JPS58161810A - リニアスケ−ル式測定装置 - Google Patents

リニアスケ−ル式測定装置

Info

Publication number
JPS58161810A
JPS58161810A JP4520182A JP4520182A JPS58161810A JP S58161810 A JPS58161810 A JP S58161810A JP 4520182 A JP4520182 A JP 4520182A JP 4520182 A JP4520182 A JP 4520182A JP S58161810 A JPS58161810 A JP S58161810A
Authority
JP
Japan
Prior art keywords
measured
scale
elongated case
groove
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4520182A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241682B2 (de
Inventor
Soji Ichikawa
宗次 市川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP4520182A priority Critical patent/JPS58161810A/ja
Publication of JPS58161810A publication Critical patent/JPS58161810A/ja
Publication of JPH0241682B2 publication Critical patent/JPH0241682B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP4520182A 1982-03-19 1982-03-19 リニアスケ−ル式測定装置 Granted JPS58161810A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4520182A JPS58161810A (ja) 1982-03-19 1982-03-19 リニアスケ−ル式測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4520182A JPS58161810A (ja) 1982-03-19 1982-03-19 リニアスケ−ル式測定装置

Publications (2)

Publication Number Publication Date
JPS58161810A true JPS58161810A (ja) 1983-09-26
JPH0241682B2 JPH0241682B2 (de) 1990-09-19

Family

ID=12712646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4520182A Granted JPS58161810A (ja) 1982-03-19 1982-03-19 リニアスケ−ル式測定装置

Country Status (1)

Country Link
JP (1) JPS58161810A (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539141A (en) * 1976-07-09 1978-01-27 Heidenhain Gmbh Dr Johannes Length measuring device
JPS549962A (en) * 1977-06-21 1979-01-25 Heidenhain Gmbh Dr Johannes Measuring machine sealed in case for large measuring length

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539141A (en) * 1976-07-09 1978-01-27 Heidenhain Gmbh Dr Johannes Length measuring device
JPS549962A (en) * 1977-06-21 1979-01-25 Heidenhain Gmbh Dr Johannes Measuring machine sealed in case for large measuring length

Also Published As

Publication number Publication date
JPH0241682B2 (de) 1990-09-19

Similar Documents

Publication Publication Date Title
WO2002055958A8 (en) Topological and motion measuring tool
JP4434452B2 (ja) 測尺装置
JP5889737B2 (ja) 長さ測定装置
JP4931916B2 (ja) スケール用の保持具
CN103376123B (zh) 编码器、透镜装置和照相机
KR20020077332A (ko) 스캐너용 굴곡 어셈블리
JP2016099342A (ja) 測長装置
US5509211A (en) Multi-coordinate probe
EP0299033A1 (de) Taststiftvorrichtung, insbesondere für kopiermaschinen.
JPS60247108A (ja) 直線型変位測定装置
US7765709B2 (en) Measuring apparatus
JPH021242B2 (de)
US20210041312A1 (en) Force sensor and sensing element thereof
JPS58161810A (ja) リニアスケ−ル式測定装置
US6322037B1 (en) Moving mirror support device for photo-interferometer
US11733019B2 (en) Assembly for position measurement
JP2979666B2 (ja) スケール装置
US5924214A (en) Length measuring apparatus for measuring the relative position of two objects
JP2001050776A (ja) スケールユニットの連結部材
JP3160049B2 (ja) 位置決め装置
JP2582210B2 (ja) 変位測定装置
JP2000258332A (ja) 原子間力顕微鏡のための垂直力検出用カンチレバー
JP2000214280A (ja) ステ―ジ機構
JPH03252516A (ja) 厚み測定装置
SU1479955A1 (ru) Устройство дл микроперемещений