JPS58151638U - 水素含有珪素物質の連続製造装置 - Google Patents

水素含有珪素物質の連続製造装置

Info

Publication number
JPS58151638U
JPS58151638U JP4883482U JP4883482U JPS58151638U JP S58151638 U JPS58151638 U JP S58151638U JP 4883482 U JP4883482 U JP 4883482U JP 4883482 U JP4883482 U JP 4883482U JP S58151638 U JPS58151638 U JP S58151638U
Authority
JP
Japan
Prior art keywords
hydrogen
continuous production
containing silicon
silicon materials
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4883482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6215212Y2 (enExample
Inventor
信行 吉岡
方紀 羽場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Original Assignee
Meidensha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp filed Critical Meidensha Corp
Priority to JP4883482U priority Critical patent/JPS58151638U/ja
Publication of JPS58151638U publication Critical patent/JPS58151638U/ja
Application granted granted Critical
Publication of JPS6215212Y2 publication Critical patent/JPS6215212Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP4883482U 1982-04-06 1982-04-06 水素含有珪素物質の連続製造装置 Granted JPS58151638U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4883482U JPS58151638U (ja) 1982-04-06 1982-04-06 水素含有珪素物質の連続製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4883482U JPS58151638U (ja) 1982-04-06 1982-04-06 水素含有珪素物質の連続製造装置

Publications (2)

Publication Number Publication Date
JPS58151638U true JPS58151638U (ja) 1983-10-11
JPS6215212Y2 JPS6215212Y2 (enExample) 1987-04-17

Family

ID=30059734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4883482U Granted JPS58151638U (ja) 1982-04-06 1982-04-06 水素含有珪素物質の連続製造装置

Country Status (1)

Country Link
JP (1) JPS58151638U (enExample)

Also Published As

Publication number Publication date
JPS6215212Y2 (enExample) 1987-04-17

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