JPS58175469U - 位相差測定装置 - Google Patents

位相差測定装置

Info

Publication number
JPS58175469U
JPS58175469U JP5090083U JP5090083U JPS58175469U JP S58175469 U JPS58175469 U JP S58175469U JP 5090083 U JP5090083 U JP 5090083U JP 5090083 U JP5090083 U JP 5090083U JP S58175469 U JPS58175469 U JP S58175469U
Authority
JP
Japan
Prior art keywords
circuit
output
phase difference
phase
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5090083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0225181Y2 (enrdf_load_stackoverflow
Inventor
裕 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP5090083U priority Critical patent/JPS58175469U/ja
Publication of JPS58175469U publication Critical patent/JPS58175469U/ja
Application granted granted Critical
Publication of JPH0225181Y2 publication Critical patent/JPH0225181Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Phase Differences (AREA)
JP5090083U 1983-04-07 1983-04-07 位相差測定装置 Granted JPS58175469U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5090083U JPS58175469U (ja) 1983-04-07 1983-04-07 位相差測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5090083U JPS58175469U (ja) 1983-04-07 1983-04-07 位相差測定装置

Publications (2)

Publication Number Publication Date
JPS58175469U true JPS58175469U (ja) 1983-11-24
JPH0225181Y2 JPH0225181Y2 (enrdf_load_stackoverflow) 1990-07-11

Family

ID=30061677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5090083U Granted JPS58175469U (ja) 1983-04-07 1983-04-07 位相差測定装置

Country Status (1)

Country Link
JP (1) JPS58175469U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009282047A (ja) * 2009-09-01 2009-12-03 Mitsubishi Electric Corp 位相差検出回路および傾斜角度測定装置

Also Published As

Publication number Publication date
JPH0225181Y2 (enrdf_load_stackoverflow) 1990-07-11

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