CN108001971B - Overhead hoisting and conveying system - Google Patents

Overhead hoisting and conveying system Download PDF

Info

Publication number
CN108001971B
CN108001971B CN201711049932.5A CN201711049932A CN108001971B CN 108001971 B CN108001971 B CN 108001971B CN 201711049932 A CN201711049932 A CN 201711049932A CN 108001971 B CN108001971 B CN 108001971B
Authority
CN
China
Prior art keywords
branch
rail
linear
track
rails
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201711049932.5A
Other languages
Chinese (zh)
Other versions
CN108001971A (en
Inventor
李政训
李圣铉
张仁培
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semes Co Ltd
Original Assignee
Semes Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semes Co Ltd filed Critical Semes Co Ltd
Publication of CN108001971A publication Critical patent/CN108001971A/en
Application granted granted Critical
Publication of CN108001971B publication Critical patent/CN108001971B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Abstract

Overhead hoist transport system. An OHT system includes a pair of linear rails disposed on a top of a semiconductor manufacturing line, a pair of branch rails disposed on the top, the branch rails branching from the linear rails, a carrier configured to hold a wafer cassette and to move along the linear rails or the branch rails, the carrier including rotary driving wheels in contact with the linear rails or the branch rails, and a turning member for turning the carrier and a pair of turning rails, the turning rails configured to extend along the linear rails or the branch rails and located at branch regions branching from the linear rails, the turning rails configured to control a traveling path of the carrier using magnetic force generated against the turning member. Therefore, the number of particles when the vehicle is traveling can be reduced.

