JPS58158533A - Leak testing method - Google Patents

Leak testing method

Info

Publication number
JPS58158533A
JPS58158533A JP4132982A JP4132982A JPS58158533A JP S58158533 A JPS58158533 A JP S58158533A JP 4132982 A JP4132982 A JP 4132982A JP 4132982 A JP4132982 A JP 4132982A JP S58158533 A JPS58158533 A JP S58158533A
Authority
JP
Japan
Prior art keywords
gas
leak
time
test
volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4132982A
Other languages
Japanese (ja)
Inventor
Shohei Takehara
竹原 正平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4132982A priority Critical patent/JPS58158533A/en
Publication of JPS58158533A publication Critical patent/JPS58158533A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE:To measure accurately a leaking gas volume without being affected by residual gas by conducting twice with a specified time interval the leak gas concentration measurement from a body to be tested and measuring the volume of leak gas per unit time. CONSTITUTION:A body 11 to be tested that is filled with a probe gas is placed and sealed in a testing vessel 12. If leak gas Q from the body 11 is found under this condition, it accumulates on the bottom face of the testing vessel 12. At time t1 a check valve 13 is opened, and the leaking gas G is sampled by a leak detector 14 and its concentration A1 is measured. Furthermore, at time t2 after a specified time has passed from the time t1, the leak gas concentration A2 is measured. Since the effective volume V that is the difference of the volume of the testing vessel 12 from the body 11 to be tested and the time difference of t1-t2 are known, the volume Q0 of the leak gas is given by a formula: Q0=(A2-A1)XJ/(t2-t1). By this formula the volume of leak gas per unit time from the body to be tested is given.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、リークテスト方法の改良に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to improvements in leak testing methods.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来、プローブガスを充填した被試験体を試験容器に収
納密封し、被試験体からのり−クガスの有無および試験
容器内の気体をサンプリングしてそのリークガス濃度を
測定し、そのリーク量を求めるリークテスト方法がある
が、この方法は、1回のサンプリングによって被試験体
からのリークガスの有無およびそのリークガス濃度を測
定していた。
Conventionally, a test object filled with probe gas is stored and sealed in a test container, and the presence or absence of leakage gas from the test object is checked, and the gas in the test container is sampled to measure the leak gas concentration, and the amount of leakage is determined. There is a test method, but this method measures the presence or absence of leak gas from the test object and the concentration of the leak gas by one sampling.

また、上記方法を用いて複数回測定を繰り返した場合、
試験容器内に前回の測定で用いられたプローブガスが残
留してしまうという問題が起こる。ゆえに、この残留ガ
スを除去するためエアー、N2等による試験容器の洗浄
が行なわれるが、完全に試験容器内の残留ガスは除去さ
れない。したがって、試験容器内の残留ガスのために被
試験体からのリークガスの有無およびそのリークガス濃
度を正確に測定することは困難である。
In addition, if measurements are repeated multiple times using the above method,
A problem arises in that the probe gas used in the previous measurement remains in the test container. Therefore, in order to remove this residual gas, the test container is cleaned with air, N2, etc., but the residual gas in the test container is not completely removed. Therefore, it is difficult to accurately measure the presence or absence of leak gas from the test object and the leak gas concentration due to residual gas in the test container.

〔発明の目的〕[Purpose of the invention]

本発明は、試験容器内に残留ガスがあっても被試験体の
正確なリーク量を測定し得るリークテスト方法を提供す
ることを目的とする。
An object of the present invention is to provide a leak test method that can accurately measure the amount of leak from a test object even if there is residual gas in the test container.

〔発明の概要〕[Summary of the invention]

本発明は、試験容器の内部にプローブガスを充填した被
試験体を収納した後、一定時間内に試験容器内の気体の
サンプリングを所定時間内に少なくとも2回行ない、こ
れらのサンプリングされた気体のガス濃度を各々リーク
デテクタにより測定することにより、その時間経過によ
るガス濃度差を求め、被試験体のリーク量を測定するこ
とにより、上記目的を達成せんとするものである。
In the present invention, after a test object filled with a probe gas is housed in a test container, the gas in the test container is sampled at least twice within a predetermined period of time, and the sampled gas is The above objective is achieved by measuring the gas concentration using each leak detector, determining the gas concentration difference over time, and measuring the amount of leak from the test object.

