JPH0745952Y2 - Carrier trolley power supply device in a clean room - Google Patents

Description

[Detailed description of the device]

[0001]

[Industrial application] Electronic parts such as silicon wafers
It is handled in a dustless atmosphere like a clean room,
When handling in the clean room, it is necessary to minimize dust generation caused by the operation of the handling equipment. The present invention is an apparatus for supplying electric power to a carriage for carrying wafers or the like in a clean room without fear of dust generation.

[0002]

2. Description of the Related Art Conventionally, a carrier truck traveling in a clean room supplies power to a prime mover for operating a chain or a fork on the truck, as disclosed in Japanese Patent Laid-Open No. 60-44430. It has a power supply cable. Since the power supply cable has one end fixed to the power supply terminal on the floor and the other end connected to the current collecting terminal of the traveling vehicle that is a moving body, the power supply cable is connected to the floor each time the vehicle travels. This movement is one of the causes of dust generation because it is crawling on the surface and can move following the carriage.

[0003]

DISCLOSURE OF THE INVENTION The present invention focuses on the fact that the equipment on a carrier truck in a clean room operates when the truck is stopped, and eliminates the problem that the truck runs by dragging a power supply cable. It removes one of the causes of dust.

[0004]

DISCLOSURE OF THE INVENTION The present invention is a wafer mounted on the upper surface of a carrier for transporting electronic components such as wafers running inside a box-shaped frame on the floor and mounted outside the frame through a slit opened in the box-shaped frame. In a carrier truck in a clean room equipped with equipment for handling electronic parts such as
Thereby fixedly provided to collectors in the conveyance carriage side of the inner feed unit transporting carriage in a clean room of a sheet electron to contact and separation operation to the power collector to the stop position該台wheel fixedly provided advance and retreat possible to the said frame body Is.

[0005]

[Function] Since the power supply and the current collector do not come into sliding contact with each other while the carrier is running, there is no dust generation due to the sliding, and the carrier stops at the desired position to transfer articles such as wafers. When power is supplied to a device that performs an operation such as mounting or elevating, the power supply fixed to the stop position is moved forward and joined to the current collector of the stopped carriage.

Therefore, it is not necessary to supply power to the carrier by the power supply cable, and there is no sliding between the power supply and the current collector.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a side view of a current collector provided on a carrier truck and a power supplier fixed at a carriage stop position, and FIG. 2 is a plan view of the current collector and power supplier when the carrier truck is stopped. Wafer transfer cart having wheels W1 and W2 traveling on stepped rails R1 and R2 mounted in a box-shaped frame body 1 of F and having a pair of guide wheels G, G guided on both side surfaces of the rail R2. A wafer handling device M (details not shown) is mounted on the upper surface of 2. A driven wheel 3 is attached to the lower surface of the carriage 2 so as to be rotatable around a vertical axis.
Is circumscribed on a rotary drive shaft 4 which is rotationally driven by a prime mover (not shown).

The driven shaft 3 is a known means, for example, Japanese Patent Laid-Open No.
Turning control is performed around the vertical axis by means as disclosed in Japanese Patent Laid-Open No. 9-38164, and the transport carriage 2 is moved by the rotational component force of the rotary drive shaft corresponding to the turning angle of the driven shaft 3.

The transport carriage 2 may be started and stopped by driving or stopping the rotary drive shaft 4. However, as disclosed in the above-mentioned Japanese Laid-Open Patent Publication, a stopper roller protruding from the lower surface of the carriage 2 is used. Alternatively, the stopper 6 that engages and disengages with the motor 5 may be moved up and down by controlling the operation of the cylinder 7, and the turning axis of the driven wheel may be changed and controlled.

A current collector 8 is fixedly mounted on the side surface of the carrier 2 and a feeder 9 is attached to the box-shaped frame 1 at a stop position of the carrier 2 by a cylinder device 10 so as to be movable back and forth in the arrow direction. When the carriage 2 is stopped, the power supply 9 is moved forward by the operation of the cylinder device 10 to collect the current 8.
When the carrier 2 is started, the cylinder device 10 is reversely operated to move the power supply 9 forward and backward to separate the power supply 9 from the current collector. It is what makes me.

[0011]

According to the present invention, since the power supply and the current collector for power feeding are separately installed so that they can be brought into contact with and separated from each other, the power supply advances to join the current collector when the carriage is stopped. The operation power is supplied to the prime mover of the wafer handling equipment on the transfer carriage, but when the carriage moves, the power supply retracts and separates from the current collector, so the current collector slides along with the movement of the carriage. There is no possibility of causing dust generation upon contact, and it has an excellent effect as a means for supplying power to a prime mover on a carrier in a clean room.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention, showing an arrangement of a current collector attached to a carrier and a power supply attached to a frame.

FIG. 2 is a plan view showing a relational position between a current collector and a power supplier.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Frame 2 Conveyor cart 3 Driven wheels 4 Rotation drive wheels 8 Current collector 9 Electric power supply 10 Reciprocating cylinder device for electronic power supply

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location // B65G 43/00 L 47/52 101 Z

Claims (1)

[Scope of utility model registration request] 1. A device for handling electronic components such as wafers mounted on the outside of the box-shaped frame through a slit opened in the box-shaped frame is provided on the upper surface of a carrier for transporting electronic components such as wafers that runs in the box-shaped frame on the floor. and the transporting carriage in the clean room, as well as fixedly provided a conveyance carriage side to the current collector of the frame within the body, the power collector to the supply electrons to contact and separation operations advance and retreat possible to the frame body in the stop position該台vehicles A power supply device for a carrier in a fixed clean room.