Description

Overhead hoisting and conveying system
Technical Field
Exemplary embodiments of the present invention relate to an overhead hoist transport system. More particularly, exemplary embodiments of the present invention relate to an overhead hoist transport system for transporting a wafer cassette in which a plurality of wafers are stored for a semiconductor manufacturing line in which semiconductor processing apparatuses are arranged in a line.
Background
In general, semiconductor processing apparatuses for manufacturing semiconductor devices are continuously arranged to execute various programs for semiconductor substrates. In a state when a plurality of wafers are stored in a wafer cassette or wafers are retrieved from respective semiconductor process apparatuses by the wafer cassette, the wafers to be subjected to a semiconductor manufacturing process may be supplied to the respective semiconductor process apparatuses.
The wafer cassette is transported by an overhead hoist transport system (hereinafter, referred to as "OHT") including a running rail and a turning rail provided on the top of a semiconductor manufacturing line in which semiconductor processing equipment is continuously arranged, and a carrier capable of holding the wafer cassette to travel along the running rail and the turning rail. Further, the OHT system includes a rotating running wheel in contact with the running track and a steering wheel in contact with the steering track.
The steering wheel of the vehicle rotates along the steering track, so that the driving direction of the vehicle can be adjusted in the branch region where the steering track branches off from the running track
However, when the steering vehicle is steered, friction is generated between the steering wheel and the steering rail, and the friction generates particles. In addition, the friction between the running wheels and the running rails also generates particles. Therefore, the particles may contaminate a space where the semiconductor processing apparatus is disposed.
Disclosure of Invention
Exemplary embodiments of the present invention provide an OHT system capable of reducing the number of particles that may be generated due to friction between a steering wheel and a steering rail.
According to an aspect of the present invention, there is provided an OHT system. The OHT system comprises: a pair of linear rails disposed on top of the semiconductor production line; a pair of branch rails provided on the top, the branch rails branching from the linear rail; a carrier configured to hold wafer cassettes and to move along the linear track or the branch track, the carrier comprising a rotating drive wheel in contact with the linear track or the branch track; and a steering member for steering the vehicle; and a pair of turn rails configured to extend along the linear rail or the branch rail and located in a branching region branching from the linear rail to the branch rail, the turn rails being configured to control a travel path of the vehicle using magnetic force generated against the turn members.
In an exemplary embodiment, the turning rail may include: a linear turn rail provided along the linear rail on the top for allowing the vehicle to move along the linear rail and preventing the vehicle from falling off the branch area on the top where a discontinuous one of the linear rails is provided using a magnetic force; and a branch turn rail provided along the branch rail on the roof for allowing the vehicle to move along the branch rail and preventing the vehicle from falling off from the branch area on the roof where a discontinuous one of the branch rails is provided using a magnetic force.
here, the straight turn rail may be disposed adjacent to a consecutive one of the straight rails, and the branch turn rail may be disposed adjacent to a consecutive one of the branch rails.
Further, the straight diverting rail may be longer than a discontinuous portion in a discontinuous one of the straight rails and the branch diverting rail may be longer than a discontinuous portion in a discontinuous one of the branch rails.
In an exemplary embodiment, each of the steering member and the steering rail may include an electromagnet.
In an exemplary embodiment, the steering member comprises a paramagnet, and the steering track may comprise an electromagnet.
In an exemplary embodiment, the steering member includes an electromagnet, and the steering rail may include a permanent magnet.
In an exemplary embodiment, the steering member includes a permanent magnet, and the steering rail may include an electromagnet.
therefore, the OHT device according to the present invention provides the turning member on the vehicle, and the turning rails are respectively provided in the branch areas along one of the linear rails and one of the branch rails, in which the branch rail branches from the linear rail. Further, the travel path of the vehicle is adjusted by the magnetic force between the steering member and the steering rail. Since the turn rail and the turn member do not directly contact each other, particles generated in the OHT device can be reduced.
Further, the OHT system includes a discontinuous portion in which one of the linear tracks and one of the branch tracks are disconnected at the branch region, however, the steering member of the vehicle may be pulled by a magnetic force applied between the steering member and the steering track. Therefore, the vehicle can be prevented from falling off at the discontinuous portion including one of the straight rails and one of the branch rails. Therefore, the vehicle can stably travel even in the branch area.
drawings
The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof in the attached drawings, in which:
Fig. 1 is a plan view showing an OHT system according to an exemplary embodiment of the present invention;
FIG. 2 is a plan view showing the vehicle in the OHT system of FIG. 1 traveling along a linear track; and
fig. 3 is a plan view showing a vehicle in the OHT system of fig. 1 traveling along a branch track.
Detailed Description
The invention will be described in more detail with reference to the accompanying drawings, in which embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. The size and relative sizes of layers and regions in the drawings may be exaggerated for clarity.
It will be understood that when an element or layer is referred to as being "on," "connected to" or "coupled to" another element or layer, it can be directly on or connected or coupled to the other element or layer or intervening elements or layers may also be present. In contrast, when an element is referred to as being "directly on," "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers present. Like numbers refer to like elements throughout. As used herein, the term "and/or" includes any and all combinations of more than one of the associated listed items.
