JPS58158439U - エピタキシヤル成長装置のコイル支え装置 - Google Patents

エピタキシヤル成長装置のコイル支え装置

Info

Publication number
JPS58158439U
JPS58158439U JP5526982U JP5526982U JPS58158439U JP S58158439 U JPS58158439 U JP S58158439U JP 5526982 U JP5526982 U JP 5526982U JP 5526982 U JP5526982 U JP 5526982U JP S58158439 U JPS58158439 U JP S58158439U
Authority
JP
Japan
Prior art keywords
coil
epitaxial growth
growth apparatus
frequency heating
coil support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5526982U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356043Y2 (cg-RX-API-DMAC7.html
Inventor
吉三 小宮山
宮崎　美彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP5526982U priority Critical patent/JPS58158439U/ja
Publication of JPS58158439U publication Critical patent/JPS58158439U/ja
Application granted granted Critical
Publication of JPH0356043Y2 publication Critical patent/JPH0356043Y2/ja
Granted legal-status Critical Current

Links

JP5526982U 1982-04-16 1982-04-16 エピタキシヤル成長装置のコイル支え装置 Granted JPS58158439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5526982U JPS58158439U (ja) 1982-04-16 1982-04-16 エピタキシヤル成長装置のコイル支え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5526982U JPS58158439U (ja) 1982-04-16 1982-04-16 エピタキシヤル成長装置のコイル支え装置

Publications (2)

Publication Number Publication Date
JPS58158439U true JPS58158439U (ja) 1983-10-22
JPH0356043Y2 JPH0356043Y2 (cg-RX-API-DMAC7.html) 1991-12-16

Family

ID=30065855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5526982U Granted JPS58158439U (ja) 1982-04-16 1982-04-16 エピタキシヤル成長装置のコイル支え装置

Country Status (1)

Country Link
JP (1) JPS58158439U (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0356043Y2 (cg-RX-API-DMAC7.html) 1991-12-16

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