JPH0568847B2 - - Google Patents

Info

Publication number
JPH0568847B2
JPH0568847B2 JP57020143A JP2014382A JPH0568847B2 JP H0568847 B2 JPH0568847 B2 JP H0568847B2 JP 57020143 A JP57020143 A JP 57020143A JP 2014382 A JP2014382 A JP 2014382A JP H0568847 B2 JPH0568847 B2 JP H0568847B2
Authority
JP
Japan
Prior art keywords
deflector
electron
blanking
deflection
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57020143A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58137947A (ja
Inventor
Mamoru Nakasuji
Kanji Wada
Shunichi Sano
Shigetomo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Topcon Corp
Original Assignee
Toshiba Corp
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Topcon Corp filed Critical Toshiba Corp
Priority to JP57020143A priority Critical patent/JPS58137947A/ja
Publication of JPS58137947A publication Critical patent/JPS58137947A/ja
Publication of JPH0568847B2 publication Critical patent/JPH0568847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP57020143A 1982-02-10 1982-02-10 電子光学鏡筒 Granted JPS58137947A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57020143A JPS58137947A (ja) 1982-02-10 1982-02-10 電子光学鏡筒

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57020143A JPS58137947A (ja) 1982-02-10 1982-02-10 電子光学鏡筒

Publications (2)

Publication Number Publication Date
JPS58137947A JPS58137947A (ja) 1983-08-16
JPH0568847B2 true JPH0568847B2 (enExample) 1993-09-29

Family

ID=12018918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57020143A Granted JPS58137947A (ja) 1982-02-10 1982-02-10 電子光学鏡筒

Country Status (1)

Country Link
JP (1) JPS58137947A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089051A (ja) * 1983-10-21 1985-05-18 Jeol Ltd イオンビ−ム装置
JP6087154B2 (ja) * 2013-01-18 2017-03-01 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置、試料面へのビーム入射角調整方法、および荷電粒子ビーム描画方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322375A (en) * 1976-08-13 1978-03-01 Jeol Ltd Beam blanking device
JPS5596636A (en) * 1979-01-19 1980-07-23 Zeiss Jena Veb Carl Method of and device for controlling formed electron beam cutting machine
JPS57122518A (en) * 1981-01-22 1982-07-30 Toshiba Corp Electro-optical body tube

Also Published As

Publication number Publication date
JPS58137947A (ja) 1983-08-16

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