It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.
Spatially relative terms, such as "below," "lower," "above," "higher," and the like, may be used herein for ease of description to describe one element or feature's relationship to another element or feature as illustrated. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can include both above and below orientations. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Embodiments of the present invention are described with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) of the present invention. Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an implanted region represented as a rectangle typically has rounded or curved features and/or a gradient in implant concentration at its edges, rather than a two-step change from implanted to non-implanted region. Similarly, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation is performed. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the invention.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Fig. 1 is a plan view illustrating an OHT system according to an exemplary embodiment of the present invention.
Referring to fig. 1, an OHT system 100 of an exemplary embodiment of the present invention includes a pair of linear rails 110, a pair of branch rails 120, a vehicle 130, and a pair of steering rails 140 and 150.
The linear rail 110 is disposed on the top of a semiconductor manufacturing line including a plurality of semiconductor processing apparatuses arranged in series. The pair of linear rails 110 includes a continuous linear rail and a discontinuous linear rail having a discontinuity 112.
The branch rails 120 are disposed on the top. Each of the branch rails 120 may have a curved shape. The branch track 120 branches from the linear track 110 in the branch region. For example, each of the branch rails 120 is branched from each of the linear rails 110. The pair of branch tracks 120 includes a continuous branch track and a discontinuous branch track having a discontinuity 122 formed in a branch region. Meanwhile, the discontinuous straight track has a discontinuous portion 112 formed in the branch region.
In particular, one of the linear tracks 110 is directly connected to a branch track 120, which corresponds to a non-continuous linear track having a non-continuous portion 112, while the other linear track 110 is not directly connected to a branch track 120, which corresponds to a continuous linear track.
Moreover, one of the branch tracks 120 is directly connected to one of the linear tracks 110, which corresponds to a continuous branch track, while the other branch track is not directly connected to the other linear track 110, which corresponds to a discontinuous linear track having a discontinuous portion 122.
Because the discontinuous linear track and the discontinuous branch track include the discontinuous portions 112 and 122, respectively, the vehicle 130 can smoothly travel along the linear track 110 or the branch track 120.
When one of the linear tracks 110 and one of the branch tracks 120 do not include the discontinuous portions 112 and 122, respectively, the vehicle 130 travels along the linear track 110 while being interrupted by the branch track 120, and the vehicle 130 travels along the branch track 120 while being interrupted by the linear track 110.
The vehicle 130 includes a driving wheel 132 that rotates along the linear rail 110 or the branch rail 120 when the driving wheel 132 is in contact with the linear rail 110 or the branch rail 120. The drive wheel 132 rests on the top surface of the vehicle 132. The drive wheel may be coupled to a drive shaft 133, and the drive shaft 133 may be rotatably secured to the top surface of the vehicle 130. The vehicle 130 may travel along the linear rail 110 or the branch rail 120.
The vehicle 130 also includes a steering member 134. The steering member 134 may be disposed at a central portion of the top surface of the vehicle 130. The steering member 134 may comprise an electromagnet, a permanent magnet material, or a paramagnet. When the steering member 134 includes an electromagnet, a magnetic force may be generated with respect to the steering rails 140 and 150 in the branch region. The diverting member 134 may be block-shaped or various shapes, etc. A steering member 134 may be fixed to a central portion of the driving shaft 133 to propel the driving wheel 132.
Accordingly, since the steering member 134 does not need to be rotated when in contact with the steering rails 140 and 150, it may not be necessary to include an actuator for rotating the steering member 134. Thus, the vehicle can have a simple structure and light weight.
In addition, the carrier 130 may be configured to protect a wafer cassette (not shown) that stores a plurality of wafers. Therefore, the carrier 130 travels along the linear track 110 or the branch track 120, and simultaneously transfers the wafer cassette between the semiconductor manufacturing apparatuses.
A pair of turnaround rails 140 and 150 are disposed on top and along one of the straight rails 110 and one of the branch rails 120. The steering rails 140 and 150 may include electromagnets or paramagnets.
In particular, steering member 134 and steering rails 140 and 150 may each include an electromagnet. Alternatively, when the steering member 134 comprises a paramagnet such as aluminum, calcium, magnesium, etc., the steering rails 140 and 150 may each comprise an electromagnet. Further, while steering member 134 may include a permanent magnet, steering rails 140 and 150 may each include an electromagnet.
The direction of current flow through the electromagnets or the dipole moment arrangement of the permanent magnets may be adjusted such that a magnetic force is generated between the steering member 134 and the steering rails 140 and 150. Thus, the magnetic force may be used to control the travel path of the vehicle 130.
The turning tracks 140 and 150 may include a straight turning track 140 and a branch turning track 150.
when the steering member 134, the straight steering rail 140, and the branch steering rail 150 include electromagnets, respectively, current may flow along the steering member 134, and current may selectively flow along one of the straight steering rail 140 or the branch steering rail 150. For example, when current flows along the linear divert track 140, an attractive force is created between the linear divert track 140 and the divert member 134 to drive the vehicle 130 linearly along the linear track 110. At the same time, when current flows along the branch diverting rail 150, an attractive force is generated between the branch diverting rail 150 and the diverting member 134 to drive the vehicle 130 along the branch diverting rail 120.
