JPS5820003A - Production of strip line - Google Patents

Abstract

PURPOSE:To reduce the loss of production for a strip line, by forming a full- surface electrode film of Ni on the 1st main surface of the 1st and 2nd dielectric materials respectively, and forming a center electrode film of Ni on the 2nd main surface of these dielectric materials each to calcine them in a reducing atmosphere. CONSTITUTION:A center electrode film 13 is formed on a single side of the 1st dielectric green sheet 11 by a printing, vapor deposition and the like processes. At the same time, a full-surface electrode film 14 is formed on the other side of the 2nd dielectric green sheet 11 by the printing, vapor deposition and the like processes. A full-surface electrode film 15 is formed on a single side of the 2nd dielectric green sheet 12 by the printing, vapor deposition and the like processes. Then the other side of the sheet 12 is press-fixed to a single side of the sheet 11, i.e. the side containing the film 13. Then these sheets are calcined with reduction in a gaseous mixture of N2 and H2. In such process, a strip line is produced with a small loss.

Description

DETAILED DESCRIPTION OF THE INVENTION This invention provides a center electrode 2 on one main surface of a dielectric substrate 2 made of stripline mina or beryllia with excellent characteristics.
is formed, and an entire surface electrode 3 is formed on the other main surface.

In such a structure, a dielectric substrate 2 is placed above the center electrode 2.
Due to the presence of air, for example, which has a dielectric constant different from that of the substrate, there are disadvantages such as: (1) the effective Er becomes much smaller than the fly noise of the substrate 2, (2) radiation loss occurs, and (3) completeness.

Therefore, ■ increase the effective dielectric constant and make the strip line smaller, ■ reduce radiation loss, and ■ create a complete TBM.
The design should be self-contained and unaffected by the outside world so that the design is elegant. For this purpose, a strip line has been proposed that has a structure consisting of a pair of dielectric substrates with full-surface electrodes on one side and a center electrode between the other sides.

By the way, the loss α of the strip line is generally as follows.
is expressed in

g ag 414 10a C+a r ζ where ad is the dielectric loss of the dielectric substrate, aC is the loss due to the electrical resistance of the electrode (copper loss), and 'r is the radiation loss. -1 of the material used in the embodiments of the present invention is usually on the order of 1G-', and the major proportion of ad in α is aC or αt.
generally smaller than tr:.

aj is 0 in the structure where the center electrode exists between the dielectric substrates as described above. Therefore, reducing copper loss as much as possible leads to reducing stripline loss.

It is therefore an object of the invention to provide a stripline with reduced losses.

The gist of this invention is, for example, (BaCa) ZrO3+
MnO□-based material, CaZrOs +MnOz yarn material, etc., a full-surface electrode film made of Ni is present on the first main surface of each of the first and second dielectric green sheets, and the 4,! ! ! After placing a center electrode film made of Ni between the second main surfaces of each of the second dielectric green sheets, the first and second green sheets are pressed together, and the sheet and electrode are bonded together in a reducing atmosphere. It is to be fired.

Here, Ni is used for the electrode because it has a lower electrical resistance than PT or Pd, which are normally used as electrodes, and baking is performed in a reducing atmosphere to prevent oxidation of the N1 electrode. This is to keep electrical resistance low. However, when a normal dielectric sheet is baked in a reducing atmosphere, the dielectric material is reduced and becomes a semiconductor. 1. Electrical shield material 2. t, as mentioned above, (BaCa
) A non-reducible dielectric material that does not become a semiconductor even when baked in a reducing atmosphere, such as the ZrO3+MnO□ system↑CaZr01+MnO□ material system, must be used.

Other objects and features of the invention will become apparent from the following examples.

Figure 2 is obtained in one embodiment of this invention, and 1
Reference numeral 1 denotes a first dielectric body made of a conventionally known ri't material as described above (Japanese Unexamined Patent Publication Nos. 53-98099, 1983-98100), and 12 represents a first dielectric material. A second dielectric similar to 11, 13 a center electrode made of Ni, and 1. It exists between the first and second dielectrics. 14.15
are full-surface electrodes made of Ni, which are present on the surfaces of the first and second dielectrics so as to pair with the center electrode 13 via the first and second dielectrics, respectively.

Next, the manufacturing method will be explained according to FIG.

The center electrode film 13 is formed on one side of the first dielectric green sheet 11 by a method such as printing or vapor deposition using the above-mentioned material. A full-surface electrode film 14 is formed on the other surface of the first dielectric material (Green Sea) 11 by a method such as printing or vapor deposition. A full-surface electrode film 15 is formed on one side of the second electrically shielding green sheet 12 by a method such as printing or vapor deposition. Second
The other surface of the dielectric green sheet 12 is pressed onto one surface of the first dielectric green sheet 11, that is, the surface on which the center electrode film 13 is provided. Thereafter, by reduction firing in a mixture of N2 and N2, the first and second dielectric green sheets 11 and 12 are fused together. A plurality of center electrode films 13 may be provided as shown in FIG. 4, or as shown in FIGS. The structure shown in Fig. J4 may be constructed by stacking a plurality of layers as shown in Fig. 5, for example.

As is clear from the above embodiments, according to the present invention, a full-surface electrode film made of Ni is present on the first main surface of each of the first and second non-reducible dielectric green sheets, and After the central electrode film made of Ni was placed between the second main surfaces of the first and second non-reducible dielectric green sheets, the firing was performed in a reducing atmosphere, so that radiation and radiation losses were reduced. In a structure without copper loss, an electrode with low copper loss can be used, and the characteristics can be further improved.

Because of these effects, the present invention is a useful invention that can be applied to branchers and filters, for example.

[Brief explanation of the drawing]

FIG. 1 is a side view of conventional example 9), FIG. 2 is a side view of an embodiment of the present invention, FIG. 3 is an exploded perspective view of the same, and FIG. 4 is a side view of a modified example of the same. FIG. 5 is a side view of a modified example of the same. 11 is the first dielectric, 12 is the second dielectric, 13# is the center electrode, and 14.15 is the entire surface electrode. Patent applicant Co., Ltd., Murata Manufacturing Y/m

Claims (1)

[Claims] A full-surface electrode film consisting of a pair is present on the first main surface of each of the second non-reducing dielectric green sheets. A method for manufacturing a strip line, characterized in that a center electrode film made of Ni is present between each second main surface and then fired in a reducing atmosphere.