JPS61177106A - Conveying apparatus - Google Patents

Abstract

PURPOSE:To eliminate dusts at conveying time by coating a drive vehicle for generating the dusts with a cover, magnetically levitating a truck for placing a load to be conveyed with respect to the drive vehicle to eliminate a slide. CONSTITUTION:A conveying apparatus has a truck 1 for placing a load to be conveyed and a drive vehicle 2 for driving the truck 1, and the vehicle 2 is driven by a motor 3. The outer periphery of the vehicle 2 is continuously coated by a cover 12 secured to a base in the traveling direction of the vehicle 2. The vehicle 2 receives electric power through current collectors 9a, 9b, and the truck 1 is levitated by the magnetic attracting forces from electromagnets M1, M2, M3... on the vehicle 2.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a conveyance device for use in places where dust is avoided, such as semiconductor manufacturing factories.

[Summary of the invention]

This prevents dust from being generated from the transport device by covering the entire outer circumference of the drive vehicle in a transport device installed in a place where dust is avoided, and by magnetically levitating the cart outside the cover in response to the drive vehicle. .

[Conventional technology]

The manufacture of semiconductors and the like requires an extremely clean environment, and a certain process is carried out in a so-called clean bench, and upon completion, the workpiece is transferred to a clean bench for the next process. Conventionally, for this delivery, a person stores the workpiece in a sealed container for transportation, and then transports it to the next process by hand or using a handcart.

[Problem that the invention seeks to solve]

However, with the above method, human beings are responsible for transporting the items, which may generate dust and contaminate the items being transported in the room, and it is not possible to transport the items quickly.
This method has disadvantages such as applying a shock to the workpiece, causing minute chips in the workpiece, and contaminating the workpiece.

Therefore, in order to solve these conventional drawbacks, the present invention aims to provide unmanned, rapid, dust-free, and shock-free transportation without the need for manpower.

[Means for solving problems]

In order to solve the above problems, the present invention comprises a driving vehicle, a cover that continuously covers the entire outer circumference of the driving vehicle in the running direction, and a truck disposed outside the cover in correspondence with the driving vehicle. The purpose of the cart is to be magnetically levitated and driven so that it can be transported quickly, without dust, and without impact.

[Effect]

When transported using the transport device configured as above, the dust generated from the drive vehicle will not leak outside due to the cover, and since the trolley is magnetically levitated, there are no contact parts, so no dust will be generated during transport, and the interior will be contaminated. There's nothing to do. Furthermore, by controlling the speed of the drive vehicle, there is no shock to the conveyed object and no slight damage to it.

〔Example〕

Embodiments of the invention will be described below with reference to the drawings.

In FIGS. 1, 2, and 3, 1 is a cart for carrying objects, 2 is a drive car for driving the cart, 3 is a motor for driving the drive car 2, 4 is a drive wheel, and 5 is a motor for driving the drive car 2. , 6 are driving gears, and 7 is a power supply line for transmitting power and signals, which are fixed to the base 8. Reference numeral 9 is a collector that receives power and signals from the power supply line 7 and is fixed to the drive vehicle 2. 10 are two tracks fixed to the base 8, Ml, M2. M3. M4 is an electromagnet for controlling the horizontal position of the trolley 1; M5. M6.
M7. M8 is an electromagnet that controls the vertical position of the truck 1, 81 to S8 are arranged corresponding to the electromagnets M1 to M8,
This is a position detector that detects the position of the truck 1, and the electromagnet and the position detector are fixed to the drive vehicle 2. G1~G8
are magnetic bodies fixed to the trolley 1 opposite to the electromagnets M1 to M8, each of which constitutes a magnetic circuit with the electromagnets.

Reference numeral 11 denotes a control device for controlling the electromagnet and motor, and is located on the drive wheel 2. Reference numeral 12 is a cover that continuously covers the outer periphery of the driving wheel 2 in the running direction of the driving wheel 2, and is fixed to the base 8. 14 is an auxiliary wheel fixed to the trolley 1.

Next, the operation will be explained.

