JPS58143866A - レジスト剤塗布装置 - Google Patents

レジスト剤塗布装置

Info

Publication number
JPS58143866A
JPS58143866A JP57022768A JP2276882A JPS58143866A JP S58143866 A JPS58143866 A JP S58143866A JP 57022768 A JP57022768 A JP 57022768A JP 2276882 A JP2276882 A JP 2276882A JP S58143866 A JPS58143866 A JP S58143866A
Authority
JP
Japan
Prior art keywords
resist
wafer
tube
guide tube
back surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57022768A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244405B2 (enExample
Inventor
Akira Tanaka
章 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP57022768A priority Critical patent/JPS58143866A/ja
Publication of JPS58143866A publication Critical patent/JPS58143866A/ja
Publication of JPS6244405B2 publication Critical patent/JPS6244405B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57022768A 1982-02-17 1982-02-17 レジスト剤塗布装置 Granted JPS58143866A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57022768A JPS58143866A (ja) 1982-02-17 1982-02-17 レジスト剤塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57022768A JPS58143866A (ja) 1982-02-17 1982-02-17 レジスト剤塗布装置

Publications (2)

Publication Number Publication Date
JPS58143866A true JPS58143866A (ja) 1983-08-26
JPS6244405B2 JPS6244405B2 (enExample) 1987-09-21

Family

ID=12091847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57022768A Granted JPS58143866A (ja) 1982-02-17 1982-02-17 レジスト剤塗布装置

Country Status (1)

Country Link
JP (1) JPS58143866A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0381626U (enExample) * 1989-12-11 1991-08-21
JPH04363169A (ja) * 1991-05-08 1992-12-16 Hitachi Ltd フォトレジストの塗布方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0381626U (enExample) * 1989-12-11 1991-08-21
JPH04363169A (ja) * 1991-05-08 1992-12-16 Hitachi Ltd フォトレジストの塗布方法

Also Published As

Publication number Publication date
JPS6244405B2 (enExample) 1987-09-21

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