JPS581543B2 - ハンドウタイソウチ ノ セイゾウホウホウ - Google Patents

ハンドウタイソウチ ノ セイゾウホウホウ

Info

Publication number
JPS581543B2
JPS581543B2 JP49045032A JP4503274A JPS581543B2 JP S581543 B2 JPS581543 B2 JP S581543B2 JP 49045032 A JP49045032 A JP 49045032A JP 4503274 A JP4503274 A JP 4503274A JP S581543 B2 JPS581543 B2 JP S581543B2
Authority
JP
Japan
Prior art keywords
film
aluminum
photoresist
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49045032A
Other languages
English (en)
Japanese (ja)
Other versions
JPS50141277A (enrdf_load_stackoverflow
Inventor
橋本忠宏
島倉啓一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP49045032A priority Critical patent/JPS581543B2/ja
Publication of JPS50141277A publication Critical patent/JPS50141277A/ja
Publication of JPS581543B2 publication Critical patent/JPS581543B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP49045032A 1974-04-23 1974-04-23 ハンドウタイソウチ ノ セイゾウホウホウ Expired JPS581543B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49045032A JPS581543B2 (ja) 1974-04-23 1974-04-23 ハンドウタイソウチ ノ セイゾウホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49045032A JPS581543B2 (ja) 1974-04-23 1974-04-23 ハンドウタイソウチ ノ セイゾウホウホウ

Publications (2)

Publication Number Publication Date
JPS50141277A JPS50141277A (enrdf_load_stackoverflow) 1975-11-13
JPS581543B2 true JPS581543B2 (ja) 1983-01-11

Family

ID=12707986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49045032A Expired JPS581543B2 (ja) 1974-04-23 1974-04-23 ハンドウタイソウチ ノ セイゾウホウホウ

Country Status (1)

Country Link
JP (1) JPS581543B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0484567U (enrdf_load_stackoverflow) * 1990-11-29 1992-07-22

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192068A (enrdf_load_stackoverflow) * 1975-02-10 1976-08-12
JPS5272580A (en) * 1975-12-15 1977-06-17 Fujitsu Ltd Production of semiconductor device
US5209815A (en) * 1991-06-06 1993-05-11 International Business Machines Corporation Method for forming patterned films on a substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0484567U (enrdf_load_stackoverflow) * 1990-11-29 1992-07-22

Also Published As

Publication number Publication date
JPS50141277A (enrdf_load_stackoverflow) 1975-11-13

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