When each of the steering member 134, the linear steering rail 140, and the branch steering rail 150 includes an electromagnet, current may flow along all of the steering member 134, the linear steering rail 140, and the branch steering rail 150 at the same time. For example, when the direction of current flowing through all of the full turn rail 134, the straight turn rail 140, and the branch turn rail 150 is adjusted, an attractive force is generated between the straight turn rail 140 and the turn member 134, and a repulsive force is generated between the branch turn rail 150 and the turn member 134, so that the vehicle 130 moves linearly along the straight rail 110. On the other hand, an attractive force is generated between the branch diverting rail 150 and the diverting member 134, and a repulsive force is generated between the straight diverting rail 140 and the diverting member 134, so that the vehicle 130 moves in a curve along the branch diverting rail 120.
When the steering member 134 includes a paramagnet and the steering rails 140 and 150 include electromagnets, respectively, current may selectively flow along one of the straight steering rail 140 and the branch steering rail 150. For example, when current flows along the linear divert track 140, an attractive force is created between the linear divert track 140 and the divert member 134, causing the vehicle 130 to travel along the linear track 110. On the other hand, when current flows along branch diverting rail 150, an attractive force is generated between branch diverting rail 150 and diverting member 134, so that vehicle 130 travels along branch diverting rail 120.
When the diverting member 134 includes an electromagnet, a permanent magnet is included in each of the diverting rails 140 and 150, and each of the straight diverting rails 140 and each of the branch diverting rails 150 has at least one pair of N-S poles facing each other corresponding to the diverting member 134. That is, a portion of the straight diverting rail 140 faces a portion of the branch diverting rail 150 with respect to the diverting member 134, and the portions of the straight diverting rail 140 and the branch diverting rail 150 have the same magnetic poles. Adjusting the direction of the current flowing along the steering member 134 in order to change the polarity of the magnetic field generated around the steering member 134 generates an attractive force between the steering member 134 and one of the steering rails 140 or 150, and may generate a repulsive force between the steering member 134 and the other steering rail 140 or 150. For example, an attractive force is generated between the linear divert track 140 and the divert member 134, and a repulsive force is generated between the branch divert track 150 and the divert member 134, such that the vehicle 130 moves linearly along the linear track 110. On the other hand, an attractive force is generated between the branch diverting rail 150 and the diverting member 134, and a repulsive force is generated between the linear diverting rail 140 and the diverting member 134, so that the vehicle 130 moves along the branch diverting rail 120.
When the diverting member 134 comprises a permanent magnet, each diverting rail 140 and 150 comprises an electromagnet, and the diverting member 134 has a pair of ends, each facing one of the diverting rails 140 and 150, respectively, to have a spaced polarity. That is, a portion of the straight diverting rail 140 faces a portion of the branch diverting rail 150 with respect to the diverting member 134, and the straight diverting rail 140 and the portions of the branch diverting rail 150 have the same magnetic poles. Adjusting the direction of the current flowing along the steering member 134 in order to change the polarity of the magnetic field generated around the steering member 134 generates an attractive force between the steering member 134 and one of the steering rails 140 or 150. For example, an attractive force occurs between the linear divert track 140 and the divert member 134 such that the vehicle 130 moves linearly along the linear track 110. On the other hand, an attractive force is generated between the branch diverting rail 150 and the diverting member 134 so that the vehicle 130 moves along the branch diverting rail 120.
When the diverting member 134 comprises a paramagnet, an electromagnet is included in each diverting rail 140 and 150, and the diverting member 134 has a pair of ends, with spaced polarities, each end facing one of the diverting rails 140 and 150, respectively. Adjusting the direction of the current flowing along the steering member 134 in order to change the polarity of the magnetic field generated around the steering member 134 generates an attractive force between the steering member 134 and one of the steering rails 140 or 150, while generating a repulsive force between the steering member 134 and the other steering rail 140 or 150. For example, an attractive force is generated between the linear divert track 140 and the divert member 134, and a repulsive force is generated between the branch divert track 150 and the divert member 134, causing the vehicle 130 to move linearly along the linear track 110. On the other hand, an attractive force is generated between the branch diverting rail 150 and the diverting member 134, and a repulsive force occurs between the linear diverting rail 140 and the diverting member 134, so that the vehicle 130 moves along the branch diverting rail 120. For example, an attractive force is generated between the linear divert track 140 and the divert member 134, while a repulsive force is generated between the branch divert track 150 and the divert member 134, such that the vehicle 130 moves linearly along the linear track 110. On the other hand, an attractive force is generated between the branch diverting rail 150 and the diverting member 134, and a repulsive force is generated between the linear diverting rail 140 and the diverting member 134, so that the vehicle moves along the branch diverting rail 120.
