JPS58192249A - 高周波誘導加熱型液体金属イオン源 - Google Patents

高周波誘導加熱型液体金属イオン源

Info

Publication number
JPS58192249A
JPS58192249A JP57075279A JP7527982A JPS58192249A JP S58192249 A JPS58192249 A JP S58192249A JP 57075279 A JP57075279 A JP 57075279A JP 7527982 A JP7527982 A JP 7527982A JP S58192249 A JPS58192249 A JP S58192249A
Authority
JP
Japan
Prior art keywords
ion source
liquid metal
metal ion
induction heating
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57075279A
Other languages
English (en)
Japanese (ja)
Other versions
JPH027499B2 (enrdf_load_stackoverflow
Inventor
Akira Shimase
朗 嶋瀬
Toru Ishitani
亨 石谷
Hifumi Tamura
田村　一二三
Hiroshi Yamaguchi
博司 山口
Takeoki Miyauchi
宮内　建興
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57075279A priority Critical patent/JPS58192249A/ja
Publication of JPS58192249A publication Critical patent/JPS58192249A/ja
Publication of JPH027499B2 publication Critical patent/JPH027499B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57075279A 1982-05-07 1982-05-07 高周波誘導加熱型液体金属イオン源 Granted JPS58192249A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57075279A JPS58192249A (ja) 1982-05-07 1982-05-07 高周波誘導加熱型液体金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57075279A JPS58192249A (ja) 1982-05-07 1982-05-07 高周波誘導加熱型液体金属イオン源

Publications (2)

Publication Number Publication Date
JPS58192249A true JPS58192249A (ja) 1983-11-09
JPH027499B2 JPH027499B2 (enrdf_load_stackoverflow) 1990-02-19

Family

ID=13571626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57075279A Granted JPS58192249A (ja) 1982-05-07 1982-05-07 高周波誘導加熱型液体金属イオン源

Country Status (1)

Country Link
JP (1) JPS58192249A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654814U (ja) * 1993-12-20 1994-07-26 佐二 萩原 合掌用枠組
KR20170117364A (ko) * 2014-10-13 2017-10-23 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 이차 이온 질량 분광계를 위한 세슘 일차 이온 소스
US10672602B2 (en) 2014-10-13 2020-06-02 Arizona Board Of Regents On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654814U (ja) * 1993-12-20 1994-07-26 佐二 萩原 合掌用枠組
KR20170117364A (ko) * 2014-10-13 2017-10-23 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 이차 이온 질량 분광계를 위한 세슘 일차 이온 소스
US10672602B2 (en) 2014-10-13 2020-06-02 Arizona Board Of Regents On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer

Also Published As

Publication number Publication date
JPH027499B2 (enrdf_load_stackoverflow) 1990-02-19

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