JPS58158839A - イオン源 - Google Patents

イオン源

Info

Publication number
JPS58158839A
JPS58158839A JP57041518A JP4151882A JPS58158839A JP S58158839 A JPS58158839 A JP S58158839A JP 57041518 A JP57041518 A JP 57041518A JP 4151882 A JP4151882 A JP 4151882A JP S58158839 A JPS58158839 A JP S58158839A
Authority
JP
Japan
Prior art keywords
cesium
crucible
ion source
heating element
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57041518A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0159696B2 (enrdf_load_stackoverflow
Inventor
Norimichi Anazawa
穴沢　紀道
Ryuzo Aihara
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57041518A priority Critical patent/JPS58158839A/ja
Publication of JPS58158839A publication Critical patent/JPS58158839A/ja
Publication of JPH0159696B2 publication Critical patent/JPH0159696B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57041518A 1982-03-16 1982-03-16 イオン源 Granted JPS58158839A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57041518A JPS58158839A (ja) 1982-03-16 1982-03-16 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57041518A JPS58158839A (ja) 1982-03-16 1982-03-16 イオン源

Publications (2)

Publication Number Publication Date
JPS58158839A true JPS58158839A (ja) 1983-09-21
JPH0159696B2 JPH0159696B2 (enrdf_load_stackoverflow) 1989-12-19

Family

ID=12610590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57041518A Granted JPS58158839A (ja) 1982-03-16 1982-03-16 イオン源

Country Status (1)

Country Link
JP (1) JPS58158839A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60216432A (ja) * 1984-04-11 1985-10-29 Hitachi Ltd イオンビーム形成方法および液体金属イオン源
JPS63502384A (ja) * 1986-04-09 1988-09-08 エアー・プロダクツ・アンド・ケミカルズ・インコーポレーテッド エバポレータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60216432A (ja) * 1984-04-11 1985-10-29 Hitachi Ltd イオンビーム形成方法および液体金属イオン源
JPS63502384A (ja) * 1986-04-09 1988-09-08 エアー・プロダクツ・アンド・ケミカルズ・インコーポレーテッド エバポレータ

Also Published As

Publication number Publication date
JPH0159696B2 (enrdf_load_stackoverflow) 1989-12-19

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