The straight turning rail 140 is composed of one rail. The straight diverting rails 140 are disposed between the straight rails 110 and along one of the straight rails 110. In particular, the linear divert track 140 is disposed adjacent to a continuous linear track of the linear tracks 110. Therefore, the linear turn rail 140 may be prevented from overlapping the branch turn rail 150 or being interrupted by the branch turn rail 150. Otherwise, when the straight diverting trajectory 140 is disposed adjacent to the discontinuous straight trajectory of the straight trajectory 110, the straight diverting trajectory 140 overlaps the branch diverting trajectory 150 or is interrupted by the branch diverting trajectory 150.
Further, the straight diverting rail 140 is disposed above the driving shaft 133 for driving the driving wheel 132, so that it is possible to avoid the straight diverting rail 140 from being interrupted by the driving shaft 133 disposed on the top surface of the vehicle 130.
the linear steering track 140 may use an attractive force against the steering member 134 of the vehicle 130 to pull the steering member 134 of the vehicle 130. The vehicle 130 moves along the linear track 110 when an attractive force is generated between the linear divert track 140 and the divert member 134 and the drive wheel 132 rotates. In addition, a repulsive force is generated between the branch steering rail 150 of the vehicle 130 and the steering member 134.
at the discontinuous portion 112 of the discontinuous track, the linear track 110 does not support the drive wheel 132 of the vehicle 130. When the attractive force between the linear divert track 140 and the divert members 134 is unable to bear the weight of the vehicle 130, the vehicle 130 may fall off the top. Thus, the attractive force between the linear divert track 140 and the divert member 134 may be large enough to withstand the weight of the vehicle 130.
When the attractive force between the linear divert track 140 and the divert member 134 greatly exceeds the weight of the vehicle 130, the linear divert track 140 may contact the divert member 134. In this case, particles may be generated due to friction between the linear divert track 140 and the divert member 134 as the vehicle 130 moves.
Accordingly, the attractive force between the linear divert track 140 and the divert member 134 can be controlled to prevent the vehicle 130 from falling and to maintain uniform spacing of the linear divert track 140 and the divert member 134. That is, in order to control the attractive force between the straight diverting rail 140 and the diverting member 134 to balance the weight of the vehicle 130, the value of the current flowing along the straight diverting rail 140 or the magnetic force between the diverting rail 140 and the diverting member 134 may be adjusted.
Meanwhile, in the case where the straight turn rail 140 is shorter than the discontinuous portion 112 of the non-continuous straight rail, the attractive force between the straight turn rail 140 and the turn member 134 disappears before the vehicle 130 completely passes through the discontinuous portion 112 of the non-continuous straight rail, so that the vehicle 130 may fall off at the discontinuous portion 112 due to the weight of the vehicle 130.
To prevent the vehicle 130 from falling off at the discontinuous portion 112 due to the loss of attraction between the linear divert track 140 and the divert member 134, the linear divert track 140 may be longer than the discontinuous portion 112 of the discontinuous linear track.
The branch turn rail 150 is composed of one rail. The branch diverting rails 150 are disposed between the branch rails 120 and along one of the branch rails 120. In particular, the branch diverting rail 150 is disposed adjacent to a consecutive branch rail of the branch rails 120. Therefore, the branch steering rail 150 may be prevented from overlapping the steering member 134 or being interrupted by the steering member 134. Otherwise, when the branch diverting rail 150 is disposed adjacent to a discontinuous branch rail having a discontinuous portion on the linear rail 110, the branch diverting rail 150 may overlap with the linear diverting rail 140 or be interrupted by the linear diverting rail 140.
Further, the branch diverting rail 150 is disposed above the driving shaft 133 for driving the driving wheel 132, so that it is possible to avoid the branch diverting rail 150 from being interrupted by the driving shaft 133 disposed on the top surface of the vehicle 130.
As with the linear divert track 140, the branch divert track 150 may pull the divert member 134 of the vehicle 130 using an attractive force against the divert member 134 of the vehicle 130. When an attractive force is generated between the branch steering track 150 and the steering member 134 and the drive wheel 132 rotates, the vehicle 130 moves along the branch steering track 120. Further, a repulsive force is generated between the branch turn rail 150 and the turn member 134 of the vehicle 130.
At the discontinuous portion 112 of the discontinuous track, the branch track 120 does not support the drive wheel 132 of the vehicle 130. When the attractive force between the branch steering track 150 and the steering member 134 is unable to bear the weight of the vehicle 130, the vehicle 130 may fall off the top. Accordingly, the attractive force between the branch steering track 150 and the steering member 134 may be large enough to withstand the weight of the vehicle 130.
When the attractive force between the branch diverting rail 150 and the diverting member 134 greatly exceeds the weight of the vehicle 130, the branch diverting rail 150 will contact the diverting member 134. In this case, particles may be generated due to friction between the branch diverting rail 150 and the diverting member 134 when the vehicle 130 moves.
Accordingly, the attractive force between the divert track 150 and the divert member 134 can be controlled to prevent the vehicle 130 from falling and to maintain uniform spacing of the divert track 150 and the divert member 134. That is, in order to control the attractive force between the branch diverting rail 150 and the diverting member 134 to balance the weight of the vehicle 130, the value of the current flowing along the branch diverting rail 150 or the magnetic force between the branch diverting rail 150 and the diverting member 134 may be adjusted.
Meanwhile, in the case where the branch diverting rail 150 is shorter than the discontinuous portion 112 of the discontinuous straight rail, the attractive force between the branch diverting rail 150 and the diverting member 134 disappears before the vehicle 130 completely passes through the discontinuous portion 112 of the discontinuous straight rail, so that the vehicle 130 may fall at the discontinuous portion 112 due to the weight of the vehicle 130.
