JPS58194389A - Green sheet printing method - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The ζO invention relates to a method of printing a conductor/quaternary insulating layer on a green sheet, and more particularly to a method of positioning the green sheet during printing.

[Technical background of the invention and its problems]

A green sheet printing method is known as one of the methods for manufacturing multilayer wiring boards for hybrid integrated circuits. This is a sheet-like substrate called a green sheet, which is made by solidifying an insulating powder, such as an insulating Ceraoc powder mainly composed of alumina, with an organic binder. The insulator layer and, if necessary, an O resistance structure as an element are printed by screen printing or the like and fired.

Conventionally, thick film printed circuit boards are often used as multilayer wiring boards, so the manufacturing process for thick film printed circuit boards involves printing a conductor on a polished and erected board and firing it, then printing an insulator and firing it. , firing is performed layer by layer. Even if the position of this round is shifted when printing the /4 turns of the first layer, it is possible to wash the board and print again. When placing the board on the stage of a printing press, positioning could be performed with good reproducibility by standing the board on the stage and making contact with nine positioning bins.

On the other hand, the green sheet shrinks in size by firing, and it is not possible to fire each printed turn layer by layer, so if alignment during printing fails, the substrate It is impossible to wash and reprint. Therefore, compared to the case of thick film printing, in order to obtain the same level of /4 turn accuracy, much more precise positioning is required. However, since the green sheet is a soft material and plastically deforms when the edge is brought into contact with the positioning bin, it is difficult to perform accurate positioning with good reproducibility.

For these reasons, in conventional green sheet printing, it is difficult to obtain a turn precision of about 100 μm, which is equivalent to thick film printing.

[Purpose of the invention]

An object of the present invention is to provide a green sheet printing method capable of obtaining printing patterns with high precision and good reproducibility.

[Outline of invention cost]

This invention adhesively fixes a green sheet onto a metal plate,
This metal plate is placed on a stage of a printing machine, and the edge of the metal plate is brought into contact with a plurality of positioning pins set up on this stage to position the green sheet and print in good condition. As “Ru・
([Effects of the Invention] According to the present invention, the positioning of the green sheet during printing is performed with high precision and good reproducibility via a metal plate that does not undergo plastic deformation like a green sheet, so that It is possible to almost eliminate misalignment between l-turns, misalignment of the nolin position between layers in the case of multiple layers, and misalignment of the accuracy of turns between sheets.It also prevents deformation of the green sheet due to handling during printing. Ru.

Therefore, it is possible to perform printing with good reproducibility of the same degree of turn precision as thick film printing of approximately 100 μm, which was conventionally considered impossible with green sheet printing.

[Embodiments of the invention]

FIG. 1 is a diagram for explaining the first embodiment of the present invention. In FIG. 1, 1 is a green sheet made by solidifying insulating powder with an organic binder and forming it into a sheet. When printing, use a wax-like adhesive on a metal plate 2 that uses aluminum, iron, or stainless steel.
Fix it. Then, place the metal plate 2 on the stage J of the printing machine with the adhesive side of the green sheet 1 and the opposite sea bream tube under both sides, and then place the metal plate 2 on the stage The green sheet 1 is positioned by coming into contact with the positioning pins 4a to 4 placed above.

In this state, as shown in No. 1N-), a conductor/Lean 1 (for example, a wiring/arm turn) is printed on the green sheet 1 using a screen 5 and a squeegee 6, and after drying, another conductor/Line turn a ( For example, I77'' printing is carried out. When obtaining a multilayer wiring board, /4 turns consisting of conductors and insulators are printed alternately by the same process, and fired at up to 41 tK.

In the printing process 8 described above, the metal plate 2 is placed in the positioning bin 4.
No plastic deformation occurs even when the green sheets 1 to 4C are pressed, and on the other hand, since the green sheet 1 is fixed to the metal plate 2, there is no plastic deformation when printing the green sheet 1 and when printing the pattern a. The position of the green sheet 1 with respect to the stage 3 does not change during the process. Therefore, the relative positional relationship of the printer 76.1 can be set accurately, and the same printing can be performed on multiple green sheets using the same device. If you do
The above relative positional relationship of O can be maintained the same between sheets. As a result, it is possible to obtain arm turning accuracy comparable to that of conventional thick film printing.

FIG. 2 shows a second embodiment of the present invention, in which an opening 2a is provided in the center of the metal plate 2 so that the green sheet 1 can be easily removed from the metal plate 2 after printing.
By inserting the convex portion 3a formed on the stage S into the field so that the upper end surface of the convex portion 3a coincides with the upper surface of the metal plate 2, only the peripheral portion of the green sheet 1 is bonded to the metal plate 2. This is an example in which the central portion is supported by the upper end surface of the convex portion ja of the stage 3. In this case, a hole for vacuuming may be formed in the stage 3 to ensure the fixation of the green sheet 1, and a vacuum chuck may also be used to fix the green sheet 1.

When the green sheet 1 is peeled off from the metal plate 2 after printing,
Green sheet 1 may be deformed, but the t-trench green sheet positioned as shown in the figure) JO No. 2 ←
This problem does not arise if only the area indicated by f is cut out using chinda.

FIG. 3 shows another embodiment of Jin's invention, in which a 181 metal plate 11 having an opening 11h in the center and an upper end surface of the metal plate 11 in the opening of the metal plate 1 are shown. It consists of a second metal plate 12 having a convex part IJ,a inserted so as to match the top surface, and the 10-year-old side part of the first green sheet is glued to the first metal plate 11, and the center part is attached to the second metal plate 12. The wire mesh plate 11 is supported by the upper end surface of the convex portion 12a.

In addition, 1. The second metal plates 11,12 are integrated by means of screws.

According to this embodiment, in addition to obtaining the same effect as the embodiment shown in Fig. 2, the stage JK does not require the convex portion J1 as in the 1m2 diagram, so the same stage can handle green sheets of various sizes. It has the advantage of being possible.

[Brief explanation of the drawing]

Fig. 1(a) is a perspective view and a side view for explaining the first embodiment of the present invention, and Fig. 2(a)) is a perspective view and side view for explaining the second embodiment of the invention. A plan view and a sectional view taken along the line A-M', and Figures 31 and 31 are a plan view and a sectional view taken along the line B-B' for explaining the third embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Green sheet, 2...Metal plate, 3...Stage, 41-4C...Positioning pin, 5...Screen, 6...Ski-y, v, s...4 BodyAfi
-:/, 9...vacuum hole, 1le12...first
．． Second metal plate. Applicant's representative Patent attorney Takehiko Suzue No. 11a) (b) Figure 2 (a) (1))

Claims (3)

[Claims] (1) When printing at least a conductor/yatern on a green sheet formed by forming an insulating powder into a sheet using an organic binder, the green sheet is adhesively fixed onto a metal plate, and this metal plate is placed on the stage of a printing machine, A green sheet printing method characterized in that printing is carried out with the edge of the metal plate still in contact with a plurality of nine positioning bins set up on the stage. (2) A patent claim characterized in that an opening is provided in the center of the metal plate, and a protrusion formed on a stage of a printing press is inserted into the opening so that its upper end surface coincides with the upper surface of the metal plate. The green sheet printing method according to item j81. (3) a first metal plate having an opening in the center;
A second metal plate is inserted into the opening of the first metal plate so that its upper end surface coincides with the upper surface of the tenth metal plate, and has nine convex portions, and a green sheet is attached to the first metal plate. O green sheet printing method according to claim 1, characterized in that the green sheet is fixed by adhesive.