JPS5010796A - - Google Patents

Info

Publication number
JPS5010796A
JPS5010796A JP6363173A JP6363173A JPS5010796A JP S5010796 A JPS5010796 A JP S5010796A JP 6363173 A JP6363173 A JP 6363173A JP 6363173 A JP6363173 A JP 6363173A JP S5010796 A JPS5010796 A JP S5010796A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6363173A
Other languages
Japanese (ja)
Other versions
JPS5813485B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6363173A priority Critical patent/JPS5813485B2/ja
Publication of JPS5010796A publication Critical patent/JPS5010796A/ja
Publication of JPS5813485B2 publication Critical patent/JPS5813485B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6363173A 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ Expired JPS5813485B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6363173A JPS5813485B2 (ja) 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6363173A JPS5813485B2 (ja) 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ

Publications (2)

Publication Number Publication Date
JPS5010796A true JPS5010796A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-04
JPS5813485B2 JPS5813485B2 (ja) 1983-03-14

Family

ID=13234872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6363173A Expired JPS5813485B2 (ja) 1973-06-05 1973-06-05 カゴウブツ ノ ゴウセイホウホウ

Country Status (1)

Country Link
JP (1) JPS5813485B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572867U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-11-14 1980-05-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572867U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-11-14 1980-05-20

Also Published As

Publication number Publication date
JPS5813485B2 (ja) 1983-03-14

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