JPS58148B2 - デンシジユウ - Google Patents

デンシジユウ

Info

Publication number
JPS58148B2
JPS58148B2 JP47083891A JP8389172A JPS58148B2 JP S58148 B2 JPS58148 B2 JP S58148B2 JP 47083891 A JP47083891 A JP 47083891A JP 8389172 A JP8389172 A JP 8389172A JP S58148 B2 JPS58148 B2 JP S58148B2
Authority
JP
Japan
Prior art keywords
wehnelt electrode
filament
electron gun
electron
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47083891A
Other languages
English (en)
Japanese (ja)
Other versions
JPS4940475A (OSRAM
Inventor
田中昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP47083891A priority Critical patent/JPS58148B2/ja
Priority to GB3093573A priority patent/GB1430964A/en
Priority to US377812A priority patent/US3890533A/en
Priority to DE19732336851 priority patent/DE2336851C3/de
Priority to FR7330340A priority patent/FR2197230B1/fr
Publication of JPS4940475A publication Critical patent/JPS4940475A/ja
Publication of JPS58148B2 publication Critical patent/JPS58148B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP47083891A 1972-08-22 1972-08-22 デンシジユウ Expired JPS58148B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP47083891A JPS58148B2 (ja) 1972-08-22 1972-08-22 デンシジユウ
GB3093573A GB1430964A (en) 1972-08-22 1973-06-28 Thermionic emission type electron gun
US377812A US3890533A (en) 1972-08-22 1973-07-09 Thermal emission type electron gun
DE19732336851 DE2336851C3 (de) 1972-08-22 1973-07-19 Glühemlssions-Elektronenquelle
FR7330340A FR2197230B1 (OSRAM) 1972-08-22 1973-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47083891A JPS58148B2 (ja) 1972-08-22 1972-08-22 デンシジユウ

Publications (2)

Publication Number Publication Date
JPS4940475A JPS4940475A (OSRAM) 1974-04-16
JPS58148B2 true JPS58148B2 (ja) 1983-01-05

Family

ID=13815254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47083891A Expired JPS58148B2 (ja) 1972-08-22 1972-08-22 デンシジユウ

Country Status (4)

Country Link
US (1) US3890533A (OSRAM)
JP (1) JPS58148B2 (OSRAM)
FR (1) FR2197230B1 (OSRAM)
GB (1) GB1430964A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5075765A (OSRAM) * 1973-11-06 1975-06-21
JPS576790B2 (OSRAM) * 1974-05-13 1982-02-06
JPS57128433A (en) * 1980-12-27 1982-08-10 Denki Kagaku Kogyo Kk High luminance electron gun
US4695773A (en) * 1981-12-18 1987-09-22 The Perkin-Elmer Corporation Field emission gun electrode geometry for improved focus stability
JPS61173443A (ja) * 1985-01-25 1986-08-05 Natl Inst For Res In Inorg Mater 電界放射型電子銃
JPH0648619B2 (ja) * 1989-04-20 1994-06-22 北海道電力株式会社 電子銃装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE434952A (OSRAM) * 1938-07-16
US3141993A (en) * 1959-12-24 1964-07-21 Zeiss Jena Veb Carl Very fine beam electron gun
US3185882A (en) * 1961-01-16 1965-05-25 Eitel Mccullough Inc Electron discharge device including cathode-focus electrode assemblies therefor
NL278366A (OSRAM) * 1961-05-27
US3383536A (en) * 1964-09-22 1968-05-14 Westinghouse Electric Corp Cathode ray tube generating circular beam by lineal filament critically spaced from circular aperture

Also Published As

Publication number Publication date
DE2336851A1 (de) 1974-03-21
JPS4940475A (OSRAM) 1974-04-16
DE2336851B2 (de) 1976-08-12
US3890533A (en) 1975-06-17
FR2197230A1 (OSRAM) 1974-03-22
FR2197230B1 (OSRAM) 1976-09-17
GB1430964A (en) 1976-04-07

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