JPS58182443U - semiconductor equipment - Google Patents
semiconductor equipmentInfo
- Publication number
- JPS58182443U JPS58182443U JP7929582U JP7929582U JPS58182443U JP S58182443 U JPS58182443 U JP S58182443U JP 7929582 U JP7929582 U JP 7929582U JP 7929582 U JP7929582 U JP 7929582U JP S58182443 U JPS58182443 U JP S58182443U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor equipment
- polycrystalline silicon
- substrate
- insulating film
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Fuses (AREA)
- Techniques For Improving Reliability Of Storages (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａおよびｂは従来の多結晶シリコンフユーズの平
面図および断面図、第２図ａおよびｂは本考案にかか）
る多結晶シリコンフユーズの平面図および断面図である
。
図中、１は多結晶シリコン、２はＰＳＧ膜、３はシリコ
ン基板、４は５ｉｎ２膜、ＩＭは溶断部を示す。(Fig. 1 a and b are a plan view and a cross-sectional view of a conventional polycrystalline silicon fuse, and Fig. 2 a and b are according to the present invention)
FIG. 2 is a plan view and a cross-sectional view of a polycrystalline silicon fuse. In the figure, 1 is polycrystalline silicon, 2 is a PSG film, 3 is a silicon substrate, 4 is a 5in2 film, and IM is a fused portion.
Claims (1)
して、基板とは反対の導電型領域上に設けられた構造を
有することを特徴とする半導体装置。1. A semiconductor device having a structure in which at least a fused portion of a polycrystalline silicon fuse is provided on a conductivity type region opposite to a substrate with an insulating film interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7929582U JPS58182443U (en) | 1982-05-28 | 1982-05-28 | semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7929582U JPS58182443U (en) | 1982-05-28 | 1982-05-28 | semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58182443U true JPS58182443U (en) | 1983-12-05 |
Family
ID=30088482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7929582U Pending JPS58182443U (en) | 1982-05-28 | 1982-05-28 | semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58182443U (en) |
-
1982
- 1982-05-28 JP JP7929582U patent/JPS58182443U/en active Pending
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