JPS5817018A - Apparatus for transferring wafer - Google Patents

Abstract

PURPOSE:To perform clean transfer without generating dust, by allowing a travelling car for transferring a cassette containing semiconductor wafers to float above a track so that the travelling car can run in a state out of contact with the floor. CONSTITUTION:Since when the travelling car body 7 is put on a track body 3, floating permanent magnets 2a, 2b of the track body 3 and floating permanent magnets 9a-9d are arranged such that their poles of the same polarity are faced to each other, the travelling car body 7 floats above the track body 3 due to the repulsion between the magnets. To drive the travelling car body 7, the electric current to an electromagnet 1 above which a permanent magnet 10 is positioned is cut, and one of electromagnets 1 that are on both sides of the permanent magnet 10, that is, one positioned on the side to which the travelling car body 7 is required to be moved, is magnetized to attract the permanent magnet 10, while the other is magnetized to repulse the permanent magnet 10, so that the travelling car body 7 is moved toward the former electromagnet 1. Thus by successively changing the direction of porality of the electromagnets 1, the travelling car body 7 is moved continuously.

Description

[Detailed Description of the Invention] The present invention is essential for automating semiconductor integrated circuit manufacturing lines! The device K1m automatically transfers wafers between manufacturing devices, and more specifically, it includes a traveling vehicle loaded with cassettes for storing semiconductor wafers, and a track on which the traveling vehicle runs. %O for wafer transfer equipment.Recently, automation of semiconductor integrated circuit manufacturing equipment has made significant progress, and cassette-to-cassette (0-0) type automation has become common. The apparatus is configured such that when medium conductor wafers are placed in a cassette and placed in a manufacturing apparatus, the wafers are automatically processed and the cassette is returned. Therefore, if there is a means to transfer cassettes containing semiconductor chips from each manufacturing device to the manufacturing device according to the manufacturing process order and load them into the manufacturing device, automation of the semiconductor integrated circuit manufacturing line becomes possible. As this type of wafer transfer device, the air track type single wafer transfer method is widely known, but this type of wafer transfer system is widely known, but this type of wafer transfer system is considered to be suitable for all wafer manufacturing equipment that can be automated for single wafer processing. However, it is not suitable for transferring wafers in a production line that includes a large number of 0-A automatic production stirrups that process a plurality of wafers at once.

In addition, a cassette containing a semiconductor sea urchin ^ is placed in orbit.

Paste it on the floor! - A cassette transfer method has been proposed that is disadvantageous due to the traveling vehicle traveling along the force, but this method has the problem of contamination by dust generated during transportation. There are problems such as the need for dustproof measures such as placing the wafer in a cassette-like sealed case, and the need for a mechanism to take the cassette in and out of the sealed case.

In view of the above, the present invention has been made to solve such problems and eliminate such drawbacks.The purpose of the present invention is to levitate a traveling vehicle that stores semiconductor wafers and transports nine cassettes from a track, KL is able to run without contacting the floor, and JIN provides a wafer transfer device that does not generate dust and is versatile.

Hereinafter, the configuration will be explained in detail with reference to illustrated embodiments.

No. 111 is an explanatory diagram showing an embodiment of the track used in the wafer transfer device according to the present invention, (- indicates a plan view, (b) indicates a sectional view, and (e) indicates a side view. *In WJ, 1 is a driving electromagnet, 1 is a permanent magnet for levitation, and 1 is an orbital body (orbit).
, 4 is a cover that covers the track body 3, and 5.6 is a lead wire of the driving electromagnet 1.

2nd Wi is an explanatory diagram showing an embodiment of the traveling vehicle used in the present invention (- is 10 which shows a plan view, and (b) is a symbol 0 which shows a side view. 1 is a square running vehicle body (traveling vehicle) % Iaelb#i Rikiryu throat mounting stand that is equipped with a cassette that stores the medium conductor sea urchin ^, 9 a a
# b e # m a m - is a permanent magnet for nine levitations arranged in a 7KN square of the main body of the traveling vehicle, and 1 is a permanent magnet for driving.

