JPS58178244A - 規則性パタ−ンの欠陥検査装置 - Google Patents

規則性パタ−ンの欠陥検査装置

Info

Publication number
JPS58178244A
JPS58178244A JP6099782A JP6099782A JPS58178244A JP S58178244 A JPS58178244 A JP S58178244A JP 6099782 A JP6099782 A JP 6099782A JP 6099782 A JP6099782 A JP 6099782A JP S58178244 A JPS58178244 A JP S58178244A
Authority
JP
Japan
Prior art keywords
pattern
defect
signal
circuit
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6099782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH039417B2 (enrdf_load_stackoverflow
Inventor
Nobuo Tsumita
積田　伸夫
Shunsuke Mukasa
武笠　俊介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP6099782A priority Critical patent/JPS58178244A/ja
Publication of JPS58178244A publication Critical patent/JPS58178244A/ja
Publication of JPH039417B2 publication Critical patent/JPH039417B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6099782A 1982-04-14 1982-04-14 規則性パタ−ンの欠陥検査装置 Granted JPS58178244A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6099782A JPS58178244A (ja) 1982-04-14 1982-04-14 規則性パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6099782A JPS58178244A (ja) 1982-04-14 1982-04-14 規則性パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS58178244A true JPS58178244A (ja) 1983-10-19
JPH039417B2 JPH039417B2 (enrdf_load_stackoverflow) 1991-02-08

Family

ID=13158574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6099782A Granted JPS58178244A (ja) 1982-04-14 1982-04-14 規則性パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS58178244A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009229156A (ja) * 2008-03-21 2009-10-08 Pulstec Industrial Co Ltd 格子構造の検査装置および格子構造の検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009229156A (ja) * 2008-03-21 2009-10-08 Pulstec Industrial Co Ltd 格子構造の検査装置および格子構造の検査方法

Also Published As

Publication number Publication date
JPH039417B2 (enrdf_load_stackoverflow) 1991-02-08

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