JPS58147118A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58147118A
JPS58147118A JP57029931A JP2993182A JPS58147118A JP S58147118 A JPS58147118 A JP S58147118A JP 57029931 A JP57029931 A JP 57029931A JP 2993182 A JP2993182 A JP 2993182A JP S58147118 A JPS58147118 A JP S58147118A
Authority
JP
Japan
Prior art keywords
wafer
orientation
cutaway
facets
facet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57029931A
Other languages
English (en)
Japanese (ja)
Other versions
JPH032337B2 (OSRAM
Inventor
Masanori Sato
正憲 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57029931A priority Critical patent/JPS58147118A/ja
Publication of JPS58147118A publication Critical patent/JPS58147118A/ja
Publication of JPH032337B2 publication Critical patent/JPH032337B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57029931A 1982-02-26 1982-02-26 半導体装置の製造方法 Granted JPS58147118A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57029931A JPS58147118A (ja) 1982-02-26 1982-02-26 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57029931A JPS58147118A (ja) 1982-02-26 1982-02-26 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58147118A true JPS58147118A (ja) 1983-09-01
JPH032337B2 JPH032337B2 (OSRAM) 1991-01-14

Family

ID=12289730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57029931A Granted JPS58147118A (ja) 1982-02-26 1982-02-26 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58147118A (OSRAM)

Also Published As

Publication number Publication date
JPH032337B2 (OSRAM) 1991-01-14

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