Next, the effect of the embodiment 0 shown in FIG. 2 will be described with reference to FIG.
Since the levitation permanent magnets 2a4 and the levitation permanent magnets 9-9d of the traveling vehicle body 7 are constructed so that the same polarity, for example) f4K, is applied to the levitation permanent magnet 2a4 of the vehicle body 7, the repulsion between these magnets causes
The traveling vehicle body 7 floats above the track body 3. At this time, the distance between the levitation permanent magnet 2a of the track body 3 and the permanent magnet 25 is made larger than the distance between the levitation permanent magnet 9a and the permanent magnet 9@ of the traveling vehicle body 7, which are arranged in a square shape. If the center of the traveling vehicle body 7 deviates from the center of the track body 3,
It floats stably because of the force that brings it back to the center.

In this way, the track 3 and the permanent magnet for floating the vehicle IK are arranged so that a repulsive force acts across them, and the vehicle 7 is levitated above the track 3.

Next, the driving of the traveling vehicle 10 will be explained. First, the driving permanent magnet 10 has a larger diameter than the driving electromagnet 1 shown in FIG. 5, and is positioned directly above a certain electromagnet 1 and stopped. Suppose there is. In order to maintain this state, a current should be passed through the electromagnet 1 where the permanent magnet 10 is located so as to magnetize it in the direction of attracting the permanent magnet 10, and a current should be passed through the electromagnets 1 on both sides in the direction of repulsion. To drive the traveling vehicle body 7 from this state, the permanent magnet 1
Turn off the current in the electromagnet 1 where 0 is located, and move the vehicle main body 7 of the two electromagnets 1 on both sides of it. Magnetize the electromagnet 1 and the permanent magnet 10 in the triggering direction, 1 is magnetized to repel the permanent magnet 10, the vehicle body 7 moves toward the magnetized electromagnet 1 in the direction of attraction.

Next, the current to the electromagnet 1 is cut off, and the two O electromagnets 1 on both sides are magnetized as described above.

As the direction of magnetization of the electromagnet 1 is switched in this way, the main body of the vehicle moves continuously, and
If the timing of ζO switching is accelerated little by little, the traveling vehicle 1 will gradually move faster, and if it is slowed down, it can be decelerated. Then, the cassette mounting stand (cassette part) lIm,
Since the $1+ is cut in only the part where the cassette is placed, it is possible to stably hold the lever against the acceleration and deceleration of the vehicle main body 70.

As is clear from the above, a plurality of electromagnets 1 are provided on the track 3, and a permanent magnet 10 other than the one for levitation is provided on the traveling vehicle 1.
The plurality of electromagnets 1 are arranged so that the traveling vehicle 7 can be driven in a desired direction by the magnetic force between them.
Selecting an electromagnet necessary for driving the traveling vehicle 7, applying a current to the selected electromagnet 1 to drive the traveling vehicle 1,
Alternatively, it is configured to be stopped.

FIG. 33 is a clear view showing an embodiment of an intersection with a rotation mechanism for explaining the operation of the present invention. This third IllK'sP
b The same reference numerals as in Figure 5 indicate the roaring part, t-1
,1-2,? , 1-17 is a driving electromagnet arranged at the intersection of the track 3, 11 is a large number of nozzles provided on the track 3,
This nozzle 11 is configured to eject O gas such as air to cause the traveling vehicle (see second factor C) to float.

Next is this part! IIIK The operation of the embodiment shown in FIGS. 1 and 2 #! This will be explained with reference to J.

