JPS58200549A - 半導体評価用装置 - Google Patents

半導体評価用装置

Info

Publication number
JPS58200549A
JPS58200549A JP57085201A JP8520182A JPS58200549A JP S58200549 A JPS58200549 A JP S58200549A JP 57085201 A JP57085201 A JP 57085201A JP 8520182 A JP8520182 A JP 8520182A JP S58200549 A JPS58200549 A JP S58200549A
Authority
JP
Japan
Prior art keywords
chip
stress
evaluation
semiconductor
semiconductor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57085201A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355982B2 (enExample
Inventor
Hirota Makino
裕太 牧野
Teruichiro Tanaka
田中　輝一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57085201A priority Critical patent/JPS58200549A/ja
Publication of JPS58200549A publication Critical patent/JPS58200549A/ja
Publication of JPH0355982B2 publication Critical patent/JPH0355982B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/90—
    • H10P74/00—
    • H10W72/932—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Wire Bonding (AREA)
JP57085201A 1982-05-18 1982-05-18 半導体評価用装置 Granted JPS58200549A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57085201A JPS58200549A (ja) 1982-05-18 1982-05-18 半導体評価用装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57085201A JPS58200549A (ja) 1982-05-18 1982-05-18 半導体評価用装置

Publications (2)

Publication Number Publication Date
JPS58200549A true JPS58200549A (ja) 1983-11-22
JPH0355982B2 JPH0355982B2 (enExample) 1991-08-27

Family

ID=13852003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57085201A Granted JPS58200549A (ja) 1982-05-18 1982-05-18 半導体評価用装置

Country Status (1)

Country Link
JP (1) JPS58200549A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63285945A (ja) * 1987-05-18 1988-11-22 Fujitsu Ltd 半導体集積回路及び製造方法
JP2012169524A (ja) * 2011-02-16 2012-09-06 Mitsubishi Electric Corp 半導体装置及びその試験方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140878A (enExample) * 1974-10-04 1976-04-06 Hitachi Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140878A (enExample) * 1974-10-04 1976-04-06 Hitachi Ltd

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63285945A (ja) * 1987-05-18 1988-11-22 Fujitsu Ltd 半導体集積回路及び製造方法
JP2012169524A (ja) * 2011-02-16 2012-09-06 Mitsubishi Electric Corp 半導体装置及びその試験方法
US8884383B2 (en) 2011-02-16 2014-11-11 Mitsubishi Electric Corporation Semiconductor device and method of testing the same

Also Published As

Publication number Publication date
JPH0355982B2 (enExample) 1991-08-27

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