JPS58182523A - 焦電型赤外線検出器の製造方法 - Google Patents
焦電型赤外線検出器の製造方法Info
- Publication number
- JPS58182523A JPS58182523A JP57066454A JP6645482A JPS58182523A JP S58182523 A JPS58182523 A JP S58182523A JP 57066454 A JP57066454 A JP 57066454A JP 6645482 A JP6645482 A JP 6645482A JP S58182523 A JPS58182523 A JP S58182523A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pyroelectric
- grooves
- support base
- original plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000853 adhesive Substances 0.000 claims abstract description 17
- 230000001070 adhesive effect Effects 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 3
- 229920006332 epoxy adhesive Polymers 0.000 abstract description 5
- 239000002253 acid Substances 0.000 abstract description 4
- 238000005530 etching Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000008188 pellet Substances 0.000 description 20
- 230000007423 decrease Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 241000277331 Salmonidae Species 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229940095676 wafer product Drugs 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
- H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
Landscapes
- Radiation Pyrometers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57066454A JPS58182523A (ja) | 1982-04-20 | 1982-04-20 | 焦電型赤外線検出器の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57066454A JPS58182523A (ja) | 1982-04-20 | 1982-04-20 | 焦電型赤外線検出器の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58182523A true JPS58182523A (ja) | 1983-10-25 |
JPS6351494B2 JPS6351494B2 (enrdf_load_stackoverflow) | 1988-10-14 |
Family
ID=13316229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57066454A Granted JPS58182523A (ja) | 1982-04-20 | 1982-04-20 | 焦電型赤外線検出器の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58182523A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5099120A (en) * | 1989-06-20 | 1992-03-24 | U.S. Philips Corporation | Thermal-radiation detectors, detection systems and their manufacture |
US5497002A (en) * | 1994-10-24 | 1996-03-05 | Servo Corporation Of America | Pyroelectric crystal element and array mounting method |
CN103424764A (zh) * | 2013-07-29 | 2013-12-04 | 中国原子能科学研究院 | 一种射线辐射场剂量分布测量装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10321639A1 (de) * | 2003-05-13 | 2004-12-02 | Heimann Sensor Gmbh | Infrarotsensor mit optimierter Flächennutzung |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673323A (en) * | 1979-11-20 | 1981-06-18 | Toshiba Corp | Manufacture of infrared ray detection element |
-
1982
- 1982-04-20 JP JP57066454A patent/JPS58182523A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673323A (en) * | 1979-11-20 | 1981-06-18 | Toshiba Corp | Manufacture of infrared ray detection element |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5099120A (en) * | 1989-06-20 | 1992-03-24 | U.S. Philips Corporation | Thermal-radiation detectors, detection systems and their manufacture |
US5497002A (en) * | 1994-10-24 | 1996-03-05 | Servo Corporation Of America | Pyroelectric crystal element and array mounting method |
CN103424764A (zh) * | 2013-07-29 | 2013-12-04 | 中国原子能科学研究院 | 一种射线辐射场剂量分布测量装置 |
CN103424764B (zh) * | 2013-07-29 | 2015-06-17 | 中国原子能科学研究院 | 一种射线辐射场剂量分布测量装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6351494B2 (enrdf_load_stackoverflow) | 1988-10-14 |
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