First, the vehicle body 7, which was hot after proceeding to the intersection (see Figure 2)
The above l! The center O electromagnet 1-
1 OJ: When the driving permanent magnet 10 (see the first intention) is applied, the electromagnet 1-1 is magnetized in a direction that attracts the permanent magnet 1, and the four adjacent electromagnets 1-2, 1-3, 1-
4, 1-5 are all magnetized so as to be repelled, the vehicle body 7 stops at the center of the intersection. At this time,
Since gas such as air is ejected from the many nozzles 11, the vehicle main body 7 continues to levitate even if the levitation permanent magnet 21 and the permanent magnet 2- are not at the intersection. Also, compared to the central point between the driving permanent magnet 1 and the levitation permanent magnet 9m (or 9b, previously 9C1 or 9d), the centers of the electromagnets 1-6 to 1-17 are closer to the electromagnet 1-1. The radius of the circle formed with .
-8.1-10.1-11.1-13.1-14,1-
16. Each of 1-17 is attached to a permanent magnet 9m, 9b, 9c,!
91, for example, the permanent magnet 9
A is a permanent magnet 9 between electromagnets 1-7 and 1-8.
, permanent magnet 9C is stopped between electromagnet 1-10 and electromagnet 1-11, permanent magnet 9C is stopped between electromagnet 1-13 and electromagnet 1-14, and permanent magnet 911 is stopped between electromagnet 1-16 and electromagnet 1-17. do. In order to rotate the traveling vehicle body 7, for example, electromagnets 1-8, 1-11, 1-14
.

When magnetizing 1-17 with permanent magnets "m9b*9" and 9d in the direction of mutual attraction, permanent magnets 9m and 9belie
, 91 are electromagnets 1-8.1-11.1-14゜1-
The vehicle main body 7 rotates so that it comes to the position 17. Right, electromagnet 1-9.1-12.1-15.

When magnets 1-6 are magnetized to 5 so as to trigger each other with permanent magnets #aelk and 49sJd, the vehicle body 1 is fixedly rotated to the O position of these electromagnets.

As a result, the vehicle body 1 can be rotated to the center of the intersection.

-z*Ks For example, permanent magnet @ @ * @ b a
* @a * a is each electromagnet 1-10.1-13.1
-16, 1-70 are in good condition when they are drawn together, and when they are further heated so that they are aligned with the electromagnet 1-11.1-14.1-17.1-1, the permanent magnet 1ajbe-Electric, 94 are respectively electromagnet 1-10 and electromagnet 1-110 threshold, electromagnet 1-13 and electromagnet 11-140f! , electromagnet 1-16 and electromagnet 1-
17 and between electromagnet 1-7 and electromagnet 1-8.

In this way, 9 d", 1801", 27G", 3
Rotation position KEIIK of 61 The traveling vehicle main body 1 can be fixedly rotated.

In order to move the vehicle main body 1 in the desired direction from this intersection, as explained in FIG. 1 and FIG. 2, the driving electromagnet 1 and electromagnet! -1゜1-11-3.1-
4.1-5.1-11.1-9.1-12.1-111
This is done by controlling zero magnetization.

As is clear from the foregoing, nine nozzles 11 are installed on the track 3 to eject gas such as air to make the vehicle 7 levitate, and a plurality of electromagnets 1 are installed on the track 3. .1-1 to 1-17, and a plurality of permanent magnets 10 for driving the vehicle IK are arranged so that the vehicle 7 can be driven in a desired direction by the magnetic force between them. Electromagnet 1-1-1-17 and working vehicle 70
It is configured to select an electromagnet necessary for driving, apply a current to the selected electromagnet, drive the traveling vehicle 1, and stop a certain i.

FIG. 4 is an explanatory diagram showing an embodiment in which the wafer transfer device according to the present invention can be applied to a manufacturing device.

In Fig. 4, the parts with the same numbers as h isa and Fig. 2 indicate the phase parts; A cassette containing semiconductor Ueno 1, III is an aerodynamic set, 1 is a 0-0 type automatic manufacturing device,
17 is the sea urchin processing unit, 1111Fi loader, 1- is the 7 loader, and @a and @b are the cassette mounts.

The operation of the mixed malt example shown in tKeOj14rIAK will be explained. Cassette mounting stand I of the traveling vehicle body 1 (see No.! WilI)
Load the cassette No. 1 containing the aK4G self-conductor assembly Eva, transport it, and move the vehicle body 1 to -
- Da 1 Hatake a) Aerodynamic dragon on the cassette stand sb) 1! The loader 1 was stopped at a position where it could be loaded, and the loader 1@K"Toi empty cassette) II
into the cassette mounting stand 11bKII. Next, the traveling vehicle body 1 is processed and the semiconductor wafers are stored in nine cassettes 14.
Move the arm 1 to a position where it can be loaded onto the loader 1s, and
Loader IIK using 2m and hand 131m! Do the i term. In the same way, if you load the aerodynamic set 1s onto the arm 12 and the hand 13b into the γ-no-loader 1, the %0
-The C-type automatic manufacturing equipment 1 has a loader 1 and an unloader 14 for storing the semiconductor wafers and an empty 27 for storing the semiconductor wafers that have been processed. Now that we have $111, we can do the wafer tin layer.

