JPS58197797A - 多層配線の形成方法 - Google Patents
多層配線の形成方法Info
- Publication number
- JPS58197797A JPS58197797A JP57080514A JP8051482A JPS58197797A JP S58197797 A JPS58197797 A JP S58197797A JP 57080514 A JP57080514 A JP 57080514A JP 8051482 A JP8051482 A JP 8051482A JP S58197797 A JPS58197797 A JP S58197797A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- wiring conductor
- resin
- adhesive tape
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 18
- 239000004020 conductor Substances 0.000 claims description 55
- 239000011347 resin Substances 0.000 claims description 44
- 229920005989 resin Polymers 0.000 claims description 44
- 239000002390 adhesive tape Substances 0.000 claims description 24
- 239000000853 adhesive Substances 0.000 claims description 23
- 230000001070 adhesive effect Effects 0.000 claims description 23
- 239000008188 pellet Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 14
- 229920001187 thermosetting polymer Polymers 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000012466 permeate Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 16
- 239000011888 foil Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 235000013351 cheese Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000013464 silicone adhesive Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 235000001270 Allium sibiricum Nutrition 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000088 plastic resin Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57080514A JPS58197797A (ja) | 1982-05-13 | 1982-05-13 | 多層配線の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57080514A JPS58197797A (ja) | 1982-05-13 | 1982-05-13 | 多層配線の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58197797A true JPS58197797A (ja) | 1983-11-17 |
| JPS62600B2 JPS62600B2 (enrdf_load_stackoverflow) | 1987-01-08 |
Family
ID=13720420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57080514A Granted JPS58197797A (ja) | 1982-05-13 | 1982-05-13 | 多層配線の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58197797A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63119288A (ja) * | 1986-11-06 | 1988-05-23 | 株式会社村田製作所 | 回路基板 |
| JP2014016469A (ja) * | 2012-07-09 | 2014-01-30 | Sony Corp | 実装基板および光学装置 |
-
1982
- 1982-05-13 JP JP57080514A patent/JPS58197797A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63119288A (ja) * | 1986-11-06 | 1988-05-23 | 株式会社村田製作所 | 回路基板 |
| JP2014016469A (ja) * | 2012-07-09 | 2014-01-30 | Sony Corp | 実装基板および光学装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62600B2 (enrdf_load_stackoverflow) | 1987-01-08 |
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