JPS58185766A - 膜作成方法 - Google Patents

膜作成方法

Info

Publication number
JPS58185766A
JPS58185766A JP6698682A JP6698682A JPS58185766A JP S58185766 A JPS58185766 A JP S58185766A JP 6698682 A JP6698682 A JP 6698682A JP 6698682 A JP6698682 A JP 6698682A JP S58185766 A JPS58185766 A JP S58185766A
Authority
JP
Japan
Prior art keywords
substrate
holder
film
heat
packing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6698682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6330397B2 (enExample
Inventor
Tadayoshi Otani
男谷　忠義
Hiroyuki Ogawa
博之 小川
Kanji Watanabe
渡辺　完治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP6698682A priority Critical patent/JPS58185766A/ja
Publication of JPS58185766A publication Critical patent/JPS58185766A/ja
Publication of JPS6330397B2 publication Critical patent/JPS6330397B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP6698682A 1982-04-21 1982-04-21 膜作成方法 Granted JPS58185766A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6698682A JPS58185766A (ja) 1982-04-21 1982-04-21 膜作成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6698682A JPS58185766A (ja) 1982-04-21 1982-04-21 膜作成方法

Publications (2)

Publication Number Publication Date
JPS58185766A true JPS58185766A (ja) 1983-10-29
JPS6330397B2 JPS6330397B2 (enExample) 1988-06-17

Family

ID=13331842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6698682A Granted JPS58185766A (ja) 1982-04-21 1982-04-21 膜作成方法

Country Status (1)

Country Link
JP (1) JPS58185766A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200963A (ja) * 1984-03-23 1985-10-11 Hitachi Ltd 薄膜形成装置
JP2003089867A (ja) * 2001-09-18 2003-03-28 Toppan Printing Co Ltd 蒸着薄膜の製造方法
JP2007154316A (ja) * 1999-07-14 2007-06-21 Samsung Sdi Co Ltd 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5542049U (enExample) * 1978-09-12 1980-03-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5542049U (enExample) * 1978-09-12 1980-03-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200963A (ja) * 1984-03-23 1985-10-11 Hitachi Ltd 薄膜形成装置
JP2007154316A (ja) * 1999-07-14 2007-06-21 Samsung Sdi Co Ltd 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置
JP2003089867A (ja) * 2001-09-18 2003-03-28 Toppan Printing Co Ltd 蒸着薄膜の製造方法

Also Published As

Publication number Publication date
JPS6330397B2 (enExample) 1988-06-17

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