JPS58122038A - 薄膜生成装置 - Google Patents
薄膜生成装置Info
- Publication number
- JPS58122038A JPS58122038A JP510882A JP510882A JPS58122038A JP S58122038 A JPS58122038 A JP S58122038A JP 510882 A JP510882 A JP 510882A JP 510882 A JP510882 A JP 510882A JP S58122038 A JPS58122038 A JP S58122038A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- substrate
- grid
- film
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 7
- 239000010408 film Substances 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 abstract description 23
- 239000002245 particle Substances 0.000 abstract description 14
- 230000005684 electric field Effects 0.000 description 7
- 239000004575 stone Substances 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP510882A JPS58122038A (ja) | 1982-01-16 | 1982-01-16 | 薄膜生成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP510882A JPS58122038A (ja) | 1982-01-16 | 1982-01-16 | 薄膜生成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58122038A true JPS58122038A (ja) | 1983-07-20 |
| JPH0124536B2 JPH0124536B2 (OSRAM) | 1989-05-12 |
Family
ID=11602157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP510882A Granted JPS58122038A (ja) | 1982-01-16 | 1982-01-16 | 薄膜生成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58122038A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60147114A (ja) * | 1984-01-11 | 1985-08-03 | Daihen Corp | 光起電力素子の製造装置 |
| JP2010121156A (ja) * | 2008-11-18 | 2010-06-03 | Fuji Electric Holdings Co Ltd | 容量結合型プラズマｃｖｄ装置 |
-
1982
- 1982-01-16 JP JP510882A patent/JPS58122038A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60147114A (ja) * | 1984-01-11 | 1985-08-03 | Daihen Corp | 光起電力素子の製造装置 |
| JP2010121156A (ja) * | 2008-11-18 | 2010-06-03 | Fuji Electric Holdings Co Ltd | 容量結合型プラズマｃｖｄ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0124536B2 (OSRAM) | 1989-05-12 |
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