The drive wheel 2 receives electric power through collectors 9a and 9b, and the top of the truck is levitated by magnetic attraction from electromagnets M1 to M8 on the drive wheel 2. Although this magnetic levitation is well known, one embodiment will be described using the block diagram of FIG. The distance detector S1 detects the distance to the right side of the truck 1, and similarly the distance detector S2 detects the distance to the left side of the truck 1. This signal is processed by the bridge circuit 20, compared with the reference signal by the comparator 21, and the electromagnet MIM 2
The signal processing circuit 22 calculates an appropriate current value for each current, and each current is amplified by the amplifier circuit 23 to control the strength of the magnetic force of the electromagnets ML and M2, so that the bogie l is horizontally centered with respect to the drive car 2. Make sure it's in position. Similarly, electromagnet M3. M4 position detector 33. The horizontal position of the truck 1 is maintained by S4, and the electromagnets M5 to M8 . The position detectors 85 to S8 keep the vertical position of the truck 1 appropriate. As described above, when the control device 11 receives a start signal and a direction signal from the outside through the power supply line 7 and the collectors 9C and 9d while the truck 1 is being levitated by magnetic force, the motor 3 rotates and the drive gears 5, 6
, the driving wheels 4 rotate and the driving vehicle 2 moves on the track 4. When the drive vehicle 2 moves, the cart 1 also moves at the same time due to the magnetic force of the electromagnets M1 to M8, and the objects on the cart can be transported.

At this time, the power supply line 7 and the collector 9. Dust is generated because sliding contact or rolling contact occurs between the drive wheel 4 and the raceway 10 and the drive gears 5 and 6. However, since there is a cover 12, this dust does not escape beyond the cover. In addition, the trolley 1 has no sliding parts and moves without contact (no dust is generated. Therefore, there is no contamination of the room in which the transport device is installed or the transported objects. Also, the motor 3 is By controlling with the speed control method, no impact force is applied to the conveyed object, so it is possible to prevent minute chips from being formed on the conveyed work.
The upper auxiliary wheels 14 are used to catch the trolley 1 on the base 8 when the power is cut off in an emergency, since the trolley 1 will no longer be magnetically levitated and will fall. Further, by installing a joint 13 on the base 8 and sucking air with a vacuum pump or the like to create a negative pressure inside the cover 12, contamination by dust generated inside the cover can be more completely prevented. Furthermore, as shown in FIG. 5, if the drive motor 3 is placed outside the drive wheel 2 and the drive wire 15 is used to drive the drive wheel 2, the weight of the drive wheel 2 is reduced and higher speed movement becomes possible. Become.

〔Effect of the invention〕

As explained above, this invention covers the driving vehicle, which generates dust due to its sliding part, with a cover, and magnetically levitates the cart on which the transported objects are placed relative to the driving vehicle, eliminating the sliding part, which eliminates the generation of dust during transportation. This has the great effect of not contaminating the installation location or conveyed items.

Furthermore, by controlling the drive motor, there is an effect that there is no shock during conveyance and no minute chips are created in the conveyed object.

[Brief explanation of drawings]

FIG. 1 is a front view of one embodiment of the present invention, FIG. 2 is a cross-sectional AA view of FIG. 1, FIG. 3 is a layout diagram of electromagnets in the drive wheel 2, and FIG. FIG. 5 is a side view of another embodiment. 1 -m=bogie 2 -m-driving vehicle M1~MS-m-electromagnet 81~S8-m-position detector 4 -m-driving wheel 10 -m-track 12 -11 cover

Claims (4)

[Claims] (1) Consisting of a drive vehicle, a cover that continuously covers the entire outer periphery of the drive vehicle in the running direction, and a bogie located outside the cover and arranged in correspondence with the drive vehicle, the bogie being connected to the bogie. and a conveyance device, characterized in that it floats by magnetic force means provided on the drive vehicle and is driven together with the truck. (2) The conveyance device according to claim 1, wherein the drive vehicle uses a motor provided on the drive vehicle as a drive source. (3) The conveyance device according to claim 1, wherein the drive wheel is driven by a wire. (4) The conveying device according to claim 1, wherein the inside of the cover is made to have a negative pressure.