〔発明の実施例〕[Embodiments of the invention]

第1図は本発明のリークテスト方法を適用した装置の一
実施例を示す構成図である。同図において11はプロー
ブガスを充填してなる被試験体であり、これは試験容器
12内に収納密封されている。そして、試験容器12に
は開閉弁13を弁してリークデテクタ14が接続されて
いる。ここで、リークデテクタ14は試験容器12内の
リーク濃度を測定するものである。
FIG. 1 is a block diagram showing an embodiment of a device to which the leak test method of the present invention is applied. In the figure, reference numeral 11 denotes a test object filled with probe gas, which is housed and sealed in a test container 12. A leak detector 14 is connected to the test container 12 via an on-off valve 13 . Here, the leak detector 14 measures the leak concentration within the test container 12.

このように構成された装置を用いてリーク量を測定する
方法を説明する。まず、被試験体1ノの内部にプローブ
ガスを充填する。しかる後、この被試験体11を試験容
器12の中に収納し密封する。この状態において被試験
体J1よりリークガスQが漏れていた場合、そのリーク
ガスQが試験容器12の底面に蓄積する。そこで、1、
時刻において開閉弁13を開いてリークガスQをリーク
デテクタ14でサンプリングする。
A method of measuring the amount of leakage using the device configured as described above will be explained. First, a probe gas is filled inside the test object 1 . Thereafter, this test object 11 is placed in a test container 12 and sealed. If leak gas Q is leaking from the test object J1 in this state, the leak gas Q accumulates on the bottom surface of the test container 12. Therefore, 1.
At that time, the on-off valve 13 is opened and the leak gas Q is sampled by the leak detector 14.

このリークガス濃度をA、 とする。さらに、所定時間
後t2時刻においても、そのリークガス濃度A2を測定
する。これにより、tt”−t22時間におけるリーク
ガス濃度差A、 −AI  が求められる。ここで、試
験容器12の容積から被試験体1ノの容積の差をとった
有効容積Vと、1.〜t2の時間は読値であるので、単
位時間当9のリーク蓋Qoは次式で表わされる。
Let this leak gas concentration be A. Furthermore, the leak gas concentration A2 is also measured at time t2 after a predetermined period of time. As a result, the leak gas concentration difference A, -AI between tt'' and t22 hours is determined. Since the time is a reading value, the leakage lid Qo per unit time is expressed by the following equation.

この式によって被試験体11からの単位時間当りのリー
クit Q oが得られる。
The leak itQo per unit time from the test object 11 can be obtained by this equation.

したがって、被試験体11からのリークガス濃度の測定
を所定時間間隔おいて2回行ない、そのリークガス濃度
の差によって被試験体11からのリークガス量Qoが得
られるので、もし試験容器12の内部に残留ガスAOが
あってもその影響を受けずに被試験体11からのリーク
ガスfit Q oを正確に得られる。さらに、本方法
ではリークガス濃度の測定を短時間で行なうので、リー
クデテクタ14の長時間使用における感度劣化を防ぐこ
とができる。
Therefore, the leak gas concentration from the test object 11 is measured twice at a predetermined time interval, and the leak gas amount Qo from the test object 11 is obtained from the difference in the leak gas concentration. Even if there is gas AO, leak gas fit Q o from the test object 11 can be accurately obtained without being affected by the gas AO. Furthermore, since the leak gas concentration is measured in a short period of time in this method, deterioration in sensitivity of the leak detector 14 during long-term use can be prevented.

