JPS5816529A - 電子線装置のカセツト保持装置 - Google Patents

電子線装置のカセツト保持装置

Info

Publication number
JPS5816529A
JPS5816529A JP56115559A JP11555981A JPS5816529A JP S5816529 A JPS5816529 A JP S5816529A JP 56115559 A JP56115559 A JP 56115559A JP 11555981 A JP11555981 A JP 11555981A JP S5816529 A JPS5816529 A JP S5816529A
Authority
JP
Japan
Prior art keywords
cassette
electron beam
sample stage
plate
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56115559A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130300B2 (enrdf_load_stackoverflow
Inventor
Shuntaro Hata
秦　俊太郎
Kazuyoshi Sugihara
和佳 杉原
Toru Tojo
徹 東條
Yoshio Suzuki
鈴木　美雄
Takuoki Numaga
沼賀　拓興
Haruhisa Mukoyama
向山　晴久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56115559A priority Critical patent/JPS5816529A/ja
Publication of JPS5816529A publication Critical patent/JPS5816529A/ja
Publication of JPH0130300B2 publication Critical patent/JPH0130300B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56115559A 1981-07-23 1981-07-23 電子線装置のカセツト保持装置 Granted JPS5816529A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56115559A JPS5816529A (ja) 1981-07-23 1981-07-23 電子線装置のカセツト保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56115559A JPS5816529A (ja) 1981-07-23 1981-07-23 電子線装置のカセツト保持装置

Publications (2)

Publication Number Publication Date
JPS5816529A true JPS5816529A (ja) 1983-01-31
JPH0130300B2 JPH0130300B2 (enrdf_load_stackoverflow) 1989-06-19

Family

ID=14665532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56115559A Granted JPS5816529A (ja) 1981-07-23 1981-07-23 電子線装置のカセツト保持装置

Country Status (1)

Country Link
JP (1) JPS5816529A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0130300B2 (enrdf_load_stackoverflow) 1989-06-19

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