To prevent the vehicle 130 from falling off at the discontinuous portion 112 due to the disappearance of the attractive force between the divert track 150 and the divert member 134, the divert track 150 may be longer than the discontinuous portion 112 of the discontinuous linear track.
According to an exemplary embodiment, linear divert track 140 and branch divert track 150 are spaced apart from divert member 134 and are not in contact with divert member 134 such that friction between linear divert track 140 and divert member 134 or between branch divert track 150 and divert member 134 is not present, avoiding generation of particles due to friction with divert member 134. Therefore, the space in the semiconductor processing apparatus can be prevented from being contaminated.
Fig. 2 is a plan view showing that a vehicle in the OHT system of fig. 1 travels along a straight track.
Referring to fig. 2, when the vehicle 130 travels along the linear rail 110 and approaches a branch region where the branch rail 120 branches from the linear rail 110, current flows along each of the linear turn rail 140 having the electromagnet and the turn member 134 of the vehicle 130 to generate a magnetic field. Under the magnetic field, when the vehicle 130 travels along the linear rail 110 and reaches the branch region branching from the linear rail 110 to the branch rail 120, an attractive force is generated between the linear turn rail 140 and the turn member 134 of the vehicle 130. At this time, a repulsive force may be generated between the branch steering rail 150 and the steering member 134 of the vehicle 130.
The vehicle 130 may be moved along the linear rail 110 by rotating the driving wheel 132 in a state where an attractive force is applied between the linear turn rail 140 and the turn member 134.
although the linear track 110 may not be able to support the drive wheels 132 of the vehicle 130 at the discontinuous portions 112 of the discontinuous linear track, the vehicle 130 may travel along the linear track 110 without falling off because the attractive force between the linear divert track 140 and the divert member 134 balances the weight of the vehicle 130.
Since the weight of the vehicle 130 is balanced by the attractive force between the linear divert track 140 and the divert member 134, the linear divert track 140 and the divert member 134 do not contact each other. Therefore, it is possible to prevent particles from being generated due to the contact of the diverting member 134 with the straight diverting rail 140.
As the vehicle 130 travels along the linear track 110 and through the linear divert track 140 in the branch area, the attractive force between the linear divert track 140 and the divert member 134 may disappear. Thus, the magnetic force is released by interrupting the current generated by the electromagnet for the linear steering rail 140 and the steering member 134 of the vehicle 130.
Fig. 3 is a plan view showing a vehicle in the OHT system of fig. 1 traveling along a branch track.
Referring to fig. 3, when the vehicles 130 travel along the linear rail 110 and approach a branching region branching off the branch rail 120 from the linear rail 110, a current flows in each of the linear steering rails 140 including an electromagnet and the steering member 134 of each of the vehicles 130 to generate a magnetic field. Under the magnetic field, when the vehicle 130 travels along the linear track 110 and reaches the branch region where the branch track 120 branches from the linear track 110, an attractive force is generated between the branch turn track 150 and the turn member 134 of the vehicle 130. At this time, a repulsive force may be generated between the straight turning rail 140 and the turning member 134 of the vehicle 130.
The vehicle 130 may travel along the branch track 120 by rotating the drive wheel 132 in a state where an attractive force is applied between the branch steering track 150 and the steering member 134.
Although the branch track 120 may not be able to support the drive wheels 132 of the vehicle 130 at the discontinuous portions 112 of the discontinuous linear track, the vehicle 130 may travel along the branch track 120 without falling off because the attractive force between the branch diverting track 150 and the diverting member 134 balances the weight of the vehicle 130.
since the weight of the vehicle 130 is balanced by the attractive force between the divert track 150 and the divert member 134, the divert track 150 and the divert member 134 do not contact each other. Therefore, it is possible to prevent particles from being generated due to the contact of the diverting member 134 with the branch diverting rail 150.
As the vehicle 130 travels along the branch track 120 and through the branch diverting track 150 located in the branch region, the attractive force between the branch diverting track 150 and the diverting member 134 may disappear. Thus, the magnetic force is released by interrupting the current generated by the electromagnet for the branch steering rail 150 and the steering member 134 of the vehicle 130.
As described above, the OHT system according to the present invention adjusts the travel path of the vehicle using the attractive force between the turn member of the vehicle and the turn rails provided in the branch regions along one of the linear rails and one of the branch rails, respectively. Since the steering rail and the steering member do not directly contact each other, particles generated in the OHT system can be reduced. Therefore, contamination of a space where the semiconductor processing apparatus is disposed can be reduced.
The foregoing is illustrative of the present invention and is not to be construed as limiting thereof. Although a few exemplary embodiments of this invention have been described, those skilled in the art will readily appreciate that many modifications are possible in the exemplary embodiments without materially departing from the novel teachings and advantages of this invention. Accordingly, all modifications are intended to be included within the scope of this invention as defined in the claims. In the claims, means-plus-function clauses are intended to cover the structures described herein as performing the recited function and not only structural equivalents, but also equivalent structures. Therefore, it is to be understood that the foregoing is illustrative of the present invention and is not to be construed as limited to the specific embodiments disclosed, and that modifications to the disclosed embodiments, as well as other embodiments, are intended to be included within the scope of the appended claims. The invention is defined by the following claims, with equivalents of the claims to be included therein.

