JPS58197280A - ドライエツチング装置 - Google Patents

ドライエツチング装置

Info

Publication number
JPS58197280A
JPS58197280A JP57079332A JP7933282A JPS58197280A JP S58197280 A JPS58197280 A JP S58197280A JP 57079332 A JP57079332 A JP 57079332A JP 7933282 A JP7933282 A JP 7933282A JP S58197280 A JPS58197280 A JP S58197280A
Authority
JP
Japan
Prior art keywords
chamber
etching
cassette
chambers
preliminary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57079332A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339676B2 (cs
Inventor
Onori Ishikawa
石河　大典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57079332A priority Critical patent/JPS58197280A/ja
Publication of JPS58197280A publication Critical patent/JPS58197280A/ja
Publication of JPS6339676B2 publication Critical patent/JPS6339676B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP57079332A 1982-05-11 1982-05-11 ドライエツチング装置 Granted JPS58197280A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57079332A JPS58197280A (ja) 1982-05-11 1982-05-11 ドライエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57079332A JPS58197280A (ja) 1982-05-11 1982-05-11 ドライエツチング装置

Publications (2)

Publication Number Publication Date
JPS58197280A true JPS58197280A (ja) 1983-11-16
JPS6339676B2 JPS6339676B2 (cs) 1988-08-05

Family

ID=13686930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57079332A Granted JPS58197280A (ja) 1982-05-11 1982-05-11 ドライエツチング装置

Country Status (1)

Country Link
JP (1) JPS58197280A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247031A (ja) * 1985-04-24 1986-11-04 Hitachi Ltd プラズマ処理装置のクリ−ニング方法
JP2001035836A (ja) * 1999-07-19 2001-02-09 Matsushita Electronics Industry Corp ドライエッチング方法および装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141570A (en) * 1979-04-18 1980-11-05 Anelva Corp Dry etching apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141570A (en) * 1979-04-18 1980-11-05 Anelva Corp Dry etching apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247031A (ja) * 1985-04-24 1986-11-04 Hitachi Ltd プラズマ処理装置のクリ−ニング方法
JP2001035836A (ja) * 1999-07-19 2001-02-09 Matsushita Electronics Industry Corp ドライエッチング方法および装置

Also Published As

Publication number Publication date
JPS6339676B2 (cs) 1988-08-05

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