JPS58159096A - スピ−カ用振動板の製造方法 - Google Patents
スピ−カ用振動板の製造方法Info
- Publication number
- JPS58159096A JPS58159096A JP4205182A JP4205182A JPS58159096A JP S58159096 A JPS58159096 A JP S58159096A JP 4205182 A JP4205182 A JP 4205182A JP 4205182 A JP4205182 A JP 4205182A JP S58159096 A JPS58159096 A JP S58159096A
- Authority
- JP
- Japan
- Prior art keywords
- boron
- substrate
- diaphragm
- film
- beryllium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims abstract description 47
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910052796 boron Inorganic materials 0.000 claims abstract description 45
- 239000000463 material Substances 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 22
- 239000011162 core material Substances 0.000 claims abstract description 20
- 229910052790 beryllium Inorganic materials 0.000 claims abstract description 12
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000853 adhesive Substances 0.000 claims abstract description 6
- 230000001070 adhesive effect Effects 0.000 claims abstract description 6
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 15
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 13
- 238000001704 evaporation Methods 0.000 abstract description 11
- 230000008020 evaporation Effects 0.000 abstract description 11
- 229910052719 titanium Inorganic materials 0.000 abstract description 9
- 239000010936 titanium Substances 0.000 abstract description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052782 aluminium Inorganic materials 0.000 abstract description 7
- 238000010894 electron beam technology Methods 0.000 abstract description 7
- 238000007599 discharging Methods 0.000 abstract 1
- 238000004090 dissolution Methods 0.000 abstract 1
- 238000000313 electron-beam-induced deposition Methods 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 239000012808 vapor phase Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 238000007738 vacuum evaporation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 238000001947 vapour-phase growth Methods 0.000 description 3
- 241000723353 Chrysanthemum Species 0.000 description 2
- 235000007516 Chrysanthemum Nutrition 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4205182A JPS58159096A (ja) | 1982-03-16 | 1982-03-16 | スピ−カ用振動板の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4205182A JPS58159096A (ja) | 1982-03-16 | 1982-03-16 | スピ−カ用振動板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58159096A true JPS58159096A (ja) | 1983-09-21 |
JPH0470840B2 JPH0470840B2 (enrdf_load_stackoverflow) | 1992-11-12 |
Family
ID=12625311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4205182A Granted JPS58159096A (ja) | 1982-03-16 | 1982-03-16 | スピ−カ用振動板の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58159096A (enrdf_load_stackoverflow) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5491237A (en) * | 1977-12-28 | 1979-07-19 | Nippon Telegr & Teleph Corp <Ntt> | Toner image transfer type two color electrostatic recorder |
JPS5635598A (en) * | 1980-07-09 | 1981-04-08 | Pioneer Electronic Corp | Manufacture of speaker diaphragm |
JPS5656095A (en) * | 1979-10-12 | 1981-05-16 | Hitachi Ltd | Plane loudspeaker |
-
1982
- 1982-03-16 JP JP4205182A patent/JPS58159096A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5491237A (en) * | 1977-12-28 | 1979-07-19 | Nippon Telegr & Teleph Corp <Ntt> | Toner image transfer type two color electrostatic recorder |
JPS5656095A (en) * | 1979-10-12 | 1981-05-16 | Hitachi Ltd | Plane loudspeaker |
JPS5635598A (en) * | 1980-07-09 | 1981-04-08 | Pioneer Electronic Corp | Manufacture of speaker diaphragm |
Also Published As
Publication number | Publication date |
---|---|
JPH0470840B2 (enrdf_load_stackoverflow) | 1992-11-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN116761117A (zh) | 一种扬声器振膜、制备方法及扬声器 | |
KR20140015367A (ko) | 확산-접합 스퍼터링 타겟 조립체 및 그 제조 방법 | |
JPH0963912A (ja) | 貼り合わせ基板製造方法 | |
JPS58159096A (ja) | スピ−カ用振動板の製造方法 | |
JP2002290182A (ja) | 表面弾性波素子用基板の製造方法 | |
JPS58159095A (ja) | スピ−カ用振動板の製造方法 | |
US4996119A (en) | Speaker cone plate and method of forming | |
CN114823285A (zh) | 超薄芯片及其平整化方法和应用 | |
JPS58159097A (ja) | スピ−カ用振動板およびその製造方法 | |
JPS5912689A (ja) | スピ−カ用振動板の製造方法 | |
US6972049B2 (en) | Method for fabricating a diamond film having low surface roughness | |
US3877122A (en) | Method of fabricating thin quartz crystal oscillator blanks | |
CN115724396A (zh) | 一种用于制备mems芯片的材料及其制备工艺 | |
JPS5936498A (ja) | スピ−カ用振動板およびその製造方法 | |
JPH0434359B2 (enrdf_load_stackoverflow) | ||
CN111510093B (zh) | 一种用于制作体声波器件的压电薄膜体及其制备方法 | |
JPS62152299A (ja) | スピ−カ用振動板の製造方法 | |
JP3785581B2 (ja) | 磁歪薄膜の製造方法 | |
JP4967702B2 (ja) | スピーカ用振動板 | |
JPH045318B2 (enrdf_load_stackoverflow) | ||
JPS60178800A (ja) | スピ−カ用振動板の製造法 | |
JPS60186195A (ja) | 電気音響変換器用振動板の製造方法 | |
JPS60186194A (ja) | 電気音響変換器用振動板の製造方法 | |
JPH07101957B2 (ja) | スピーカー用振動板 | |
JPS63243258A (ja) | 極薄膜の製造方法 |