JPS58123404A - ３次元的干渉計式長さ測定装置 - Google Patents

３次元的干渉計式長さ測定装置

Info

Publication number
JPS58123404A
JPS58123404A JP58001246A JP124683A JPS58123404A JP S58123404 A JPS58123404 A JP S58123404A JP 58001246 A JP58001246 A JP 58001246A JP 124683 A JP124683 A JP 124683A JP S58123404 A JPS58123404 A JP S58123404A
Authority
JP
Japan
Prior art keywords
mirror
measuring device
measurement
mirrors
workpiece support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58001246A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452402B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
エ−リツヒ・ハイナツハ−
ラインハルト・ル−デヴイヒ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of JPS58123404A publication Critical patent/JPS58123404A/ja
Publication of JPH0452402B2 publication Critical patent/JPH0452402B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP58001246A 1982-01-15 1983-01-10 ３次元的干渉計式長さ測定装置 Granted JPS58123404A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19823201007 DE3201007A1 (de) 1982-01-15 1982-01-15 Dreidimensionale interferometrische laengenmesseinrichtung
DE3201007.9 1982-01-15
DE3231719.0 1982-08-26

Publications (2)

Publication Number Publication Date
JPS58123404A true JPS58123404A (ja) 1983-07-22
JPH0452402B2 JPH0452402B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-21

Family

ID=6153087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58001246A Granted JPS58123404A (ja) 1982-01-15 1983-01-10 ３次元的干渉計式長さ測定装置

Country Status (2)

Country Link
JP (1) JPS58123404A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3201007A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0628612U (ja) * 1983-09-23 1994-04-15 カール−ツアイス−スチフツング 多軸測定器
JP2019219359A (ja) * 2018-06-22 2019-12-26 株式会社ミツトヨ 測定装置および測定方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10319711B4 (de) * 2003-05-02 2006-08-17 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur hochgenauen dimensionalen Messung an Messobjekten
DE102016013550B3 (de) 2016-11-08 2018-04-19 Rolf Klöden Profilmesssystem für eine Rauheits- und Konturmessung an einer Oberfläche eines Werkstücks
CN107883868B (zh) * 2017-10-24 2025-03-11 临沂大学 一种货箱三维测量仪装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5569004A (en) * 1978-11-18 1980-05-24 Toshiba Corp Measuring unit of amount of movement

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2159134C3 (de) * 1970-11-30 1978-05-24 Anritsu Electric Co. Ltd., Tokio Einrichtung zur interferometrischen Messung der Verschiebung eines Schlittens
JPS5117303B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1970-12-30 1976-06-01
US3884580A (en) * 1973-09-07 1975-05-20 Gerber Scientific Instr Co Apparatus for measuring and positioning by interferometry

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5569004A (en) * 1978-11-18 1980-05-24 Toshiba Corp Measuring unit of amount of movement

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0628612U (ja) * 1983-09-23 1994-04-15 カール−ツアイス−スチフツング 多軸測定器
JP2019219359A (ja) * 2018-06-22 2019-12-26 株式会社ミツトヨ 測定装置および測定方法
CN110631448A (zh) * 2018-06-22 2019-12-31 株式会社三丰 测量装置和测量方法
CN110631448B (zh) * 2018-06-22 2022-09-23 株式会社三丰 测量装置和测量方法

Also Published As

Publication number Publication date
DE3201007A1 (de) 1983-07-28
JPH0452402B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-21

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