JPS5813485B2 - カゴウブツ ノ ゴウセイホウホウ - Google Patents

カゴウブツ ノ ゴウセイホウホウ

Info

Publication number
JPS5813485B2
JPS5813485B2 JP6363173A JP6363173A JPS5813485B2 JP S5813485 B2 JPS5813485 B2 JP S5813485B2 JP 6363173 A JP6363173 A JP 6363173A JP 6363173 A JP6363173 A JP 6363173A JP S5813485 B2 JPS5813485 B2 JP S5813485B2
Authority
JP
Japan
Prior art keywords
group
temperature
solution
composition
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6363173A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5010796A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
関保夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP6363173A priority Critical patent/JPS5813485B2/ja
Publication of JPS5010796A publication Critical patent/JPS5010796A/ja
Publication of JPS5813485B2 publication Critical patent/JPS5813485B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6363173A 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ Expired JPS5813485B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6363173A JPS5813485B2 (ja) 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6363173A JPS5813485B2 (ja) 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ

Publications (2)

Publication Number Publication Date
JPS5010796A JPS5010796A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-04
JPS5813485B2 true JPS5813485B2 (ja) 1983-03-14

Family

ID=13234872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6363173A Expired JPS5813485B2 (ja) 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ

Country Status (1)

Country Link
JP (1) JPS5813485B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572867U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-11-14 1980-05-20

Also Published As

Publication number Publication date
JPS5010796A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-04

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