JPH0452402B2 - - Google Patents

Info

Publication number
JPH0452402B2
JPH0452402B2 JP58001246A JP124683A JPH0452402B2 JP H0452402 B2 JPH0452402 B2 JP H0452402B2 JP 58001246 A JP58001246 A JP 58001246A JP 124683 A JP124683 A JP 124683A JP H0452402 B2 JPH0452402 B2 JP H0452402B2
Authority
JP
Japan
Prior art keywords
mirror
measuring device
measuring
feeler
interferometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58001246A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58123404A (ja
Inventor
Hainatsuhaa Eeritsuhi
Ruudeuihi Rainharuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of JPS58123404A publication Critical patent/JPS58123404A/ja
Publication of JPH0452402B2 publication Critical patent/JPH0452402B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP58001246A 1982-01-15 1983-01-10 ３次元的干渉計式長さ測定装置 Granted JPS58123404A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19823201007 DE3201007A1 (de) 1982-01-15 1982-01-15 Dreidimensionale interferometrische laengenmesseinrichtung
DE3201007.9 1982-01-15
DE3231719.0 1982-08-26

Publications (2)

Publication Number Publication Date
JPS58123404A JPS58123404A (ja) 1983-07-22
JPH0452402B2 true JPH0452402B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-21

Family

ID=6153087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58001246A Granted JPS58123404A (ja) 1982-01-15 1983-01-10 ３次元的干渉計式長さ測定装置

Country Status (2)

Country Link
JP (1) JPS58123404A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3201007A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3334460A1 (de) * 1983-09-23 1985-04-11 Fa. Carl Zeiss, 7920 Heidenheim Mehrkoordinaten-messmaschine
DE10319711B4 (de) * 2003-05-02 2006-08-17 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur hochgenauen dimensionalen Messung an Messobjekten
DE102016013550B3 (de) 2016-11-08 2018-04-19 Rolf Klöden Profilmesssystem für eine Rauheits- und Konturmessung an einer Oberfläche eines Werkstücks
CN107883868B (zh) * 2017-10-24 2025-03-11 临沂大学 一种货箱三维测量仪装置
JP7072990B2 (ja) * 2018-06-22 2022-05-23 株式会社ミツトヨ 測定装置および測定方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2159134C3 (de) * 1970-11-30 1978-05-24 Anritsu Electric Co. Ltd., Tokio Einrichtung zur interferometrischen Messung der Verschiebung eines Schlittens
JPS5117303B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1970-12-30 1976-06-01
US3884580A (en) * 1973-09-07 1975-05-20 Gerber Scientific Instr Co Apparatus for measuring and positioning by interferometry
JPS5569004A (en) * 1978-11-18 1980-05-24 Toshiba Corp Measuring unit of amount of movement

Also Published As

Publication number Publication date
DE3201007A1 (de) 1983-07-28
JPS58123404A (ja) 1983-07-22

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