 irradiates both side edges of the substrate P with ultraviolet rays, and the substrate P is accommodated in the cassette 82 of the unloading unit 4.

Next, the ultraviolet irradiation processing will be specifically described. The irradiation control means 91 and the conveyance control means
The control by 92 is shown in FIG. 9 as a simple flowchart.

In the carry-in section 3, when the substrate P stored in the cassette 82 is supplied, the lowest substrate P stored in the cassette 82 is lowered by a predetermined amount so as to be placed on the roller 85,
The substrate P is conveyed from the inside of the cassette 82 toward the irradiation unit 2 by the rotation of the roller 85. At the time of subsequent supply, similarly, the cassette 82 is lowered by a predetermined amount, sequentially placed on the roller 85 from the lower substrate P, and sequentially conveyed to the irradiation unit 2.

A substrate P carried in from the carry-in section 3 to the irradiation section 2
Is placed between the guide rollers 36 on both sides of the conveying means 31 and is conveyed onto the irradiation opening 24 by the rotation of the guide rollers 36 (step 1).

The position of the leading edge of the substrate P being conveyed is determined by the sensor S.
When detected in step 1 (step 2), the transfer speed of the substrate P is reduced by the control of the transfer control means 92 (step 3). Further, when it is detected by the sensor S2 (step 4), the substrate P is temporarily stopped at a predetermined position above the irradiation opening 24 by the control of the transfer control means 92 (step 5).

At this time, the lamp 12 of the irradiation unit 2 is turned on in order to stabilize the radiation of ultraviolet rays, but the shutter is used.
Since 17 is closed, no ultraviolet rays are emitted from the irradiation opening 24. Similarly, the lamp of the auxiliary irradiation section 5 is also turned on, but since the shutter is closed, no ultraviolet ray is emitted from each light guide 53.

After the substrate P is temporarily stopped, the shutter 17 is opened for a predetermined time (steps 6, 7, and 8), and the ultraviolet rays emitted from the lamp 12 are irradiated through the optical system including the lenses 15 and 16 and the reflection plates 19 and 22. The substrate P is irradiated through the opening 24.

By the way, the irradiation opening 24 is an opening width changing means.
The opening width is adjusted by 32 according to the size of the substrate P. That is, as shown in FIG.
The inner end of the guide roller 36 is positioned slightly inward from the tip of the guide roller 36. Therefore, diaphragm plate
The ultraviolet rays radiated to the guide roller 36 are shielded by 45, and the irregularity of the irradiation of the ultraviolet rays on the substrate P due to the irregular reflection of the ultraviolet rays on the guide roller 36 is prevented. The diaphragm plate 46 in the transport direction is also adjusted in the same manner, so that the exposure amount of the ultraviolet rays on the substrate P is kept appropriate.

Therefore, in the irradiation unit 2, the portion of the substrate P supported by the guide rollers 36 except the both side edges is irradiated with the ultraviolet rays, and the both side edges of the substrate P have unexposed portions.

When the irradiation of the ultraviolet rays in the irradiation unit 2 is completed,
The guide roller 36 of the transport means 31 is rotated again (step 9), and the unloading of the substrate P to the unloading section 4 is started.

When the sensor S3 detects the leading end of the substrate P in the carrying direction, the shutter of the auxiliary irradiating unit 5 is opened, and the ultraviolet light emitted from the lamp is emitted from each emitting unit 54 through each optical conductor 53 and is conveyed. Ultraviolet rays are applied to both side edges of the inside substrate P.

In this way, the substrate P is carried out to the carry-out section 4, and after a lapse of a predetermined time after the sensor S3 no longer detects the substrate P, the irradiation of the ultraviolet rays from the auxiliary irradiation section 5 is stopped and the carrying means is carried. 31 is stopped (steps 10 and 1)
1).

In the carry-out section 4, the cassette 82
The uppermost stepped portion 83 that does not support the substrate P is standing by at a height slightly lower than the upper portion of the roller 85, and at this standby position, the substrate conveyed from the irradiation unit 2 by the rotation of the roller 85. P is accommodated in the cassette 82. After this accommodation, the cassette 82 is raised by a predetermined amount, and the substrate P on the roller 85 is stepped 83.
And the lower stepped portion 83 is positioned at a standby position slightly lower than the upper portion of the roller 85, and stands by for the next storage.

In this way, the substrates P accommodated in the cassette 82 of the carry-in section 3 are successively transported to the irradiation section 2, and the substrates P irradiated with the ultraviolet rays by the irradiation section 2 are stored in the cassette 82 of the carry-out section 4. Will be housed sequentially.

As described above, the light source unit 1 not related to the actual work is disposed at the rear of the irradiation unit 2, and the irradiation unit 2
Since the carry-in unit 3 and the carry-out unit 4 are provided on both sides of the substrate, the flow of the substrate P is linear, and continuous processing is possible, so that a configuration suitable for automation can be obtained. Moreover, since the irradiation unit 2 is located on the front side and the ultraviolet irradiation process is performed on the upper surface of the irradiation unit 2, cleaning of the glass plate 25 surface of the irradiation unit 2 and maintenance and inspection of the conveying means 31 can be easily performed. You can

Further, since the irradiation unit 2 temporarily stops the substrate P and irradiates it with ultraviolet rays, it is possible to reliably irradiate the substrate P with ultraviolet rays.

