JPS58156599A - 3−5族化合物半導体単結晶の製造方法 - Google Patents
3−5族化合物半導体単結晶の製造方法Info
- Publication number
- JPS58156599A JPS58156599A JP3978582A JP3978582A JPS58156599A JP S58156599 A JPS58156599 A JP S58156599A JP 3978582 A JP3978582 A JP 3978582A JP 3978582 A JP3978582 A JP 3978582A JP S58156599 A JPS58156599 A JP S58156599A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- temperature
- thermocouple
- single crystal
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3978582A JPS58156599A (ja) | 1982-03-12 | 1982-03-12 | 3−5族化合物半導体単結晶の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3978582A JPS58156599A (ja) | 1982-03-12 | 1982-03-12 | 3−5族化合物半導体単結晶の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58156599A true JPS58156599A (ja) | 1983-09-17 |
JPS6229394B2 JPS6229394B2 (enrdf_load_stackoverflow) | 1987-06-25 |
Family
ID=12562585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3978582A Granted JPS58156599A (ja) | 1982-03-12 | 1982-03-12 | 3−5族化合物半導体単結晶の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58156599A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02145499A (ja) * | 1988-12-28 | 1990-06-04 | Tsuaitowan Faaren Gonie Jishu Ienjiou Yuen | 砒化ガリウム単結晶の成長方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01219990A (ja) * | 1988-02-19 | 1989-09-01 | Internatl Business Mach Corp <Ibm> | 紙幣処理装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5215073A (en) * | 1975-07-26 | 1977-02-04 | Setozaki Tekkosho:Kk | Cargo ship having movable deck |
JPS56100200A (en) * | 1980-01-17 | 1981-08-11 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing gallium arsenide single crystal |
-
1982
- 1982-03-12 JP JP3978582A patent/JPS58156599A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5215073A (en) * | 1975-07-26 | 1977-02-04 | Setozaki Tekkosho:Kk | Cargo ship having movable deck |
JPS56100200A (en) * | 1980-01-17 | 1981-08-11 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing gallium arsenide single crystal |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02145499A (ja) * | 1988-12-28 | 1990-06-04 | Tsuaitowan Faaren Gonie Jishu Ienjiou Yuen | 砒化ガリウム単結晶の成長方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6229394B2 (enrdf_load_stackoverflow) | 1987-06-25 |
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