JPS58137782A - 薄膜型固体ｘ線センサ− - Google Patents
薄膜型固体ｘ線センサ−Info
- Publication number
- JPS58137782A JPS58137782A JP57019753A JP1975382A JPS58137782A JP S58137782 A JPS58137782 A JP S58137782A JP 57019753 A JP57019753 A JP 57019753A JP 1975382 A JP1975382 A JP 1975382A JP S58137782 A JPS58137782 A JP S58137782A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ray sensor
- photoconductor
- upper electrode
- transparent electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 10
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 24
- 230000000903 blocking effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract description 2
- 238000010030 laminating Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 70
- 230000035945 sensitivity Effects 0.000 description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 206010034972 Photosensitivity reaction Diseases 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000036211 photosensitivity Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 241000272201 Columbiformes Species 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- RPPBZEBXAAZZJH-UHFFFAOYSA-N cadmium telluride Chemical compound [Te]=[Cd] RPPBZEBXAAZZJH-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- 208000032843 Hemorrhage Diseases 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- 208000006011 Stroke Diseases 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 241000607479 Yersinia pestis Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- GNBHRKFJIUUOQI-UHFFFAOYSA-N fluorescein Chemical compound O1C(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 GNBHRKFJIUUOQI-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 210000001259 mesencephalon Anatomy 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000004508 polar body Anatomy 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 210000004872 soft tissue Anatomy 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Light Receiving Elements (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57019753A JPS58137782A (ja) | 1982-02-12 | 1982-02-12 | 薄膜型固体ｘ線センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57019753A JPS58137782A (ja) | 1982-02-12 | 1982-02-12 | 薄膜型固体ｘ線センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58137782A true JPS58137782A (ja) | 1983-08-16 |
| JPH0467350B2 JPH0467350B2 (enrdf_load_stackoverflow) | 1992-10-28 |
Family
ID=12008096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57019753A Granted JPS58137782A (ja) | 1982-02-12 | 1982-02-12 | 薄膜型固体ｘ線センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58137782A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6271881A (ja) * | 1985-09-26 | 1987-04-02 | Toshiba Corp | 放射線検出器 |
| FR2623019A1 (fr) * | 1987-11-10 | 1989-05-12 | Thomson Csf | Dispositif de prise d'image radiologique |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4978493A (enrdf_load_stackoverflow) * | 1972-11-30 | 1974-07-29 |
-
1982
- 1982-02-12 JP JP57019753A patent/JPS58137782A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4978493A (enrdf_load_stackoverflow) * | 1972-11-30 | 1974-07-29 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6271881A (ja) * | 1985-09-26 | 1987-04-02 | Toshiba Corp | 放射線検出器 |
| FR2623019A1 (fr) * | 1987-11-10 | 1989-05-12 | Thomson Csf | Dispositif de prise d'image radiologique |
| US4940901A (en) * | 1987-11-10 | 1990-07-10 | Thomson-Csf | X-ray imaging device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0467350B2 (enrdf_load_stackoverflow) | 1992-10-28 |
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