Claims (7)

1. An overhead hoist transport system comprising:
A pair of linear rails disposed on top of the semiconductor production line;
A pair of branch rails provided on the top, the branch rails branching from the linear rail;
A carrier configured to hold wafer cassettes and to move along the linear track or the branch track, the carrier comprising a rotating drive wheel in contact with the linear track or the branch track; and a steering member for steering the vehicle; and
A pair of turn rails configured to extend along the linear rail or the branch rail and located in a branching region branching from the linear rail to the branch rail, the turn rails configured to control a travel path of the vehicle using magnetic force generated for the turn members,
Wherein the turning rail comprises:
A linear turn rail provided along the linear rail on the top for allowing the vehicle to move along the linear rail and preventing the vehicle from falling off the branch area on the top where a discontinuous one of the linear rails is provided using a magnetic force; and
A branch turn rail provided along the branch rail on the roof for allowing the vehicle to move along the branch rail and preventing the vehicle from falling off the branch area on the roof where a discontinuous one of the branch rails is provided using a magnetic force,
Wherein the steering member is fixed to a central portion of the driving shaft to drive the driving wheel.
2. The overhead hoist transport system of claim 1, wherein the linear divert track is disposed adjacent to a successive one of the linear tracks and the branch divert track is disposed adjacent to a successive one of the branch tracks.
3. the overhead hoist transport system of claim 1, wherein the straight turnaround track is longer than a discontinuous portion in a discontinuous one of the straight tracks and the branch turnaround track is longer than a discontinuous portion in a discontinuous one of the branch tracks.
4. The overhead hoist transport system of claim 1, wherein each of the diverting member and the diverting rail comprises an electromagnet.
5. The overhead hoist transport system of claim 1, wherein the diverting member comprises a paramagnet and the diverting rail comprises an electromagnet.
6. the overhead hoist transport system of claim 1, wherein the diverting member comprises an electromagnet and the diverting rail comprises a permanent magnet.
7. The overhead hoist transport system of claim 1, wherein the diverting member comprises a permanent magnet and the diverting rail comprises an electromagnet.
CN201711049932.5A 2016-10-31 2017-10-31 Overhead hoisting and conveying system Active CN108001971B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2016-0143019 2016-10-31
KR1020160143019A KR101854046B1 (en) 2016-10-31 2016-10-31 Overhead Hoist transport device