なお、本発明は上記方法に限定されるものではない。た
とえはリークガス濃度夏の測定回数を複数回とし、時間
経過に対するリークガス濃度差を求めて被試験体11か
らのリークガス量を求める方法もある。
Note that the present invention is not limited to the above method. For example, there is a method in which the leak gas concentration is measured multiple times in summer, and the leak gas amount from the test object 11 is determined by determining the leak gas concentration difference over time.

〔元明の効果〕[Genmei effect]

以上詳記したようi/(本発明によれば、試験容器内に
残留ガスがあっても、その影響を受けずに被試験体から
の正確なリーク量を得ることが5− できるリークテスト方法を提供することができる。
As detailed above, according to the present invention, even if there is residual gas in the test container, an accurate leakage amount from the test object can be obtained without being affected by the residual gas. can be provided.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明方法を適用した装置の一実施例を示す構
成図、第2図はリークガス濃度測定のタイミングを示す
図である。 11・・・被試験体、12・・・試験容器、14・・・
リークデテクタ。 出願人代理人  弁理士 鈴 江 武 彦6− 第1図 第2 図 tl      t2 187一
FIG. 1 is a block diagram showing an embodiment of an apparatus to which the method of the present invention is applied, and FIG. 2 is a diagram showing the timing of leak gas concentration measurement. 11...Test object, 12...Test container, 14...
leak detector. Applicant's agent Patent attorney Takehiko Suzue 6- Figure 1 Figure 2 tl t2 1871

Claims (1)

【特許請求の範囲】[Claims] 試験容器の内部にプローブガスを充、填した被試験体を
収納し、試験容器内のが=を一供して被試験体のリーク
をテストするものにおいて、試験容器内の気体のサンプ
リングを一定時間内に少なくとも2回行ない、このサン
シリンダされた複数回の気体のガス一度をリークデテク
タで測定したのち、これらのガス濃度差から被試験体の
リーク量を測定することを特徴とするリークテスト方法
In a test container filled with a probe gas, the test object is housed, and the gas inside the test container is used to test for leaks from the test object, and the gas inside the test container is sampled for a certain period of time. A leak test method characterized in that the leak test method is performed at least twice within the same period, and the leakage amount of the test object is measured from the difference in the concentration of these gases after measuring the gas from the sun cylinder multiple times with a leak detector. .
JP4132982A 1982-03-16 1982-03-16 Leak testing method Pending JPS58158533A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4132982A JPS58158533A (en) 1982-03-16 1982-03-16 Leak testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4132982A JPS58158533A (en) 1982-03-16 1982-03-16 Leak testing method

Publications (1)

Publication Number Publication Date
JPS58158533A true JPS58158533A (en) 1983-09-20

Family

ID=12605475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4132982A Pending JPS58158533A (en) 1982-03-16 1982-03-16 Leak testing method

Country Status (1)

Country Link
JP (1) JPS58158533A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58179330A (en) * 1982-04-14 1983-10-20 Shimadzu Corp Leak detecting device
JPS62175639A (en) * 1986-01-30 1987-08-01 Toyota Motor Corp Method and apparatus for calibrating leak of leak detector
WO1995027193A1 (en) * 1994-04-04 1995-10-12 Otsuka Pharmaceutical Factory, Inc. Pinhole detector

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58179330A (en) * 1982-04-14 1983-10-20 Shimadzu Corp Leak detecting device
JPH0456251B2 (en) * 1982-04-14 1992-09-07 Shimadzu Corp
JPS62175639A (en) * 1986-01-30 1987-08-01 Toyota Motor Corp Method and apparatus for calibrating leak of leak detector
WO1995027193A1 (en) * 1994-04-04 1995-10-12 Otsuka Pharmaceutical Factory, Inc. Pinhole detector
US5633454A (en) * 1994-04-04 1997-05-27 Otsuka Pharmaceutical Factory, Inc. Pinhole inspecting apparatus
AU688483B2 (en) * 1994-04-04 1998-03-12 Otsuka Pharmaceutical Factory, Inc. Pinhole detector

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