JPS5813186A - 油回転真空ポンプ - Google Patents

油回転真空ポンプ

Info

Publication number
JPS5813186A
JPS5813186A JP10982581A JP10982581A JPS5813186A JP S5813186 A JPS5813186 A JP S5813186A JP 10982581 A JP10982581 A JP 10982581A JP 10982581 A JP10982581 A JP 10982581A JP S5813186 A JPS5813186 A JP S5813186A
Authority
JP
Japan
Prior art keywords
oil
exhaust valves
stage
exhaust valve
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10982581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02557B2 (enExample
Inventor
Toshio Nemoto
根本　利夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koki Holdings Co Ltd
Original Assignee
Hitachi Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Koki Co Ltd filed Critical Hitachi Koki Co Ltd
Priority to JP10982581A priority Critical patent/JPS5813186A/ja
Publication of JPS5813186A publication Critical patent/JPS5813186A/ja
Publication of JPH02557B2 publication Critical patent/JPH02557B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP10982581A 1981-07-13 1981-07-13 油回転真空ポンプ Granted JPS5813186A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10982581A JPS5813186A (ja) 1981-07-13 1981-07-13 油回転真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10982581A JPS5813186A (ja) 1981-07-13 1981-07-13 油回転真空ポンプ

Publications (2)

Publication Number Publication Date
JPS5813186A true JPS5813186A (ja) 1983-01-25
JPH02557B2 JPH02557B2 (enExample) 1990-01-08

Family

ID=14520161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10982581A Granted JPS5813186A (ja) 1981-07-13 1981-07-13 油回転真空ポンプ

Country Status (1)

Country Link
JP (1) JPS5813186A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005505697A (ja) * 2001-10-11 2005-02-24 ライボルト　ヴァークウム　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング 真空下で対象物を処理するためのマルチチャンバ装置並びにこのようなマルチチャンバ装置を排気する方法並びにそのための排気システム
WO2011037132A1 (ja) * 2009-09-25 2011-03-31 株式会社アルバック 油回転真空ポンプ
JP2021008833A (ja) * 2019-06-28 2021-01-28 株式会社アルバック 真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214490U (enExample) * 1975-07-18 1977-02-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214490U (enExample) * 1975-07-18 1977-02-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005505697A (ja) * 2001-10-11 2005-02-24 ライボルト　ヴァークウム　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング 真空下で対象物を処理するためのマルチチャンバ装置並びにこのようなマルチチャンバ装置を排気する方法並びにそのための排気システム
WO2011037132A1 (ja) * 2009-09-25 2011-03-31 株式会社アルバック 油回転真空ポンプ
JP2021008833A (ja) * 2019-06-28 2021-01-28 株式会社アルバック 真空ポンプ

Also Published As

Publication number Publication date
JPH02557B2 (enExample) 1990-01-08

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