JPS58169926A - 半導体ペレツトの位置決め装置 - Google Patents

半導体ペレツトの位置決め装置

Info

Publication number
JPS58169926A
JPS58169926A JP3286983A JP3286983A JPS58169926A JP S58169926 A JPS58169926 A JP S58169926A JP 3286983 A JP3286983 A JP 3286983A JP 3286983 A JP3286983 A JP 3286983A JP S58169926 A JPS58169926 A JP S58169926A
Authority
JP
Japan
Prior art keywords
pellet
jaws
pulse
positioning
pellets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3286983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6226180B2 (enrdf_load_stackoverflow
Inventor
Hisaya Suzuki
鈴木　久彌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mechatronics Co Ltd
Original Assignee
Toshiba Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Seiki Co Ltd filed Critical Toshiba Seiki Co Ltd
Priority to JP3286983A priority Critical patent/JPS58169926A/ja
Publication of JPS58169926A publication Critical patent/JPS58169926A/ja
Publication of JPS6226180B2 publication Critical patent/JPS6226180B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP3286983A 1983-03-02 1983-03-02 半導体ペレツトの位置決め装置 Granted JPS58169926A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3286983A JPS58169926A (ja) 1983-03-02 1983-03-02 半導体ペレツトの位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3286983A JPS58169926A (ja) 1983-03-02 1983-03-02 半導体ペレツトの位置決め装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3124481A Division JPS57147243A (en) 1981-03-06 1981-03-06 Positioning device for semiconductor pellet

Publications (2)

Publication Number Publication Date
JPS58169926A true JPS58169926A (ja) 1983-10-06
JPS6226180B2 JPS6226180B2 (enrdf_load_stackoverflow) 1987-06-08

Family

ID=12370864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3286983A Granted JPS58169926A (ja) 1983-03-02 1983-03-02 半導体ペレツトの位置決め装置

Country Status (1)

Country Link
JP (1) JPS58169926A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61115331A (ja) * 1984-11-12 1986-06-02 Oki Electric Ind Co Ltd Ｉｃ組立装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61115331A (ja) * 1984-11-12 1986-06-02 Oki Electric Ind Co Ltd Ｉｃ組立装置

Also Published As

Publication number Publication date
JPS6226180B2 (enrdf_load_stackoverflow) 1987-06-08

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