Publications (2)

Publication Number Publication Date
CN108001971A CN108001971A (en) 2018-05-08
CN108001971B true CN108001971B (en) 2019-12-13

Family

ID=62051974

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711049932.5A Active CN108001971B (en) 2016-10-31 2017-10-31 Overhead hoisting and conveying system

Country Status (2)

Country Link
KR (1) KR101854046B1 (en)
CN (1) CN108001971B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102221114B1 (en) * 2019-07-15 2021-02-26 세메스 주식회사 Overhead Hoist transport device
CN111252285A (en) * 2020-01-22 2020-06-09 苏州柔羽智能科技有限公司 Cloth roll conveying and reversing device of automatic cloth packaging line
KR102556995B1 (en) * 2020-03-16 2023-07-20 세메스 주식회사 Transferring vehicle, article transferring apparatus comprising the same and article transferring method
KR20220023395A (en) 2020-08-21 2022-03-02 세메스 주식회사 Vehicle, article transport facility and article transport method
KR102536042B1 (en) * 2020-10-06 2023-05-23 세메스 주식회사 Transport system in fabrication facility
KR20220097701A (en) 2020-12-30 2022-07-08 세메스 주식회사 Article transport facility
CN114132704A (en) * 2021-12-14 2022-03-04 华芯(嘉兴)智能装备有限公司 Two-way telescoping device of small rail car
CN116031190B (en) * 2023-03-28 2023-06-23 浙江果纳半导体技术有限公司 Conveying system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003212113A (en) * 2002-01-25 2003-07-30 Murata Mach Ltd Automatic guided vehicle system
CN1970410A (en) * 2005-11-22 2007-05-30 三星电子株式会社 Transferring device
CN101578700A (en) * 2006-08-18 2009-11-11 布鲁克斯自动化公司 Reduced capacity carrier, transport, load port, buffer system
KR20110054176A (en) * 2009-11-17 2011-05-25 한국기계연구원 Magnetic levitation conveyance device using vertical linear motor
KR20130071228A (en) * 2011-12-20 2013-06-28 주식회사 에스에프에이 Mask supplying system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3682547B2 (en) 2001-07-16 2005-08-10 村田機械株式会社 Automated guided vehicle system
US7677180B2 (en) * 2005-06-09 2010-03-16 International Business Machines Corporation Apparatus and method for steering transport vehicles in semiconductor processing
TWI473194B (en) * 2011-09-08 2015-02-11 Inotera Memories Inc Overhead hoist transmission system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003212113A (en) * 2002-01-25 2003-07-30 Murata Mach Ltd Automatic guided vehicle system
CN1970410A (en) * 2005-11-22 2007-05-30 三星电子株式会社 Transferring device
CN101578700A (en) * 2006-08-18 2009-11-11 布鲁克斯自动化公司 Reduced capacity carrier, transport, load port, buffer system
KR20110054176A (en) * 2009-11-17 2011-05-25 한국기계연구원 Magnetic levitation conveyance device using vertical linear motor
KR20130071228A (en) * 2011-12-20 2013-06-28 주식회사 에스에프에이 Mask supplying system

Also Published As

Publication number Publication date
CN108001971A (en) 2018-05-08
KR101854046B1 (en) 2018-05-02

Similar Documents

Publication Publication Date Title
CN108001971B (en) Overhead hoisting and conveying system
EP3705422B1 (en) Conveyance system
US11413967B2 (en) Contactless driving module and transfer apparatus having the same
US9246377B2 (en) Apparatus for transferring substrate
KR102575953B1 (en) Magnetic levitation transfer apparatus
US7597186B2 (en) Substrate transport device
CN108373022B (en) Article conveying equipment
KR101101917B1 (en) Magnetic levitation conveyance device
KR101957960B1 (en) Magnetic levitation transfer apparatus
KR20190038328A (en) Non-contact transfertation system using linear motors
KR101318173B1 (en) Apparatus for transferring substrates
JP2010202324A (en) Sorting device
KR102556995B1 (en) Transferring vehicle, article transferring apparatus comprising the same and article transferring method
KR101534210B1 (en) Magnetic levitation conveyance device having steering ability
KR100675559B1 (en) Magnetic levitation transfer apparatus
JPS60261302A (en) Article conveyor in high vacuum
TWI687361B (en) Magnetic levitation system, vacuum system, and method of transporting a carrier
JP3282421B2 (en) Magnet track on which magnetic levitation travels and traveling method
KR102228145B1 (en) Apparatus for transporting carrier and system for controlling the apparatus
KR20230035953A (en) Overhead Hoist transport device
KR101328880B1 (en) Magnetic wheel assembly for transferring a longitudinally extending conductive material and apparatus having the same
KR20190087985A (en) Apparatus for transferring a carrier in a vacuum chamber, and method for transferring a carrier in a vacuum chamber
JPH05336614A (en) Superconducting magnetic bearing carrier
KR20230100551A (en) Article transport facility
KR20200053760A (en) Apparatus for transferring wafer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant