JPS5569004A - Measuring unit of amount of movement - Google Patents

Measuring unit of amount of movement

Info

Publication number
JPS5569004A
JPS5569004A JP14307778A JP14307778A JPS5569004A JP S5569004 A JPS5569004 A JP S5569004A JP 14307778 A JP14307778 A JP 14307778A JP 14307778 A JP14307778 A JP 14307778A JP S5569004 A JPS5569004 A JP S5569004A
Authority
JP
Japan
Prior art keywords
output
laser light
unit
signal
counter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14307778A
Other languages
Japanese (ja)
Inventor
Kuniyoshi Tanaka
Nobuo Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14307778A priority Critical patent/JPS5569004A/en
Publication of JPS5569004A publication Critical patent/JPS5569004A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To enable to output the output signal in wave length unit according to the amount of movement through the approximation with high accuracy in desired meter unit, by using the rate multiplier counter.
CONSTITUTION: The laser light from the laser light generator 13 is given to the plain mirror interference meters 15a and 15b via the beam splitter 14 to emit the flat mirrors 12a and 12b at the end surface of the stage 11 corresponded. Further, if the stage 11, for example, is moved toward the X axis, the reflection light causing the doppler effect is received at the interference meter 15a and given to the pulse converter 17a via the receiver 16a, and the converter 17a gives the pulsive signal in wave length unit to the multiplier counter 18, by taking the beat with the measuring signal through the laser light from the unit 13 as the reference signal. Accordingly, the counter 18 produces the pulse output corresponding to the rate data set in advance as the desired meter unit output.
COPYRIGHT: (C)1980,JPO&Japio
JP14307778A 1978-11-18 1978-11-18 Measuring unit of amount of movement Pending JPS5569004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14307778A JPS5569004A (en) 1978-11-18 1978-11-18 Measuring unit of amount of movement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14307778A JPS5569004A (en) 1978-11-18 1978-11-18 Measuring unit of amount of movement

Publications (1)

Publication Number Publication Date
JPS5569004A true JPS5569004A (en) 1980-05-24

Family

ID=15330370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14307778A Pending JPS5569004A (en) 1978-11-18 1978-11-18 Measuring unit of amount of movement

Country Status (1)

Country Link
JP (1) JPS5569004A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123404A (en) * 1982-01-15 1983-07-22 カ−ル・ツアイス−スチフツング Three-element interferometer type length measuring device
JPS60206134A (en) * 1984-03-30 1985-10-17 Toppan Printing Co Ltd Minute machining process
JPS62240805A (en) * 1986-04-14 1987-10-21 Mitsubishi Electric Corp Length measuring apparatus
JPH01267708A (en) * 1988-04-20 1989-10-25 Fanuc Ltd Method for controlling servomotor
EP0400649A2 (en) * 1989-05-31 1990-12-05 Dainippon Screen Mfg. Co., Ltd. Unit conversion device for laser interferometic measuring machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123404A (en) * 1982-01-15 1983-07-22 カ−ル・ツアイス−スチフツング Three-element interferometer type length measuring device
JPH0452402B2 (en) * 1982-01-15 1992-08-21 Zeiss Stiftung
JPS60206134A (en) * 1984-03-30 1985-10-17 Toppan Printing Co Ltd Minute machining process
JPS62240805A (en) * 1986-04-14 1987-10-21 Mitsubishi Electric Corp Length measuring apparatus
JPH01267708A (en) * 1988-04-20 1989-10-25 Fanuc Ltd Method for controlling servomotor
EP0400649A2 (en) * 1989-05-31 1990-12-05 Dainippon Screen Mfg. Co., Ltd. Unit conversion device for laser interferometic measuring machine
US5184313A (en) * 1989-05-31 1993-02-02 Dainippon Screen Mfg. Co., Ltd. Conversion device for laser interferometic measuring apparatus

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