And, when the job is finished, Unloader II, 111
I & 110 finished quest 80 people 29 cassettes on cassette stand 11aK arm 1! b, y) '13b Kl> Loading included, traveling vehicle body 1 is next O#! & Move to the manufacturing equipment that performs the ring.

In this way, continuous automation of semiconductor integrated circuits can be realized.

A cassette mounting platform of 8 m is mounted on the main body 1 of the vehicle.

Although the explanation has been given using an example of a factory with two 8Ks, the present invention is not limited to this, and it is also possible to transfer wafers using the traveling vehicle main body 1 with one IK cassette loading platform. φ Earlier, in the above example, the case where the traveling vehicle body 7 is square was explained as an example, but the present invention is not limited to this. It can be implemented. In addition, when the orbit is extended, it can be done by arranging the permanent magnets 2 and 211 and the electromagnet 1 so as to form concentric circular arcs centered on a point 01 outside the orbit O.

As explained above, in the present invention, since the vehicle is provided with a means for levitating the vehicle, the vehicle can travel without coming into contact with the track, and there is no occurrence of a deadlock due to travel. -/Wafer transfer is possible with the **''C feature. Processed wafers are stored in cassettes and transferred, so loft management can be performed on a cassette-by-cassette basis, and wafers are prevented from being damaged due to various equipment troubles. It has many advantages.

As described above, the present invention has a greater O effect than conventional devices of this type, and is unique as an inter-manufacturing device O-wafer transfer device necessary for automation of semiconductor integrated circuit manufacturing twins. be.

tiiamoSimple explanationJ11 is an explanatory diagram showing an example of the orbit of the wafer transfer device KM%A according to the present invention, and #I2 is an explanatory diagram showing the example of the trajectory of the wafer transfer device KM%A according to the present invention. jlIK
j1%/%ゐWaterfall train O-Example showing the embodiment lK@kaku, ga garden is from this work-owh Crossroads for explanation ゐExplanation showing the embodiment-Figure, 41I is application of the present invention to manufacturing equipment 1.1-1 to 1 to 17...Driving electromagnet, 2*, 2
b... Permanent magnet for levitation, 3... Orbit body, 7...
...Traveling vehicle body, 9ax9d...Permanent magnet for levitation, 10...Permanent magnet for drive, 11...Nozzle,
14... Addiction cassette.

Patent applicant: Nippon Telegraph and Telephone Corporation

Claims (2)

[Claims] (1) In a wafer transfer device that includes a traveling vehicle loaded with a cassette that stores Udeta Tsueno 1 and a track on which the traveling vehicle travels, a permanent magnet for levitation is provided on the track and the traveling vehicle. A means for levitating the traveling vehicle from the track by installing a means for repelling each other, a plurality of electromagnets on the track, and a permanent magnet for driving other than levitation on the traveling vehicle; The striped vehicle is arranged so that it can be driven in the desired direction by mutual magnetic force, and the driver selects the electromagnet necessary for driving the vehicle from a plurality of electromagnets, and A wafer transfer device characterized in that a means for applying a current to an electromagnet to drive or stop the traveling vehicle is shown separately. (2) In a wafer transfer device that includes a traveling vehicle loaded with cassettes for storing conductor wafers and a track along which the traveling vehicle travels, the track is equipped with nine double O-nozzles (9) air The vehicle is made to float by ejecting a gas such as 1
Means, a plurality of O electromagnets on the track, a driving MO permanent magnet on the traveling vehicle, and the magnetic force is activated by them! I
# Arrange the vehicle so that it can be driven in the desired direction,
It is characterized by comprising means for selecting the electromagnets necessary for driving the waterfall march from the plurality of electromagnets and applying a current to the nine selected electromagnets to drive or stop the wrinkling vehicle. Wafer transfer equipment.