JPS58153774A - 硬質被覆部材の製造法 - Google Patents
硬質被覆部材の製造法Info
- Publication number
- JPS58153774A JPS58153774A JP3531182A JP3531182A JPS58153774A JP S58153774 A JPS58153774 A JP S58153774A JP 3531182 A JP3531182 A JP 3531182A JP 3531182 A JP3531182 A JP 3531182A JP S58153774 A JPS58153774 A JP S58153774A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- coated
- coating
- ion
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 17
- 239000011248 coating agent Substances 0.000 title claims abstract description 16
- 238000002360 preparation method Methods 0.000 title 1
- 239000010432 diamond Substances 0.000 claims abstract description 28
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 9
- 229910001315 Tool steel Inorganic materials 0.000 claims abstract description 4
- 238000005468 ion implantation Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 10
- 150000002500 ions Chemical class 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910052786 argon Inorganic materials 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 229910000997 High-speed steel Inorganic materials 0.000 abstract description 3
- 230000009466 transformation Effects 0.000 abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052799 carbon Inorganic materials 0.000 abstract description 2
- 238000007737 ion beam deposition Methods 0.000 abstract description 2
- 239000011159 matrix material Substances 0.000 abstract 2
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 239000011247 coating layer Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- -1 iron group metals Chemical class 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3531182A JPS58153774A (ja) | 1982-03-05 | 1982-03-05 | 硬質被覆部材の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3531182A JPS58153774A (ja) | 1982-03-05 | 1982-03-05 | 硬質被覆部材の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58153774A true JPS58153774A (ja) | 1983-09-12 |
| JPH036219B2 JPH036219B2 (enrdf_load_stackoverflow) | 1991-01-29 |
Family
ID=12438252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3531182A Granted JPS58153774A (ja) | 1982-03-05 | 1982-03-05 | 硬質被覆部材の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58153774A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4650156A (en) * | 1984-05-30 | 1987-03-17 | Fuji Koki Manufacturing Co., Ltd. | Sealed type motor-operated flow control valve |
| US4707384A (en) * | 1984-06-27 | 1987-11-17 | Santrade Limited | Method for making a composite body coated with one or more layers of inorganic materials including CVD diamond |
| JPS6341419U (enrdf_load_stackoverflow) * | 1986-09-03 | 1988-03-18 | ||
| JPS63128169A (ja) * | 1986-11-18 | 1988-05-31 | Ulvac Corp | イオンプレ−テイング装置 |
| JPS63128170A (ja) * | 1986-11-18 | 1988-05-31 | Ulvac Corp | イオンプレ−テイング装置 |
| JPH02126843A (ja) * | 1988-07-11 | 1990-05-15 | Idemitsu Petrochem Co Ltd | 歯科用工具 |
| US5672382A (en) * | 1985-12-24 | 1997-09-30 | Sumitomo Electric Industries, Ltd. | Composite powder particle, composite body and method of preparation |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5763675U (enrdf_load_stackoverflow) * | 1980-09-29 | 1982-04-15 | ||
| JPS57106513A (en) * | 1980-12-22 | 1982-07-02 | Nippon Telegr & Teleph Corp <Ntt> | Formation of carbon film |
-
1982
- 1982-03-05 JP JP3531182A patent/JPS58153774A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5763675U (enrdf_load_stackoverflow) * | 1980-09-29 | 1982-04-15 | ||
| JPS57106513A (en) * | 1980-12-22 | 1982-07-02 | Nippon Telegr & Teleph Corp <Ntt> | Formation of carbon film |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4650156A (en) * | 1984-05-30 | 1987-03-17 | Fuji Koki Manufacturing Co., Ltd. | Sealed type motor-operated flow control valve |
| US4703545A (en) * | 1984-05-30 | 1987-11-03 | Fuji Koki Manufacturing Co., Ltd. | Method for assembling a sealed type motor-operated flow control valve |
| US4707384A (en) * | 1984-06-27 | 1987-11-17 | Santrade Limited | Method for making a composite body coated with one or more layers of inorganic materials including CVD diamond |
| US5672382A (en) * | 1985-12-24 | 1997-09-30 | Sumitomo Electric Industries, Ltd. | Composite powder particle, composite body and method of preparation |
| JPS6341419U (enrdf_load_stackoverflow) * | 1986-09-03 | 1988-03-18 | ||
| JPS63128169A (ja) * | 1986-11-18 | 1988-05-31 | Ulvac Corp | イオンプレ−テイング装置 |
| JPS63128170A (ja) * | 1986-11-18 | 1988-05-31 | Ulvac Corp | イオンプレ−テイング装置 |
| JPH02126843A (ja) * | 1988-07-11 | 1990-05-15 | Idemitsu Petrochem Co Ltd | 歯科用工具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH036219B2 (enrdf_load_stackoverflow) | 1991-01-29 |
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