JPS5569004A - Measuring unit of amount of movement - Google Patents
Measuring unit of amount of movementInfo
- Publication number
- JPS5569004A JPS5569004A JP14307778A JP14307778A JPS5569004A JP S5569004 A JPS5569004 A JP S5569004A JP 14307778 A JP14307778 A JP 14307778A JP 14307778 A JP14307778 A JP 14307778A JP S5569004 A JPS5569004 A JP S5569004A
- Authority
- JP
- Japan
- Prior art keywords
- output
- laser light
- unit
- signal
- counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To enable to output the output signal in wave length unit according to the amount of movement through the approximation with high accuracy in desired meter unit, by using the rate multiplier counter.
CONSTITUTION: The laser light from the laser light generator 13 is given to the plain mirror interference meters 15a and 15b via the beam splitter 14 to emit the flat mirrors 12a and 12b at the end surface of the stage 11 corresponded. Further, if the stage 11, for example, is moved toward the X axis, the reflection light causing the doppler effect is received at the interference meter 15a and given to the pulse converter 17a via the receiver 16a, and the converter 17a gives the pulsive signal in wave length unit to the multiplier counter 18, by taking the beat with the measuring signal through the laser light from the unit 13 as the reference signal. Accordingly, the counter 18 produces the pulse output corresponding to the rate data set in advance as the desired meter unit output.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14307778A JPS5569004A (en) | 1978-11-18 | 1978-11-18 | Measuring unit of amount of movement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14307778A JPS5569004A (en) | 1978-11-18 | 1978-11-18 | Measuring unit of amount of movement |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5569004A true JPS5569004A (en) | 1980-05-24 |
Family
ID=15330370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14307778A Pending JPS5569004A (en) | 1978-11-18 | 1978-11-18 | Measuring unit of amount of movement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5569004A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58123404A (en) * | 1982-01-15 | 1983-07-22 | カ−ル・ツアイス−スチフツング | Three-element interferometer type length measuring device |
JPS60206134A (en) * | 1984-03-30 | 1985-10-17 | Toppan Printing Co Ltd | Minute machining process |
JPS62240805A (en) * | 1986-04-14 | 1987-10-21 | Mitsubishi Electric Corp | Length measuring apparatus |
JPH01267708A (en) * | 1988-04-20 | 1989-10-25 | Fanuc Ltd | Method for controlling servomotor |
EP0400649A2 (en) * | 1989-05-31 | 1990-12-05 | Dainippon Screen Mfg. Co., Ltd. | Unit conversion device for laser interferometic measuring machine |
-
1978
- 1978-11-18 JP JP14307778A patent/JPS5569004A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58123404A (en) * | 1982-01-15 | 1983-07-22 | カ−ル・ツアイス−スチフツング | Three-element interferometer type length measuring device |
JPH0452402B2 (en) * | 1982-01-15 | 1992-08-21 | Zeiss Stiftung | |
JPS60206134A (en) * | 1984-03-30 | 1985-10-17 | Toppan Printing Co Ltd | Minute machining process |
JPS62240805A (en) * | 1986-04-14 | 1987-10-21 | Mitsubishi Electric Corp | Length measuring apparatus |
JPH01267708A (en) * | 1988-04-20 | 1989-10-25 | Fanuc Ltd | Method for controlling servomotor |
EP0400649A2 (en) * | 1989-05-31 | 1990-12-05 | Dainippon Screen Mfg. Co., Ltd. | Unit conversion device for laser interferometic measuring machine |
US5184313A (en) * | 1989-05-31 | 1993-02-02 | Dainippon Screen Mfg. Co., Ltd. | Conversion device for laser interferometic measuring apparatus |
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