JPS58137947A - 電子光学鏡筒 - Google Patents

電子光学鏡筒

Info

Publication number
JPS58137947A
JPS58137947A JP57020143A JP2014382A JPS58137947A JP S58137947 A JPS58137947 A JP S58137947A JP 57020143 A JP57020143 A JP 57020143A JP 2014382 A JP2014382 A JP 2014382A JP S58137947 A JPS58137947 A JP S58137947A
Authority
JP
Japan
Prior art keywords
deflector
blanking
electron
deflection
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57020143A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568847B2 (enExample
Inventor
Mamoru Nakasuji
護 中筋
Kanji Wada
和田　寛次
Shunichi Sano
俊一 佐野
Shigetomo Yamazaki
山崎　茂朋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Akashi Seisakusho KK
Original Assignee
Toshiba Corp
Akashi Seisakusho KK
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Akashi Seisakusho KK, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57020143A priority Critical patent/JPS58137947A/ja
Publication of JPS58137947A publication Critical patent/JPS58137947A/ja
Publication of JPH0568847B2 publication Critical patent/JPH0568847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP57020143A 1982-02-10 1982-02-10 電子光学鏡筒 Granted JPS58137947A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57020143A JPS58137947A (ja) 1982-02-10 1982-02-10 電子光学鏡筒

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57020143A JPS58137947A (ja) 1982-02-10 1982-02-10 電子光学鏡筒

Publications (2)

Publication Number Publication Date
JPS58137947A true JPS58137947A (ja) 1983-08-16
JPH0568847B2 JPH0568847B2 (enExample) 1993-09-29

Family

ID=12018918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57020143A Granted JPS58137947A (ja) 1982-02-10 1982-02-10 電子光学鏡筒

Country Status (1)

Country Link
JP (1) JPS58137947A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089051A (ja) * 1983-10-21 1985-05-18 Jeol Ltd イオンビ−ム装置
US20160071682A1 (en) * 2013-01-18 2016-03-10 Nuflare Technology, Inc. Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322375A (en) * 1976-08-13 1978-03-01 Jeol Ltd Beam blanking device
JPS5596636A (en) * 1979-01-19 1980-07-23 Zeiss Jena Veb Carl Method of and device for controlling formed electron beam cutting machine
JPS57122518A (en) * 1981-01-22 1982-07-30 Toshiba Corp Electro-optical body tube

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322375A (en) * 1976-08-13 1978-03-01 Jeol Ltd Beam blanking device
JPS5596636A (en) * 1979-01-19 1980-07-23 Zeiss Jena Veb Carl Method of and device for controlling formed electron beam cutting machine
JPS57122518A (en) * 1981-01-22 1982-07-30 Toshiba Corp Electro-optical body tube

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089051A (ja) * 1983-10-21 1985-05-18 Jeol Ltd イオンビ−ム装置
US20160071682A1 (en) * 2013-01-18 2016-03-10 Nuflare Technology, Inc. Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
US9824849B2 (en) * 2013-01-18 2017-11-21 Nuflare Technology, Inc. Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
US10192712B2 (en) 2013-01-18 2019-01-29 Nuflare Technology, Inc. Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
US11145483B2 (en) 2013-01-18 2021-10-12 Nuflare Technology, Inc. Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

Also Published As

Publication number Publication date
JPH0568847B2 (enExample) 1993-09-29

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