Further, since the conveying means 31 and the like on the upper surface of the irradiation unit 2 are covered with the cover 62, the safety of the worker can be ensured.

Since the cover 62 blocks ultraviolet rays,
It is possible to prevent the worker from being irradiated with ultraviolet rays and ensure safety. Further, since the cover 62 transmits visible light, it is possible to observe the ultraviolet irradiation state on the substrate P.

When the substrates P having different sizes are subjected to the ultraviolet irradiation treatment, the movable frames 33 on both sides of the conveying means 31 are moved so that the space between the guide rollers 36 on both sides corresponds to the widthwise dimension of the substrate P. Adjust to dimensions. Further, the opening width changing means 32 adjusts the opening width of the irradiation opening 24 according to the size of the substrate P. That is, each diaphragm plate 45 in the width direction is moved,
The inner end of the diaphragm plate 45 is adjusted to a position in the width direction of the substrate P, that is, a position corresponding to the position of the tip of the guide roller 36. Further, each diaphragm plate 46 in the transport direction is moved, and the tip end portion of the diaphragm plate 46 is adjusted to a position corresponding to the dimension of the substrate P in the transport direction.

[0056]

According to the first aspect of the present invention, the light source section unrelated to the actual work is arranged at the rear of the irradiation section, and the carry-in section and the carry-out section are arranged at both sides of the irradiation section. The flow of the object to be irradiated becomes linear and continuous processing becomes possible, and the configuration suitable for automation can be obtained. Moreover, since the irradiation unit is located on the front side and the ultraviolet irradiation process is performed on the upper surface of the irradiation unit, cleaning of the irradiation unit and maintenance and inspection of the transporting unit can be easily performed.

According to a second aspect of the present invention, in the first aspect of the present invention, since the irradiation object conveyed by the conveying means is temporarily stopped at a predetermined position on the irradiation opening of the irradiation section and the ultraviolet rays are irradiated, It is possible to reliably irradiate the irradiation object with ultraviolet rays.

According to the invention of claim 3, in the invention of claim 1, the upper surface of the irradiation section is covered with a cover to prevent dust and the like from entering the irradiation section, and at the same time, the worker from the conveying means on the upper surface of the irradiation section. Can be protected.

According to the invention of claim 4, in the invention of claim 3, since the cover blocks ultraviolet rays, it is possible to prevent the worker from being irradiated with ultraviolet rays, and the cover transmits visible light. Therefore, it is possible to observe the ultraviolet irradiation state of the irradiation target.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of an ultraviolet irradiation device of the present invention.

FIG. 2 is a cross-sectional view of a light source section and an irradiation section.

FIG. 3 is a front view of a light source unit and an irradiation unit.

FIG. 4 is a plan view of a conveying unit.

FIG. 5 is a cross-sectional view of a part of the transport unit.

FIG. 6 is a cross-sectional view of a carry-in section and a carry-out section as seen from the front-rear direction.

FIG. 7 is a cross-sectional view of a carry-in section and a carry-out section viewed from a side surface direction.

FIG. 8 is a control block diagram.

FIG. 9 is a flowchart.

[Explanation of symbols]

 1 Light Source Section 2 Irradiation Section 3 Carrying In Section 4 Carry Out Section 12 Lamp 22 Reflector 31 Conveying Means 62 Cover 92 Conveying Control Means P Irradiated Objects S1, S2, S3 Sensors

Claims (4)

[Claims] 1. A light source section having a lamp for emitting ultraviolet rays, an irradiation opening for irradiating an object to be irradiated with ultraviolet rays, which is disposed in a front portion of the light source section, and below the irradiation opening. An irradiation unit having a reflection plate that reflects the ultraviolet light guided from the light source unit toward the irradiation opening, and a carry-in unit that is disposed on one side of the irradiation unit and that carries in the irradiation target object that irradiates the ultraviolet light. An unloading unit that is disposed on the other side of the irradiation unit and that carries out the irradiation target object that has been irradiated with ultraviolet light; and an irradiation unit that is disposed on the upper surface of the irradiation unit and that is carried into the loading unit. An ultraviolet irradiation device, comprising: a conveying unit that conveys the irradiation unit onto the irradiation opening and conveys the irradiation unit to the unloading unit. 2. A sensor is provided for detecting a transportation position of an irradiation target transported by the transporting means, and the irradiation target to be irradiated with ultraviolet rays is temporarily stopped at a predetermined position on the irradiation opening based on the detection by the sensor. 2. A conveyance control means for controlling the conveyance means is provided.
The ultraviolet irradiation device described. 3. The ultraviolet irradiation device according to claim 1, further comprising a cover that covers an upper surface of the irradiation unit. 4. The ultraviolet irradiation device according to claim 3, wherein the cover blocks ultraviolet rays and transmits visible light.